• 제목/요약/키워드: Time-Mean Film Thickness

검색결과 19건 처리시간 0.033초

기판온도에 따른 ITO 박막의 제조 및 특성 (Preparation and characterization of ITO Thin Film By Various Substrate heating temperature)

  • 김성진;박헌균
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.94.2-94.2
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    • 2010
  • Indium tin oxide (ITO) Thin films were grown on Non-alkarai glass Substrates by PVD method and Subsequently Subjected to ($100^{\circ}C-350^{\circ}C$) Thermal Annealing (TA) In Nitr Oxygen ambinent. Most of all, The effect of TA treatment on the structural properties were studied by using X-Ray diffraction and atomic force microscopy, while optical properties were studied by UV-Transmittance measurements. After TA treatment, the XRD spectra have shown an effective relaxation of the residual compressive stress, As a result, XRD peaks increase of the intensity and narrowing of full width at half-maximun (FWHM). In addtion The microstructure, The surface morphology, the optical transmittance changed and improved, and we investigated The effects of temperature, Time and atmosphere during the TA on the structural and electrical properties of the ITO/glass on TA at $300^{\circ}C$. As a results, the films are highly transparent (80%~89%) in visible region. AFM analysis shows that the films are very smooth with root mean square surface roughness 0.58nm -2.75nm thickness film. It is observed that resistivity of the films drcreases T0 $1.05{\times}10^{-4}{\Omega}cmt$ $6.06{\times}10^{-4}{\Omega}cm$, while mobility increases from $152cm^2/vs$ to $275cm^2/vs$.

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상동관상 광미를 혼합한 자기충전콘크리트의 유동 및 강도 특성 (Flowability and Strength of Self-compacting Concrete Mixed with Tailings from the Sangdong Tungsten Mine)

  • 최연왕;김용직;정문영
    • 대한토목학회논문집
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    • 제26권4A호
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    • pp.767-774
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    • 2006
  • 본 연구에서는 상동지역 중석광 광미를 콘크리트용 혼화재료로 사용하기 위한 연구의 일환으로 자기충전콘크리트의 분체로서 적용가능성을 검토하였다. 상동지역 중석광 광미를 혼합한 시멘트 페이스트의 유변학적 특성을 검토하기 위하여 구속수비 및 점도계를 이용하여 평균소성점도 및 항복응력을 측정하였으며 가상수막이론을 적용하여 검토하였다. 그리고 광미를 혼합한 자기충전콘크리트의 자기충전성 평가는 일본 토목학회에서 제시한 기준안을 적용하여 검토하였으며, 역학적 특성은 압축강도, 쪼갬인장강도 및 탄성계수를 측정하여 검토하였다. 실험결과 광미의 혼합률이 증가함에 따라 구속수비와 평균소성점도는 감소하였으며, 가상수막 두께는 증가하는 경향을 나타냈다. 또한, 광미를 혼합한 자기충전콘크리트의 자기충전성 검토 결과는 유동성 평가기준인 슬럼프 플로우 500 mm 도달시간의 경우 광미의 혼합률이 증가함에 따라 다소 증가하였고 재료 분리저항성 및 충전성 평가 결과는 기준을 만족하는 경향을 나타내고 있었다. 역학적 특성 검토 결과는 압축강도의 경우 광미의 혼합률이 증가함에 따라 압축강도는 감소하였고, 쪼갬인장강도 및 탄성계수는 보통 콘크리트의 유사한 경향을 나타내었다.

Dielectric Passivation and Geometry Effects on the Electromigration Characteristics in Al-1%Si Thin Film Interconnections

