• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.168-175
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• 1992

The surface and interface morphology as well as the sheet resistance, and uniformity of TiSiz film are significantly improved and the lateral titanium silicide growth over the oxide spacer is minimized by the use of ion beam mixing and rapid thermal annealing in nitrogen ambient. In addition, TiSiz film formations on TiISi and TiISiOz system were also studied.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.104.1-104.1
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• 2012

타이타늄(Ti)은 비강도가 높고, 내식성이 우수하여 항공기, 자동차 및 선박과 같은 수송기기의 소재로 사용되고 있다. 이러한 특성을 가진 타이타늄을 이종소재와 결합하여 더 우수한 기계적 특성을 얻을 수 있다면, 그 응용범위를 확대할 수 있을 것이다. 본 연구에서는 타이타늄과 알루미늄(Al) 판재를 적층한 후, 열간압연을 통해 타이타늄/알루미늄 적층재를 제조하였다. 이와 같은 적층재를 다양한 압하율로 냉간 압연한 후 미세조직을 관찰하였으며, 인장시험을 통해 기계적 특성을 조사하였다. 아울러 타이타늄 판재만으로도 유사한 실험을 실시하여 기계적 특성을 적층재와 비교 평가하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.50-50
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• 2007

We report the effect of the film thickness on electrical properties of Ti(N) film resistors. The applications of titanium nitride thin film resistor in $\Pi$-type attenuators are also characterized. As film thickness decreases from 100 to 30 nm, temperature coefficient of resistance significantly decreases from -60 to -148 ppm/K, while sheet resistance increases from 37 to $270\;{\Omega}/{\square}$. The characterizations of 20dB-attenuators using thin film resistors are improved in comparison with those using thick film resistors. The $\Pi$-type attenuators using Ti(N) thin film resistors exhibit a attenuation of -19.94 dB and voltage standing wave ratio of 1.16 at a frequency of 2.7 GHz.

• The Journal of Korean Academy of Prosthodontics
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• v.42 no.3
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• pp.307-326
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• 2004

Statement of problem. The long-term success of implants is the development of a stable direct connection between bone and implant surface, which must be structural and functional. To improve a direct implant fixation to the bone, various strategies have been developed focusing on the surface of materials. Among them, altering the surface properties can modify cellular responses such as cell adhesion, cell motility and bone deposition. Purpose. This study was to evaluate the cellular behaviors on the surface-modified titanium by morphological observation, cellular proliferation and differentiation. Material and methods. Specimens were divided into five groups, depending on their surface treatment: electropolishing(EP) anoclizing(AN), machining(MA), blasting with hydroxyapatite particle(RBM) and electrical discharge machining(EDM). Physicochemical properties and microstructures of the specimens were examined and the responses of osteoblast-like cells were investigated. The microtopography of specimens was observed by scanning electron microscopy(SEM). Surface roughness was measured by a three-dimensional roughness measuring system. The microstructure was analyzed by X-ray diffractometer(XRD) and scanning auger electron microscopy(AES). To evaluate cellular responses to modified titanium surfaces, osteoblasts isolated from neonatal rat were cultured. The cellular morphology and total protein amounts of osteoblast-like cell were taken as the marker for cellular proliferation, while the expression of alkaline phosphatase was used as the early differentiation marker for osteoblast. In addition, the type I collagen production was determined to be a reliable indicator of bone matrix synthesis. Results. 1. Each prepared specimen showed specific microtopography at SEM examination. The RBM group had a rough and irregular pattern with reticulated appearance. The EDM-treated surface had evident cracks and was heterogeneous consisting of broad sheet or plate with smooth edges and clusters of small grains, deep pores or craters. 2. Surface roughness values were, from the lowest to the highest, electropolished group, anodized group, machined group, RBM group and EDM group. 3. All groups showed amorphous structures. Especially anodized group was found to have increased surface oxide thickness and EDM group had titaniumcarbide(TiC) structure. 4. Cells on electropolished, anodized and machined surfaces developed flattened cell shape and cells on RBM appeared spherical and EDM showed both. After 14 days, the cells cultured from all groups were formed to be confluent and exhibited multilayer proliferation, often overlapped or stratified. 5. Total protein amounts were formed to be quite similar among all the group at 48 hours. At 14 days, the electropolished group and the anodized group induced more total protein amount than the RBM group(P<.05). 6. There was no significant difference among five groups for alkaline phosphatase(ALP) activity at 48 hours. The AN group showed significantly higher ALP activity than any other groups at 14 days(P<.05). 7. All the groups showed similar collagen synthesis except the EDM group. The amount of collagen on the electropolished and anodized surfaces were higher than that on the EDM surface(P<.05).

• Journal of the Microelectronics and Packaging Society
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• v.13 no.1 s.38
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• pp.1-5
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• 2006

We prepared 80 nm-thick TiSix on each 70 nm-thick amorphous silicon and polysilicon substrate using an RF sputtering with $TiSi_2$ target. TiSix composite silicide layers were stabilized by rapid thermal annealing(RTA) of $800^{\circ}C$ for 20 seconds. Line width of $0.5{\mu}m$ patterns were embodied by photolithography and dry etching process, then each additional annealing process at $750^{\circ}C\;and\;850^{\circ}C$ for 3 hours was executed. We investigated the change of sheet resistance with a four-point probe, and cross sectional microstructure with a field emission scanning electron microscope(FE-SEM) and transmission electron microscope(TEM), respectively. We observe an abrupt change of resistivity and voids at the silicide surface due to interdiffusion of silicide and composite titanium silicide in the amorphous substrates with additional $850^{\circ}C$ annealing. Our result implies that the electrical resistance of composite titanium silicide may be tunned by employing appropriate substrates and annealing condition.

