• Title/Summary/Keyword: Transition Structure

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A Basic Study on Establishment of the Ecological Landscape Planning Model (경관생태계획 모형설정을 위한 기초적 연구)

  • Ra, Jung-hwa;Cho, Hyun-Ju;Lee, Hyun-Taek
    • Journal of the Korean Institute of Landscape Architecture
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    • v.36 no.4
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    • pp.48-64
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    • 2008
  • The aim of this research is to set a systemic Ecological Landscape Planning Model to cope with the destroyed landscape problems which was caused by massive development project and thoughtless development in country areas. The summary of research result are as follows. As a result of analysis on domestic and international literature, there are 60 planning index items which are nature conservation area, landscape conservation area, and build and manage wetland biotope and so on. total number of planning index is 34 after finalizing the physical index items. As a result of on-spot research, all 34 planning index after literature analysis is existing. Also, there are 38 finally-selected index which includes 4 added planning index in the process of research like natural vegetation in frequently-used spot. As a result of importance analysis on detailed planning index, most are above 5 points, which is relatively high. As a result of factor analysis on patterning for the detailed planning index, it was classified with seven elements. The first Ecological Landscape Planning model was set with integrated analysis on result of pattering for the detailed planning index and importance of detailed planning index. Based on first model, to make more systematic landscape, the analysis of MCB was conducted. As a result of MCB analysis according to planning index, it is confirmed that each planning index shows maximum. As a result of importance analysis on the 9 plans keynote, the average importance point was 4.62 for conservation area and 4.54 for enrichment area respectively. By integrating the result of importance analysis on basic aims of the first model, MCB analysis and plans, we set the second Ecological Landscape Planning model. In vertical transition, for example, 'conservation area' showed the importance point above 5.2 for all planning index except setting recreational space. Also, the analysis on parallel structure showed that relation between 'additional improvement, management, and connection' and other planning index is above 5.3 and importance on correlation with 'the part which should be protected from nature and landscape' marked 6.07 which is the highest.

Rice Cultivation and Demographi Development in Korea : 1429-1918 (조선시대(朝鮮時代) 도작농업(稻作農業)의 발전(發展)과 인구증가(人口增加))

  • Lee, Ho Chol
    • Current Research on Agriculture and Life Sciences
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    • v.7
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    • pp.201-219
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    • 1989
  • Rice culture in Korea has a long history ranging over two thousand years. In the agriculture economy of pre-mordern Korea, however, its importantce was not as great as generally assumed. In fact, rice culture reached full development only after the 1920s when the Japanese colonial government carried out its drive to increase rice production in the Korea peninsula. It was not until the mid-1930s that rice became the staple in Korean diet. This can be attributed to two factors : (1) a mountainous topography that provides little irrigated fields and (2) a climate characterized by droughts in spring and heavy precipitation in summer. The present paper attempts to answer some of these questions. Specifically it will focus on these : Did the development of rice culture actually result in population growth? What are the salient features of agricultural develdpment and population grow in traditional Korea? Does the case of Korea conform the prevailing generalization about the agriculture in East Asia? I have discussed the development of rice culture and population growth in the Chos$\breve{o}$n dynasty, focusing on the relation between the rapid spread of transplanting and the rapid growth of population from the seventeenth to the nineteenth century. Here are my conclusions. (1) The spread of transplanting and other technological innovationsc contributed to the rapid growth of population in this period. However, we should also note that the impact of rice culture on population growth was rather limited, for rice culture was not the mainstay of agricultural economy in pre-modern Korea. Indeed we should consider the influence of dry field cropsn population growth. Nevertheless, it is obvious that the proliferation of rice culture was a factor crucial to population growth and regional concentration. (2) How should we characterize the spread of rice culture in the whole period? Evidently rice culture spread from less then 20% of cultivated fields in the fifteenth century to about 36% of them in the early twentieth century. Although rice as a single crop outweighed other crops, rice culture was more then counter-balanced by dry field crops as a whole, due to Korea's unique climate and geography. Thus what we have here in not a typical case of competition between rice culture and day field culture. Besides, the spread of rice culture in the seventeenth and eighteenth centuries accomplished by technological innovations that overcame severe springtime drought, rather than extensive irrigation. Althougt irrigarion facilities did proliferate to some extent, this was achieved by local landlords and peasants rather than the state. This fact contradicts the classical thesis that the productivity of rice culture increased through the state management of irrigation and that this in turn determined the type of society. (3) We should further study other aspects of the transition from the stable population and production struture in the fifteenth and sixteenth centuries to the rapid population growth and excessive density of population thereafter. We should note that there were continuing efforts to reclaim the land in order to solve the severe shortage of land. Changes also took place in the agricultural production relations. The increase in land producrivity developed tenancy based on rent in kind, and this in turn increased the independence of tenants from their landlords. There were changes in family relations-such as the shift to primogeniture as an effort to prevent progressive division of property among multiplying offspring. The rapid population growth also produced a great mass of propertyless farm laborers. These changes had much to do with the disintegration of traditional social institutions and political structure toward the end of the Chos$\breve{o}$n dynasty.

