• Journal of the Semiconductor & Display Technology
• /
• v.20 no.2
• /
• pp.92-97
• /
• 2021

The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2007.11a
• /
• pp.806-811
• /
• 2007

In this study, we propose a more systematic design process for the structure-borne noise. The proposed way consists of 4 steps: Problem definition, Cause analysis, Development of counter-measure and Validation. Especially, we improved the second step: Cause analysis. According to the PCA(Panel Contribution Analysis), a reduction in vibration of the panels of which panel contribution is positive and larger, results in a reduction in structure-borne noise. We have, however, met the case in which the concept of PCA is no valid in a few vehicle tests. In order to understand this phenomenon, we compared the major panels selected by PCA with the one chosen by DSA(Design Sensitivity Analysis). After investigating the difference between the two results, a more improved process is suggested. The proposed one for the second step in the design process consists of not only the previous way: PCA with deformation analysis results but also DSA. It is finally validated that the proposed design process decreases the sound pressure of the concerned noise transfer function more than 3.5 dB.

• Journal of Auto-vehicle Safety Association
• /
• v.12 no.2
• /
• pp.27-32
• /
• 2020

This paper presents steering system requirements to ensure the stabilized lateral control of autonomous driving vehicles. The two main objectives of a lateral controller in autonomous vehicles are maintenance of vehicle stability and tracking of the desired path. Even if the desired steering angle is immediately determined by the upper level controller, the overall controller performance is greatly influenced by the specification of steering system actuators. Since one of the major inescapable traits that affects controller performance is the time delay of the steering actuator, our work is mainly focused on finding adequate parameters of high level control algorithm to compensate these response characteristics and guarantee vehicle stability. Actual vehicle steering angle response was obtained with Electric Power Steering (EPS) actuator test subject to various longitudinal velocity. Steering input and output response analysis was performed via MATLAB system identification toolbox. The use of system identification is advantageous since the transfer function of the system is conveniently obtained compared with methods that require actual mathematical modeling of the system. Simulation results of full vehicle model suggest that the obtained tuning parameter yields reduced oscillation and lateral error compared with other cases, thus enhancing path tracking performance.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.30 no.6D
• /
• pp.561-567
• /
• 2010

Recently, several number of Multi-Intermodal Transfer Center are nominated to improve convenience of public transportation user. Due to budget constraints, it should be defined which is the first consideration among the discussed many works. In this circumstance, there are some absurdities in the evaluation of validity of existing methods. Therefore, we suggested the Priority Order Valuation for Multi-Intermodal Transfer Centerer. The evaluation method, we suggested, is considered quantitative analysis and qualitative analysis. In this study, we find out that B/C ratio and construction costs are strongly related to the quantitative analysis so that Multi-Intermodal Transfer Centers in metropolitan area are evaluated the positive results. Therefore, both quantitative analysis and qualitative analysis are applied to the Priority Order, metropolitan area and other area are fairly evaluated the results for the Priority Order.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.13 no.3
• /
• pp.17-24
• /
• 1999

This paper presents a method of ANC for transfonrer noise control utilizing a sproker and microphone pair. In this study, the main focus is on identifying the dynamic characteristics of speaker - amplifier microphone path. This study presents a theoretical method to identify the dynamic characteristics of speaker-microphone pairs. The transfer functions of microphone - speaker pair have been estimated utilizing sequential least square(SLS) algorithm. We identified the estimated transfer function has stable JXlles and zeros in z-plane. This paper also propose an architecture far the noise cancellation to which we applied the estimated transfer function.nction.