• Journal of the Korean Electrochemical Society
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• v.11 no.2
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• pp.100-104
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• 2008

Titanium sheet metal substrates used in thin film batteries were wet etched and their surface area was increased in order to increase the discharge capacity and power density of the batteries. To obtain a homogeneous etching pattern, we used a conventional photolithographic process. Homogeneous hemisphere-shaped wells with a diameter of approximately $40\;{\mu}m$ were formed on the surface of the Ti substrate using a photo-etching process with a $20\;{\mu}m{\times}20\;{\mu}m$ square patterned photo mask. All-solid-state thin film cells composed of a Li/Lithium phosphorous oxynitride (Lipon)/$LiCoO_2$ system were fabricated onto the wet etched substrate using a physical vapor deposition method and their performances were compared with those of the cells on a bare substrate. It was found that the discharge capacity of the cells fabricated on wet etched Ti substrate increased by ca. 25% compared to that of the cell fabricated on bare one. High discharge rate was also able to be obtained through the reduction in the internal resistance. However, the cells fabricated on the wet etched substrate exhibited a higher degradation rate with charge-discharge cycling due to the nonuniform step coverage of the thin films, while the cells on the bare substrate demonstrated a good cycling performance.

• Korean Chemical Engineering Research
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• v.56 no.4
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• pp.447-452
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• 2018

Titanium nanotubes (TNT) of various lengths ranging from $0.34^{\circ}C$ to a maximum of $8.9^{\circ}C$ were prepared by anodizing a titanium metal sheet in an electrolyte containing fluorine ion ($F^-$) of HF, NaF and $NH_4F$. When TNT prepared by anodizing was calcined at $450^{\circ}C$, anatase crystals with photo activity were formed. The TNT-based dye-sensitized solar cell (DSSC) showed a maximum conversion efficiency of 4.71% when the TNT length was $2.5{\mu}m$. This value was about 18% higher than photo conversion efficiency of the FTO-based DSSC coated with titania paste. And the short circuit current density ($J_{sc}$) of the TNT-DSSC was $9.74mA/cm^2$, which was about 35% higher than the $7.19mA/cm^2$ of FTO-DSSC. The reason for the higher conversion efficiency of TNT-DSSC solar cells is that photoelectrons generated from dyes are rapidly transferred to the electrode surface through TNT, and the recombination of photoelectrons and dyes is suppressed.

• Journal of Korean Society on Water Environment
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• v.32 no.1
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• pp.46-51
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• 2016

In this study, we synthesized a combination of graphene oxide (GO) and titanium dioxide (TiO₂) and confirm that GO can be used for CO₂ photoreduction. TiO₂ exhibited highly efficient combination with other conventional electric charges generated by these paration phenomenon for suppression of hole-electron recombination. This improved the efficiency of CO₂ photoreduction. The synthetic form of GO-TiO₂ used in this study was agraphene sheet surrounded by TiO₂ powder. Efficiency and stability were enhanced by combination of GO and TiO₂. In a CO₂ photoreduction experiment, the highest CO conversion rate was 0.652 μmol/g·h in GO10-TiO₂ (2.3-fold that of pure TiO₂) and the highest CH₄ production rate was 0.037 μmol/g·h in GO0.1-TiO₂ (2.4-fold that of pure TiO₂). GO enhances photocatalytic efficiency by functioning as a support and absorbent, and enabling charge separation. With increasing GO concentration, the CH₄ level decreases to~45% due to decreased transfer of electrons. In this study, TiO₂ together with GO yielded a different result than the normal doping effect and selective CO₂ photoreduction.

• Korean Journal of Materials Research
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• v.8 no.11
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• pp.987-992
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• 1998

Titanium aluminide intermetallic compound was formed from high purity elemental Ti and A1 foils by selfpropagating, high-temperature synthesis(SHS1 in hot press. Formation of $TiAl_3$ intermetallics at the interface between Ti and Al foil was observed to be controlled by temperature, pressure and heating rate. Especially, the heating rate is the most important role to form intermetallic compound by SHS reaction. According to DTA experiment, the SHS reactions appeared at two different temperatures below and above the melting point of Al. It was also observed that both SHS reaction temperatures increased with increasing the heating rate. After the SHS reaction of alternatively layered 10 Ti and 9 A1 foils at the heating rate of $20^{\circ}C$/min, the $700\mu\textrm{m}$ thick titanium aluminide sheet was formed by heat treatment at $810^{\circ}C$ for 4hours.

• Korean Chemical Engineering Research
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• v.45 no.4
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• pp.335-339
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• 2007

In order to overcome the problem of poor hardness of transparent polycarbonate (PC) sheets, organic-inorganic hybrid hard coating solutions, which show a high refractive index above 1.58, were made by the sol-gel method. These hybrid coating solutions were obtained from mixture of titanium tetraisopropoxide (TTIP), and (3-glycidoxypropyl)trimethoxysilane (GPTMS). The PC sheets were spin-coated, and cured at $120^{\circ}C$ for 2 hr. Change of refractive index in the range of 1.53-1.61 was obtained by varying the GPTMS content. The refractive index of the coated film decreased with increasing the GPTMS content, while the pencil hardness of the coated film was found to increase with increasing the GPTMS content.