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Physical Properties of Cd2GeSe4 and Cd2GeSe4:Co2+ Thin Films Grown by Thermal Evaporation (진공증착법에 의해 제작된 Cd2GeSe4와 Cd2GeSe4:Co2+ 박막의 물리적 특성)

  • Lee, Jeoung-Ju;Sung, Byeong-Hoon;Lee, Jong-Duk;Park, Chang-Young;Kim, Kun-Ho
    • Journal of the Korean Vacuum Society
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    • v.18 no.6
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    • pp.459-467
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    • 2009
  • $Cd_2GeSe_4$ and $Cd_2GeSe_4:Co^{2+}$ films were prepared on indium-tin-oxide(ITO)-coated glass substrates by using thermal evaporation. The crystallization was achieved by annealing the as-deposited films in flowing nitrogen. X-ray diffraction spectra showed that the $Cd_2GeSe_4$ and the $Cd_2GeSe_4:Co^{2+}$ films were preferentially grown along the (113) orientation. The crystal structure was rhomohedral(hexagonal) with lattice constants of $a=7.405\;{\AA}$ and $c=36.240\;{\AA}$ for $Cd_2GeSe_4$ and $a=7.43\;{\AA}$ and $c=36.81\;{\AA}$ for $Cd_2GeSe_4:Co^{2+}$ films. From the scanning electron microscope images, the $Cd_2GeSe_4$ and $Cd_2GeSe_4:Co^{2+}$ films were plated, and the grain size increased with increasing annealing temperature. The optical energy band gap, measured at room temperature, of the as-deposited $Cd_2GeSe_4$ films was 1.70 eV and increased to about 1.74 eV and of the as-deposited $Cd_2GeSe_4:Co^{2+}$ films was 1.79 eV and decreased to about 1.74 eV upon annealing in flowing nitrogen at temperatures from $200^{\circ}C$ to $500^{\circ}C$. The dynamical behavior of the charge carriers in the $Cd_2GeSe_4$ and $Cd_2GeSe_4:Co^{2+}$ films were investigated by using the photoinduced discharge characteristics technique.

A Study on the aspect of landscape change for Gwanghalluwon Garden (광한루원의 경관변화양상에 관한 고찰)

  • Lee, Won-Ho;Kim, Dong-Hyun;Kim, Jae-Ung;Ahn, Hye-In;Kim, Dae-Yeol;Cho, Un-Yeon
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.32 no.2
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    • pp.82-94
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    • 2014
  • This study aims to comprehend that Gwanghalluwon for aspects of landscape change in terms of construction garden(樓園). Transformation focused on the spatial structure is divided into four periods based on literature. And reflect of landscape elements in defunct or unattributable records from tale and novel. The results were as follows. First, The beginning of Gwanghanllu pavilion(廣寒樓) was the composition of the Gwangtongnu Pavilion(廣通樓). The pavilion is located amid beautiful scenery such as the close-range view of a small stream, and distant view Jiri Mountain. Analysis of literature shows that Gwanghallu pavilion was in succession to Gwangtongnu Pavilion's landscape. Secondly, Gwanghallu(廣寒樓) pavilion represents the characteristic of the garden since 1582. Built the Samsinsan(三神山), Construct Lake and bridge that represents the galaxy for realization of utopia reflect in Taoist ideology. Thirdly, Gwanghalluwon garden was recovered when from Jeong-yu-jae-ran(丁酉再亂) to the Japanese Ruling Era. It took Gwanghalluwon garden a long while to recover from original form. According to records, Gwanghalluwon garden is still being likened to the landscape of fairyland by inheriting landscape in the previous of Jeong-yu-jae-ran(丁酉再亂). Fourth, By the modern times, Gwanghalluwon Garden has personality of tourist attractions. Until now, the area of the Gwanghalluwon garden has been expended during the processes of three times. Fifth, Aspect of landscape change of Gwanghalluwon is wide-spreading mainly Gwanghallu pavilion. But elements of external expansion in garden by introduced into the facility irrelevant to the authenticity of the garden. Sixth, Comprehension the cultural landscape of the garden are limited by deficient records. But, the main elements in the Gwanghalluwon garden are commonly appeared on imaginary environment within a tale and a novel. In addition, culture of garden at the time was depicted in tale and novel. In this sense, cultural landscape in garden was able to estimate through imaginary environment within novel.