• International Journal of Automotive Technology
• /
• v.8 no.1
• /
• pp.75-82
• /
• 2007

This paper presents practical work on the reduction of gear whine noise. In order to identify the source of the gear whine noise, transfer paths are searched and analyzed by operational deflection shape analysis and experimental modal analysis. It was found that gear whine noise has an air-borne noise path instead of structure-borne noise path. The main sources of air-borne noise were the two global modes caused by the resonance of an axle system. These modes created a vibro-acoustic noise problem. Vibro-acoustic noise can be reduced by controlling the vibration of the noise source. The vibration of noise source is controlled by the modification of structure to avoid the resonance or to reduce the excitation force. In the study, the excitation force of the axle system is attenuated by changing the tooth profile of the hypoid gear. The modification of the tooth profile yields a reduction of transmission error, which is correlated to the gear whine noise. Finally, whine noise is reduced by 10 dBA.

• International Journal of Automotive Technology
• /
• v.8 no.5
• /
• pp.605-614
• /
• 2007

This paper presents the research results for the reduction of a gear whine noise based on experimental and analytic methods. The test vehicle has a whine noise problem at the passenger seats in a sport utility vehicle. To identify the transfer path of the interior noise due to the axle system, a vibration path analysis, modal analysis and operational deflection shape analysis are systematically employed. By using these various methods, it has been found that the interior noise generated by the axle system was airborne noise. To reduce and predict the whine generated by the axle system, structural modifications for the axle system are performed by using FEM and BEM techniques. The structural modification of the axle cover is suggested for the reduction of whine noise.

• Journal of Korea Society of Digital Industry and Information Management
• /
• v.10 no.4
• /
• pp.133-142
• /
• 2014

The least mean square(LMS) algorithm has been popular owing to its simplicity, stability, and availability to implement. But it inherently has a problem of slow convergence speed, and the presence of a transfer function in the secondary path following the adaptive controller and the error path has been shown to generally degrade the stability and the performance of the LMS algorithm in applications of acoustical noise control. In general, in order to solve these problems, the filtered-x LMS (FX-LMS) type algorithms can be used and the bi-directional Filtered-x LMS(BFXLMS) algorithm is very attractive among them, which increase the convergence speed and the performance of the controller with nearly equivalent computation complexity. In this paper, a mathematical analysis for the BFXLMS algorithm is presented. In terms of view points of time domain, frequency domain, and stochastic domain, the characteristics and stabilities of algorithm is accurately analyzed.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.30 no.1
• /
• pp.24-32
• /
• 2018

In this paper, analytical studies were conducted to obtain optimal design factors and analysis parameters of liquid nitrogen cooling exchanger applied in cryogenic refrigerator. The target value of heat transfer rate was more than 1 kW and pressure drop was less than 40 kPa. Design factors of cryogenic heat exchanger included width of channel and configuration of paths. Analytical factors of liquid nitrogen cooling exchanger included temperatures of coolant header surface and inlet liquid nitrogen. The width and number of channels in the design parameters were 0.0050~0.0150 m and 4~8, respectively. The configuration of channel path was 4 ways. Temperatures of coolant header surface and inlet liquid nitrogen in analytical parameters were 74 to 78K and 82 to 86K, respectively. As result, the design factor and analysis parameter satisfying the target values were obtained. The biggest heat transfer rate was 1.36 kW with pressure drop of 32.26 kPa.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.548-551
• /
• 2004

Magnetostrictive actuators have seen increasing use in fine positioning system because it has many advantages such as friction free, resolution of ${\mu}{\textrm}{m}$ or nm scale, and powerful output force. Usually, the magnetic circuit of magnetostrictive actuator has components which are flux return path, coil, and magnetostrictive material. It is classified in two types according to existence of the permanent magnet. The magnetic circuit having optimal performances transfer magnetic field which is obtained by providing input current at coil without energy loss. This paper described mathematical model of magnetic circuit for getting design variables. The modeling equation is obtained from the relations between flux and reluctance of the magnetic equivalent circuit. Also, finite element analysis has been used to study the performance of magnetic circuit according to change of design variables such as existence and shape of the permanent magnet, flux return path etc. The modification of dimensions enables us to optimize magnetic circuit.