• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제55권1호
• /
• pp.26-29
• /
• 2006

Transparent ZnO thin films were prepared by KrF pulsed laser deposition (PLD) technique and applied to a bottom-gate type thin film transistor device as an active channel layer. A high conductive crystalline Si substrate was used as an metal-like bottom gate and SiN insulating layer was then deposited by LPCVD(low pressure chemical vapour deposition). An aluminum layer was then vacuum evaporated and patterned to form a source/drain metal contact. Oxygen partial pressure and substrate temperature were varied during the ZnO PLD deposition process and their influence on the thin film properties were investigated by X-ray diffraction(XRD) and Hall-van der Pauw method. Optical transparency of the ZnO thin film was analyzed by UV-visible phometer. The resulting ZnO-TFT devices showed an on-off ration of $10^6$ and field effect mobility of 2.4-6.1 $cm^2/V{\cdot}s$.

• 한국산학기술학회논문지
• /
• 제19권1호
• /
• pp.105-112
• /
• 2018

본 논문은 로이유리(Low emissivity glass) 표면에 증착되어 있는 금속박막의 전도 특성을 이용하여 발열유리(Heatable glass)를 제작하는 방법에 대해 제안한다. 로이유리의 발열량은 로이유리 표면저항에 의한 주울(Joule) 열에 의존하므로 소재의 표면저항을 측정함으로써 예측 및 설계가 가능하다. 본 연구에서는 저방사층이 11nm인 소프트로이유리 시료에 각 50mm 간격으로 은(Ag) 전극을 형성시키고, 4단자법으로 면저항을 측정하여 로이유리의 소비전력과 발열량을 예측한 후에, 제작 및 실험을 통해 발열성능을 확인하였다. 기존의 발열유리 제작방법은 크게 두 가지로 일반유리(Normal glass)에 니크롬(Nichrome) 열선을 삽입하는 방법과, 일반유리에 전도성 투명박막을 증착하는 방법이 있다. 니크롬 열선 삽입 방식은 발열성능은 우수하나 유리 고유의 투명성을 저해하고, 전도성 투명박막을 증착하는 방법은 투명성은 양호하나 공정이 복잡하여 실용성이 저하된다. 본 논문에서는 주로 건축물의 단열효과 향상을 위해 사용되는 로이유리를 이용하여 로이유리 전면에 코팅되어 있는 전도성 금속박막에 레이저 빔을 조사하여 원하는 발열성능을 가지는 발열유리를 제작하는 방법을 제안한다. 제안된 방법은 기존의 니크롬 열선을 삽입하는 방법에 비해 투명성이 양호하고, 전도성 투명박막을 증착하는 방법에 비해 제작과정이 보다 수월함을 확인하였다. 아울러, 레이저를 조사하여 로이유리의 표면 박막을 패터닝(Patterning) 하는 형태에 따른 발열특성의 비교와 로이유리에 적합한 레이저 출력조건을 제시하고자 한다.

• 반도체디스플레이기술학회지
• /
• 제19권3호
• /
• pp.88-92
• /
• 2020

As a highly conductive and transparent electrode, the optical transmittances of ITO/Ag/ITO were simulated and compared with the experimental results. The simulations are based on the finite-difference time-domain (FDTD) method in solving linear Maxwell equations. In our simulations, the computation domain is set in the XZ-plane with 3D dimension, and a plane wave with variable wavelengths ranging from 250 nm to 850 nm is incident in the z-direction at normal incidence to the ITO/Ag/ITO film surrounded by free-air space. As the results through both simulations and experiments, it was shown that the thickness combinations by the ITO layers of about 40 nm and the Ag layer of about 10 nm could be most suitable conditions as a high conductive transparent electrode having the transmittance similar to that of a single ITO layer.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
• /
• pp.320-320
• /
• 2007

Nowadays, ZnO thin films are investigated as transparent conductive electrodes for use in optoelectronics devices including flat displays, thin films transistors, solar cells because of their unique optical and electrical properties. For the use as transparent conductive electrodes, a film has to have low resistivity, high absorption in the ultra violent light region and high optical transmission in the visible region. Different technologies such as electron beam evaporation, chemical vapor deposition, laser evaporation, DC and RF magnetron sputtering and have been reported to produce thin films of ZnO with adequate performance for applications. However, highly transparent and conductive doped-ZnO thin films deposited by a metal-organic decomposition method have not been reported before. In this work, the effect of dopant concentration, heating treatment and annealing in areducing atmosphere on the structure, morphology, electrical and optical properties of ZnO thin films deposited on glass substrates by a Sol-gel method are investigated.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.454-454
• /
• 2010

In order to achieve a high efficient a-Si solar cell, the TCO (transparent conductive oxide) substrates are required to be a low sheet resistivity, a high transparency, and a textured surface with light trapping effect. Recently, a zinc oxide (ZnO) thin film attracts our attention as new coating material having a good transparent and conductive for TCO of solar cells. In this paper the optical properties of $H_2$ post-treated BZO (boron doped ZnO, ZnO:B) thin film are investigated with $O_2$-plasma treatment. The BZO thin films by MOCVD (Metal Organic Chemical Vapor Deposition) are investigated and the samples of $H_2$ post-treated BZO thin film are tested with $O_2$-plasma treatment by plasma treatment system with 13.56 MHz as RIE (Reactive Ion Etching) type. We measured the optical properties and surface morphology of BZO thin film with and without $O_2$-plasma treatment. The optical properties such as transmittance, reflectance and haze are measured with integrating sphere and ellipsometer. This result of the BZO thin film with and without $O_2$-plasma treatment is application to the TCO for solar cells.