A Model for the $3_{10}$/$\alpha$ Helix Transitions of $\alpha$-Aminoisobutyric Acid-Alanine Oligopeptide ($\alpha$-아미노이소부틸산-알라닌 올리고 펩티드의 $3_{10}$/$\alpha$ 나선 전이에 관한 모형)

  • Kim, Yeong Gu;Park, Hyeong Seok
    • Journal of the Korean Chemical Society
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    • v.38 no.10
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    • pp.710-718
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    • 1994
  • We suggest a statistical thermodynamic theory for the conformational transition of a synthetic alanine (Ala), ${\alpha}$-aminoisobutyric acid (Aib) alternative oligopeptide, Buo-(Ala-Aib)$_n$-oMe, where the terminal groups Buo and oMe stand for t-butoxy and methoxy, respectively. Pure Aib homo-oligomers have always been found to adopt $3_{10}$ helical conformations, while polyalanine has always $\alpha$ helical conformation. In an organic solvent (e.g. $CD_3$CN) it shows that the length for the $3_{10}$/${\alpha}$ helix transitions of Buo-(Ala-Aib)$_n$-oMe, is 8 at room temperature. In an aqueous solution oligopeptide has always coil conformation at room temperature. In an organic solution, helical structures of the oligopeptide are more stable than coil structure, so we studied the $$3_{10}/\alpha$ helix transitions, considering coiled-conformations, coiled and $3_{10}$ helical conformations, and coiled and $\alpha$ helical conformations by using the zipper model. We determined the values of parameters ($\sigma_A$, $\sigma_T$, $\xi_A$, $\xi_T$) from the relating published data; $\sigma_A$ = 0.00011, $\sigma_T$ = 0.0060, $\xi_A$ = 10.1, $\xi_T$ = 3.90. The distributions of $\alpha$ helical length can be N-2, N-3, N-4, ${\cdots}$, 3, 2, 1 (N = 2n) while those of $3_{10}$ helical length, N-1, N-2, N-3, N-4, ${\cdots}$, 3, 2, 1.

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Physicochemical Characteristics of ${\beta}-Glucan$ Isolated from Barley (보리로부터 분리한 ${\beta}-Glucan$의 이화학적 특성)

  • Kim, Sung-Ran;Choi, Hee-Don;Seog, Ho-Moon;Kim, Sung-Soo;Lee, Young-Tack
    • Korean Journal of Food Science and Technology
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    • v.31 no.5
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    • pp.1164-1170
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    • 1999
  • The physicochemical characteristics of ${\beta}-glucan$ isolated from waxy and non-waxy barley were investigated. The hull-less waxy and non-waxy barley containing 6.5% and 5.3% of total ${\beta}-glucan$ respectively, were used as a starting material. The yield and ${\beta}-glucan$ content of crude ${\beta}-glucan$ from waxy barley was 5.54% and 62.9%, respectively, and those were higher than 3.34% and 59.2% from non-waxy barley. The crude ${\beta}-glucan$ purified with selective precipitation and enzymatic treatment to obtain the ${\beta}-glucan$ isolate of high purity (>99%). The total yield of purified ${\beta}-glucan$ from waxy and non-waxy barley was 4.46% and 2.59%, respectively. The surface appearance of the purified ${\beta}-glucan$ by scanning electron microscopy (SEM) showed randomly entangled multi-net structure of ${\beta}-glucan$ microfibrils. The melting temperature of ${\beta}-glucan$ from waxy and non-waxy barley measured by differential scanning calorimetry (DSC) was $184.6^{\circ}C$, and $180.3^{\circ}C$, respectively. DSC endotherm of ${\beta}-glucan$ solution showed 2 peaks near $68^{\circ}C$ and $84^{\circ}C$. Enthalpy of phase transition was higher in non-waxy ${\beta}-glucan$ than waxy ${\beta}-glucan$, and the intrinsic viscosity of ${\beta}-glucan$ solution from waxy barley was higher than that of non-waxy ${\beta}-glucan$. The pasting viscosity of barley starch with the purified ${\beta}-glucan$ determined by Rapid Visco-Analyzer was higher than that of barley starch without ${\beta}-glucan$, and the effect of ${\beta}-glucan$ on increasing the paste viscosity was greater in non-waxy barley starch.