  • Kim, Jin-Young
    • Journal of Korean Vacuum Science & Technology
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    • 제5권1호
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    • pp.11-18
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    • 2001
  • Dielectric passivation effects on the EM(electromigration) have been a great interest with recent ULSI and multilevel structure tends in thin film interconnections of a microelectronic device. SiO$_2$, PSG(phosphosilicate glass), and Si$_3$N$_4$ passivation materials effects on the EM resistance were investigated by utilizing widely used Al-1%Si thin film interconnections. A standard photolithography process was applied for the fabrication of 0.7㎛ thick 3㎛ wide, and 200㎛ ~1600㎛ long Al-1%Si EM test patterns. SiO$_2$, PSG, and Si$_3$N$_4$ dielectric passivation with the thickness of 300 nm were singly deposited onto the Al-1%Si thin film interconnections by using an APCVD(atmospheric pressure chemical vapor deposition) and a PECVD(plasma enhanced chemical vapor deposition) in order to investigate the passivation materials effects on the EM characteristics. EM tests were performed at the direct current densities of 3.2 $\times$ 10$\^$6/∼4.5 $\times$ 10$\^$6/ A/cm$^2$ and at the temperatures of 180 $\^{C}$, 210$\^{C}$, 240$\^{C}$, and 270$\^{C}$ for measuring the activation energies(Q) and for accelerated test conditions. Activation energies were calculated from the measured MTF(mean-time-to-failure) values. The calculated activation energies for the electromigration were 0.44 eV, 0.45 eV, and 0.50 eV, and 0.66 eV for the case of nonpassivated-, Si$_3$N$_4$passivated-, PSG passivated-, and SiO$_2$ passivated Al-1%Si thin film interconnections, respectively. Thus SiO$_2$ passivation showed the best characteristics on the EM resistance followed by the order of PSG, Si$_3$N$_4$ and nonpassivation. It is believed that the passivation sequences as well as the passivation materials also influence on the EM characteristics in multilevel passivation structures.

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In Situ Monitoring of the MBE Growth of AlSb by Spectroscopic Ellipsometry

  • 김준영;윤재진;이은혜;배민환;송진동;김영동
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.342-343
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    • 2013
  • AlSb is a promising material for optical devices, particularly for high-frequency and nonlinear-optical applications. And AlSb offers significant potential for devices such as quantum-well lasers, laser diodes, and heterojunction bipolar transistors. In this work we study molecular beam epitaxy (MBE) growth of an unstrained AISb film on a GaAs substrate and identify the real-time monitoring capabilities of in situ spectroscopic ellipsometry (SE). The samples were fabricated on semi-insulating (0 0 1) GaAs substrates using MBE system. A rotating sample stage ensured uniform film growth. The substrate was first heated to $620^{\circ}C$ under As2 to remove surface oxides. A GaAs buffer layer approximately 200 nm- thick was then grown at $580^{\circ}C$. During the temperature changing process from $580^{\circ}C$ to $530^{\circ}C$, As2 flux is maintained with the shutter for Ga being closed and the reflection high-energy electron diffraction (RHEED) pattern remaining at ($2{\times}4$). Upon reaching the preset temperature of $530^{\circ}C$, As shutter was promptly closed with Sb shutter open, resulting in the change of RHEED pattern from ($2{\times}4$) to ($1{\times}3$). This was followed by the growth of AlSb while using a rotating-compensator SE with a charge-coupled-device (CCD) detector to obtain real-time SE spectra from 0.74 to 6.48 eV. Fig. 1 shows the real time measured SE spectra of AlSb on GaAs in growth process. In the Fig. 1 (a), a change of ellipsometric parameter ${\Delta}$ is observed. The ${\Delta}$ is the parameter which contains thickness information of the sample, and it changes in a periodic from 0 to 180o with growth. The significant change of ${\Delta}$ at~0.4 min means that the growth of AlSb on GaAs has been started. Fig. 1b shows the changes of dielectric function with time over the range 0.74~6.48 eV. These changes mean phase transition from pseudodielectric function of GaAs to AlSb at~0.44 min. Fig. 2 shows the observed RHEED patterns in the growth process. The observed RHEED pattern of GaAs is ($2{\times}4$), and the pattern changes into ($1{\times}3$) with starting the growth of AlSb. This means that the RHEED pattern is in agreement with the result of SE measurements. These data show the importance and sensitivity of SE for real-time monitoring for materials growth by MBE. We performed the real-time monitoring of AlSb growth by using SE measurements, and it is good agreement with the results of RHEED pattern. This fact proves the importance and the sensitivity of SE technique for the real-time monitoring of film growth by using ellipsometry. We believe that these results will be useful in a number of contexts including more accurate optical properties for high speed device engineering.