• 한국재료학회지
• /
• 제25권7호
• /
• pp.341-346
• /
• 2015

The feasibility of obtaining graphitic carbon films on targeted substrates without a catalyst and transfer step was explored through the pyrolysis of the botanical derivative camphor. In a horizontal quartz tube, camphor was subjected to a sequential process of evaporation and thermal decomposition; then, the decomposed product was deposited on a glass substrate. Analysis of the Raman spectra suggest that the deposited film is related to unintentionally doped graphitic carbon containing some $sp-sp^2$ linear carbon chains. The films were transparent in the visible range and electrically conductive, with a sheet resistance comparable to that of graphene. It was also demonstrated that graphitic films with similar properties can be reproduciblyobtained, while property control was readily achieved by varying the process temperature.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
• /
• pp.279-279
• /
• 2013

We report on the preparation of polydimethylsiloxane (PDMS) coated multi-walled carbon nanotubes (MWNTs) followed by their dispersion in various solvents. To disperse MWNTs without acids of surfactants, which are the commonly used methods, hydrophobic PDMS coating was selected. It was determined that the PDMS coated MWNTs are more dispersed in diverse solvents such as dimethyl formamide (DMF) and acetone than bare MWNTs. In case of DMF solvent, dispersion of MWNT was improved by 40 % upon PDMS-coating of MWNT, which was confirmed by UV/Vis absorption spectroscopy. In this work, the PDMS coated MWNTs dispersed solution was also used for the fabrication of film, which is conductive, transparent and superhydrophobic because of the reduced aggregation and increased water repellency of MWNTs.

• 한국재료학회지
• /
• 제22권10호
• /
• pp.562-568
• /
• 2012

Metal nanowires can be coated on various substrates to create transparent conducting films that can potentially replace the dominant transparent conductor, indium tin oxide, in displays, solar cells, organic light-emitting diodes, and electrochromic windows. One issue with these metal nanowire based transparent conductive films is that the resistance between the nanowires is still high because of their low aspect ratio. Here, we demonstrate high-performance transparent conductive films with silver nanofiber networks synthesized by a low-cost and scalable electrospinning process followed by two-step sequential thermal treatments. First, the PVP/$AgNO_3$ precursor nanofibers, which have an average diameter of 208 nm and are several thousands of micrometers in length, were synthesized by the electrospinning process. The thermal behavior and the phase and morphology evolution in the thermal treatment processes were systematically investigated to determine the thermal treatment atmosphere and temperature. PVP/$AgNO_3$ nanofibers were transformed stepwise into PVP/Ag and Ag nanofibers by two-step sequential thermal treatments (i.e., $150^{\circ}C$ in $H_2$ for 0.5 h and $300^{\circ}C$ in Ar for 3 h); however, the fibrous shape was perfectly maintained. The silver nanofibers have ultrahigh aspect ratios of up to 10000 and a small average diameter of 142 nm; they also have fused crossing points with ultra-low junction resistances, which result in high transmittance at low sheet resistance.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제37회 하계학술대회 초록집
• /
• pp.243-243
• /
• 2009

• 폴리머
• /
• 제36권4호
• /
• pp.531-535
• /
• 2012

폴리아닐린(PANI) 나노섬유를 전도성 충전제로 사용하여 광경화형 전도성 투명필름을 제조하였다. 화학산화중합(chemical oxidation polymerization)으로 나노섬유 구조의 산화형 폴리아닐린(ES-PANI)을 합성하였다. ES-PANI는 디도핑을 통해 환원형 폴리아닐린(EB-PANI)으로 유도하였다. 이것을 전도성 충전제의 전구체로 사용하여 도데실벤젠설폰산(DBSA)이 포함되어 있는 광경화형 레진에 분산시키면 재도핑된 재산화형 폴리아닐린(rES-PANI)을 얻을 수 있었다. 이런 과정을 통해 나노섬유 형태가 유지되면서 높은 전도성과 분산안정성이 우수한 광경화형 전도성 레진용액을 제조할 수 있었다. 제조된 광경화형 전도성 레진용액은 상온에서 3달 정도 두어도 rES-PANI 충전제의 침전물이 생기지 않았다. 또한 이 용액을 폴리(메틸 메타크릴레이트)(PMMA) 기재 위에 스핀코팅 후 광경화하여 약 $5{\mu}m$ 두께의 전도성 투명필름을 제조하였다. rES-PANI 나노섬유 농도가 1.4 wt%일 때 표면저항 $6.5{\times}10^8{\Omega}/sq$, 550 nm 파장에서 91.1%의 투과도를 보였다. ES-PANI의 디도핑-재도핑(dedoping-redoping) 과정을 통해 광경화형 전도성 레진용액에 분산된 PANI는 농도에 따라 필름표면저항과 광학적 투명도를 조절할 수 있는 대전방지 보호필름을 제작하는 새로운 방법을 제시하였다.