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Family Planning as a Part of the Nursing-Staff In - Service Education Program (임상 간호원을 위한 실무교육 과정으로서의 가족계획)

  • 전춘영
    • Journal of Korean Academy of Nursing
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    • v.5 no.1
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    • pp.112-132
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    • 1975
  • When Korean family planning services began as a part of the National Policy in 1962, the annual population growth was 3.0%. This growth rate has been decreased to 2.0% during last ten year period. And it seems imperative that all hospitals, as well as related organizations, should participate in family planning in order to contribute to achieving the National goal of 1.5% population growth by 1976, the end of the Third Five Year Economic Development Plan. Nurses should be considered the most important human resources in charge of the core of family planning services in any setting. For the family planning services in the general hospital setting, nurses as a core members contribute much as change agent, motivators, counsellors, educators etc. A nurse can work with patients and their relatives when she is equipped with relevant knowledge and skills. Fur the more family planning cannot be ignored even in hospital setting where more comprehensive nursing care is needed Thus, the general objective of this study is to provide baseline data for better programming of In-service education in family planning so that effective hospital family planning nursing services can be made a part of comprehensive nursing care contributing to the national population program and human welfare. In order to meet the general objective, this study has the following specific objectives : 1. To find out the general characteristics of the clinical nurses working in Y Hospital 2. To evaluate their attitudes and practices of family planning 3. To assess their knowledge, attitudes and practices of population and family planning as professional nurses. 4. To examine and compare data collecting methods for the planning of an In-service Educational Program 5. To explore the contents to be included in this In-service Education Program. The study population randomly selected one hundred nurses working in Y Hospital A cross-sectional survey with questionnaires developed for this study was chosen for the study method. To collect reliable data, the questionnaires were distributed to and answered by the study population in a controlled situation. X²test and t-test was employed in analyzing the data. The findings of this study are as follows: 1. Y Hospital nurses had a lower ideal number of children (X=2.02) and showed no strong preference for male children, and 74% of them expressed the desire to use permanent methods of birth control 2. of this thirty Y Hospital nurses who were married 66.7% stated they were already practicing contraceptive methods. Most of them preferred male methods of contraception. 3. According to objective evaluation about knowledge of various aspects of population and family planning, respondents from collegiate programs significantly knew better the subjects on the average than did respondents from diploma programs of nursing. 4. There was a marked difference in the results of self-evaluation and objective evaluation in their family planning knowledge. It was found that the self-evaluation family planning knowledge seemed to be unreliable. Accordingly, the objective test methods appeared to be more reliable in the evaluation of knowledge levels. 5. The subject areas needed to be included in In-service education for the Hospital family planning services in Y Hospital are 1) rhythm methods, 2) tubal-legation, 3) family planning effects of contraceptives, 4) population growth, 5) demographic traction, 6) population structure and 7) infant mortality facts. In addition, 1) various oral contraceptives, 2) basal temperature method, 3) laparoscopic female sterilization, 4) interfering factors of family planning, 5) anatomy and physiology of the female reproductive organs were additional areas to be taught to respondents from 3-year diploma schools of nursing. Demographic transition was one subject area in which the four-year graduates need further study. 6. Population problems guidance and counselling in family planning instruction in the theory and practice of contraceptives should be included in future In-service Education Programs in order to provide more effective hospital Family Planning Services, stated 77.0% of the respondents.

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International Monetary System Reform and the G20 (국제통화제도의 개혁과 G20)

