Torsional Micromechanical Switching Element Including Bumps for Reducing the Voltage Difference Between Pull-in and Release (Pull-in과 release 전압차 감소용 돌기구조를 갖는 비틀림형 초소형 기계적 스위칭 소자)
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- The Transactions of the Korean Institute of Electrical Engineers C
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- v.50 no.9
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- pp.471-475
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- 2001