• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.5
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• pp.2267-2271
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• 2011

This study was focused on getting p-type copper-oxide thin-film semiconductors suitable for p-channel thin-film transistors. Vacuum thermal evaporation and thermal annealing were used to get copper-oxide thin-film semiconductor having properties adoptable as an active layer of thin-film transistors. n-type thin films having electron carrier density of about $10^{22}\;cm^{-3}$ before thermal annealing was converted to p-type thin films having hole carrier density of about $10^{16}\;cm^{-3}$ as the thermal annealing conditions were optimized.

• Fire Science and Engineering
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• v.19 no.2 s.58
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• pp.29-36
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• 2005

We carried out discharge and fire extinguishing tests of new inert gas clean agent, which consists of $92\%$ nitrogen and $8\%$ carbon dioxide, as an alternative of Halon that is banned by Montreal Protocol to protect the ozone layer of the earth. Discharge and fire extinguishing tests were performed in $27m^3$ and $190m^3$ rooms with piping which allows gaseous agent to transport from storage to test rooms. We confirmed that it took less than regulation time, 60 seconds for the discharge of over $95\%$ initial charged amounts. Discharge test variables were piping length and orifice size. Fire extinguishing tests verified that this new inert gas clean agent is suitable for both n-Heptane fire and deep seated fire of wood crib.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.1
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• pp.76-87
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• 2005

In this paper, we propose a new profile, ROHC(RObust Header Compression) profile 7, for SCTP with ROHC for applying robust header compression SCTP, which is a transport layer protocol. The proposed new profile 7 adds a new field of 1 or 2 byte size on the existing SCTP packet header, which can make the SCTP stream to be diveded into acknowledgement stream and data stream. In addition, the classification of the stream can be used for recovering fault context. Consequently, in the case of using proposed ROHC-SCTP, it is possible to reduce the SCTP header overhead rate and also can be saved bandwidth.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.120-120
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• 2003

The metallic oxide nanomaterials including ZnO, Ga$_2$O$_3$, TiO$_2$, and SnO$_2$ have been synthesized by a number of methods including laser ablation, arc discharge, thermal annealing procedure, catalytic growth processes, and vapor transport. We have been interested in preparing the nanomaterials of Ga$_2$O$_3$, which is a wide band gap semiconductor (E$_{g}$ =4.9 eV) and used as insulating oxide layer for all gallium-based semiconductor. Ga$_2$O$_3$ is stable at high temperature and a transparent oxide, which has potential application in optoelectronic devices. The Ga$_2$O$_3$ nanoparticles and nanobelts were produced using GaN single crystals, which were grown by flux method inside SUS$^{TM}$ cell using a Na flux and exhibit plate-like morphologies with 4 ~ 5 mm in size. In these experiments, the conventional electric furnace was used. GaN single crystals were pulverized in form of powder for the growth of Ga$_2$O$_3$ nanomaterials. The structure, morphology and composition of the products were studied mainly by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and high-resolution transmission electron microscopy (HRTEM).).

• Magazine of the Korean Society of Agricultural Engineers
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• v.39 no.2
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• pp.62-73
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• 1997

The application of nutrients and pesticides to agricultural lands has been reported to contribute to groundwater contamination, which can be explained by preferential flow in lieu of convective-dispersive flow. An one-dimensional numerical model depicting preferential water and solute movement was modified to describe multi-layer flows. The model is based on a piecewise linear conductivity function. By combining conservation of mass and Darcy's law and using the method of characteristics a solution is obtained for water flow in which water moves at distinct velocities in different flow regions instead of an average velocity for the whole profile. The model allows transfer ofqr solutes between pore groups. The transfer is characterized by assuming mixing coefficients. The model was applied to undisturbed soil columns and an experiment site with structured sandy clay loam soil. Chloride, bromide, and 2, 4-D were used as tracers. Simulated solutes concentrations were in good agreement with the soil column data and field data in which preferential flow of solute is significant. The proposed model is capable of describing preferential solute transport under laboratory and field conditions.

• The Journal of the Korea institute of electronic communication sciences
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• v.7 no.5
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• pp.983-989
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• 2012

IEEE 802.3az LPI mechanism allows an Ethernet link to reduce power consumption by entering a low-power sleeping mode and letting some components being powered off when there is no data to be transmitted through the link. However, if small amount of packets are being sent periodically, such a mechanism can not obtain energy efficiency due to a high overhead caused by excessive mode transitions. In this paper, we propose an enhanced LPI mechanism which can perform state transition adaptively based on the traffic characteristics on transport layer and network status. This simulation result shows that proposed mechanism improves energy efficiency than LPI mechanism with respect to energy consumption rate for various traffic loads.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.12
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• pp.1039-1044
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• 2009

Red color OLED has been fabricated by the doping method apply to CBP using co-evaporation, GDI4349 of phosphorescent dopant, and rubrene of fluorescent dopant. The OLED structure are multi-layer of ITO(150 nm)/ELM_HIL(50 nm)/ELM_HTL(30 nm)/CBP : Rubrene, GDI4349 (30 nm)/BAlq (30 nm)/LiF(0.7 nm)/Al (100 nm). Accomplished best result at 3 vol.% of rubrene when the OLEDs were made of 1, 3, 5, 7, 9 vol.% doped rubrene. The highest efficiency of 7.2 cd/A was resulted at 8 vol.% of GDI4349 when the OLEDs were made among 5, 8, 11, 14 vol.% of GDI4349. Obviously, the best concentration of rubrene at 3 vol.% and changing GDI4349 concentration to 5, 8, 11, 14 vol.% OLED dramatically enhanced characteristic of resulted 10.7 cd/A at 8 vol.% of GDI4349. This result would understand to analyse as the emission efficiency increases by energy transport efficiency increase using GDI4349 energy transfer when rubrene absorbs the energy from CBP of fluorescences host.

• Journal of computational fluids engineering
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• v.17 no.2
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• pp.11-20
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• 2012

In this paper, the authors test various open codes and commercial codes based on CFD technology on the wind field around the complex terrain, which is a very important transport physics in the event of forrest fire. To study the physical mechanism inside the transition from surface fire to crown fire, the wake flow behind a parallel array of trees is studied numerically to show the flow separation in the turbulent boundary layer. Two sites near to Kunsan National University are chosen for the measurement of real wind field, and obtained data are compared with those from various computational codes such as Wind-Ninja, NIST-FDS, ANSYS-CFX, and ANSYS-FlUENT, etc. Through this research, feasibility and accuracy of the present CFD codes are investigated quantitatively, compared with the measured data with AWS.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1277_1278
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• 2009

Amorphous oxide semiconductor $InGaZnO_4$(IGZO) is a very promising candidate of channel layer in transparent thin film trasisitor(TTFT) because of its high mobility and high transparency in visible light region. Amorphous IGZO films were deposited at room temperature on a fused silica substrate using pulsed laser deposition method. In-situ post annealing was carried out at 150-450C right after film deposition. The $O_2$ partial pressures during the deposition and the post annealing was fixed to 10mTorr. The electron transport properties of the amorphous IGZO films were improved by thermal annealing. The temperature range in which the improvement of the electrical properties, was 150C~300C.