  • Cho, Yoon Je
    • KDI Journal of Economic Policy
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    • v.32 no.4
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    • pp.153-195
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    • 2010
  • The recent global financial crisis has been the outcome of, among other things, the mismatch between institutions and the reality of the market in the current global financial system. The International financial institutions (IFIs) that were designed more than 60 years ago can no longer effectively meet the challenges posed by the current global economy. While the global financial market has become integrated like a single market, there is no international lender of last resort or global regulatory body. There also has been a rapid shift in the weight of economic power. The share of the Group of 7 (G7) countries in global gross domestic product (GDP) fell and the share of emerging market economies increased rapidly. Therefore, the tasks facing us today are: (i) to reform the IFIs -mandate, resources, management, and governance structure; (ii) to reform the system such as the international monetary system (IMS), and regulatory framework of the global financial system; and (iii) to reform global economic governance. The main focus of this paper will be the IMS reform and the role of the Group of Twenty (G20) summit meetings. The current IMS problems can be summarized as follows. First, the demand for foreign reserve accumulation has been increasing despite the movement from fixed exchange rate regimes to floating rate regimes some 40 years ago. Second, this increasing demand for foreign reserves has been concentrated in US dollar assets, especially public securities. Third, as the IMS relies too heavily on the supply of currency issued by a center country (the US), it gives an exorbitant privilege to this country, which can issue Treasury bills at the lowest possible interest rate in the international capital market. Fourth, as a related problem, the global financial system depends too heavily on the center country's ability to maintain the stability of the value of its currency and strength of its own financial system. Fifth, international capital flows have been distorted in the current IMS, from EMEs and developing countries where the productivity of capital investment is higher, to advanced economies, especially the US, where the return to capital investment is lower. Given these problems, there have been various proposals to reform the current IMS. They can be grouped into two: demand-side and supply-side reform. The key in the former is how to reduce the widespread strong demand for foreign reserve holdings among EMEs. There have been several proposals to reduce the self-insurance motivation. They include third-party insurance and the expansion of the opportunity to borrow from a global and regional reserve pool, or access to global lender of last resort (or something similar). However, the first option would be too costly. That leads us to the second option - building a stronger globalfinancial safety net. Discussions on supply-side reform of the IMS focus on how to diversify the supply of international reserve currency. The proposals include moving to a multiple currency system; increased allocation and wider use of special drawing rights (SDR); and creating a new global reserve currency. A key question is whether diversification should be encouraged among suitable existing currencies, or if it should be sought more with global reserve assets, acting as a complement or even substitute to existing ones. Each proposal has its pros and cons; they also face trade-offs between desirability and political feasibility. The transition would require close collaboration among the major players. This should include efforts at the least to strengthen policy coordination and collaboration among the major economies, and to reform the IMF to make it a more effective institution for bilateral and multilateral surveillance and as an international lender of last resort. The success on both fronts depends heavily on global economic governance reform and the role of the G20. The challenge is how to make the G20 effective. Without institutional innovations within the G20, there is a high risk that its summits will follow the path of previous summit meetings, such as G7/G8.

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Moho Discontinuity Studies Beneath the Broadband Stations Using Receiver Functions in South Korea (수신함수를 이용한 남한의 광대역 관측망 하부의 Moho 불연속면 연구)

  • Kim, So-Gu;Lee, Seong-Kyu
    • Journal of the Korean Society of Hazard Mitigation
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    • v.1 no.1 s.1
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    • pp.139-155
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    • 2001
  • We investigate the vertical velocity models beneath the newly installed broadband seismic network of KMA (Korea Meteorological Administration) by using receiver function inversion technique. The seismic phases are primarily P-to-S conversions and reverberations generated at the two highest impedance interfaces like the Moho (crust-mantle boundary) and the sediment-basement contact. We obtained the teleseismic P-wave receiver functions, which were derived from teleseismic records of Seoul (SEO), Inchon (INCN), Tejeon (TEJ) , Sosan (SOS/SES), Kangnung (KAN), Ulchin (ULC/ULJ), Taegu (TAG), Pusan (PUS), and Ullung-do (ULL) stations. For Kwangju (KWA/KWJ) and Chunchon (CHU) stations, the Moho conversion Ps arrivals and waveforms of radial receiver functions are azimuthally inconsistent and unclear. From the receiver function inversion result, we found that crustal thickness is 29 km at INCN, SEO, and SOS (SES) stations, 28 km at KAN station in the Kyonggi Massif, 32 km at TEJ station in Okchon Folded Belt, 34 km at TAG, 33 km at PUS station in the Kyongsang Basin, 32 km at KWJ station (readjusted station by prior KWA station) included in the Youngdong-Kwangju Depression Zone, 28 km at ULC station in the eastern margin of the Ryongnam Massif, and 17 km at ULL station in the Ullung Island of the East Sea, respectively. The Moho configuration of INCN, SOS, KWJ, and KAN stations show a laminated smooth transition zone with a 3-5 km thick. The upper crusts(${\sim}5km$) of KAN, ULC, and PUS stations show complex structures with a high velocity. The unusually thick crusts are found at the TAG and PUS stations in the Kyongsang Basin compared to the thin (29-32 km) crust of the western part (INCN, SEO, SOS, TEJ, and KWA stations) The crustal thickness beneath Ullung Island (ULL station) shows the suboceanic crust with about 17 km thickness and complex with a high velocity layer of the upper crust, and the amplitudes of Incoming Ps waves from the western direction are relatively large compared to those from othor directions.

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A bilayer diffusion barrier of atomic layer deposited (ALD)-Ru/ALD-TaCN for direct plating of Cu

  • Kim, Soo-Hyun;Yim, Sung-Soo;Lee, Do-Joong;Kim, Ki-Su;Kim, Hyun-Mi;Kim, Ki-Bum;Sohn, Hyun-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.239-240
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    • 2008
  • As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

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