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열처리 온도에 따른 TiO2/Ag/TiO2 박막의 근적외선 반사 특성 변화 (Effect of Annealing Temperature on the Low Emissivity of TiO2/Ag/TiO2 Films)

  • 김소영;문현주;김대일
    • 열처리공학회지
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    • 제28권3호
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    • pp.134-138
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    • 2015
  • Ag intermediated $TiO_2$ films were deposited by RF and DC magnetron sputtering and then vacuum annealed at 100, 200 and $300^{\circ}C$ for 30 minutes to investigate the effect of annealing temperature on the structural and optical properties of the films. For all depositions, the thickness of the $TiO_2$ and Ag films were kept constant at 24 and 15 nm by controlling the deposition time. As-deposited $TiO_2/Ag/TiO_2$ trilayer films have a weak crystalline and an optical reflectance in a near infrared wavelength region of 77.8%, while the films annealed at $300^{\circ}C$ show the polycrystalline structure and an increased mean optical reflectance of 80.4%. From the experimental results, it can be concluded that increasing the annealing temperature enhanced the structural and optical properties of the $TiO_2/Ag/TiO_2$ films.

Reference values for selected dry eye tests in normal Beagle dogs: a pilot study

  • Kim, Youngsam;Kang, Seonmi;Kim, Sunhyo;Shim, Jaeho;Go, Seokmin;Seo, Kangmoon
    • Journal of Veterinary Science
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    • 제23권1호
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    • pp.10.1-10.12
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    • 2022
  • Background: Dry eye disease (DED) cannot be diagnosed by a single test because it is a multifactorial disorder of the ocular surface. Although studies on various dry eye tests (DETs) in dogs have been reported, standard criteria have not been established except for the Schirmer tear test 1 (STT-1). Objectives: To establish reference values for DETs in dogs with normal STT-1 values (≥ 15 mm/min) and to analyze the correlation between DETs. Methods: The STT-1 was performed in 10 healthy Beagle dogs (20 eyes). After 20 min, interferometry (IF) for estimating the lipid layer thickness (LLT) of the tear film, tear meniscus height (TMH), non-invasive tear breakup time (NIBUT), and meibomian gland loss rate of the upper eyelid (MGLRU) and lower eyelid (MGLRL), were measured using an ocular surface analyzer. Results: Mean values for STT-1, TMH, and NIBUT were as follows: 21.7 ± 3.4 mm/min, 0.41 ± 0.21 mm, and 19.1 ± 9.5 sec, respectively. The most frequent LLT range, measured by IF, was 30-80 nm (11 eyes), followed by 80 nm (5 eyes) and 80-140 nm (4 eyes). MGLRU ≤ 25% was measured in 11 eyes and 26%-50% in 9 eyes; MGLRL ≤ 25% in 8 eyes and 26%-50% in 12 eyes. Besides positive correlation between TMH and NIBUT (P = 0.038), there were no significant associations between DETs. Conclusions: Data obtained in this study provided normative references that could be useful for diagnosing DED and for further research into correlation between DETs in dogs with DED.

근관장 측정에 있어서 디지털 영상 처리기와 주파수 의존형 측정기의 정확도 (The Accuracy of the Digital Imaging System and the Frequency Dependent Type Apex Locator in Root Canal Length Measurement)

  • 이병립;박창서
    • 치과방사선
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    • 제28권2호
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    • pp.435-459
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    • 1998
  • In order to achieve a successful endodontic treatment, root canals must be obturated three-dimensionally without causing any damage to apical tissues. Accurate length determination of the root canal is critical in this case. For this reason, I've used the conventional periapical radiography, Digora/sup (R)/(digital imaging system) and Root ZX/sup (R)/(the frequency dependent type apex locator) to measure the length of the canal and compare it with the true length obtained by cutting the tooth in half and measuring the length between the occlusal surface and the apical foramen. From the information obtained by these measurements, I was able to evaluate the accuracy and clinical usefulness of each systems. whether the thickness of files used in endodontic therapy has any effect on the measuring systems was also evaluated in an effort to simplify the treatment planning phase of endodontic treatment. 29 canals of 29 sound premolars were measured with #15, #20, #25 files by 3 different dentists each using the periapical radiography. Digora/sup (R)/ and Root ZX/sup (R)/. The measurements were then compared with the true length. The results were as follows: 1. In comparing mean discrepancies between measurements obtained by using periapical radiography(mean error: -0.449±0.444 mm), Digora/sup (R)/(mean error: -0.417±0.415 mm) and Root ZX/sup (R)/(mean error: 0.123±0.458 mm) with true length. periapical radiography and Digora/sup (R)/ system had statistically significant differences(p<0.05) in most cases while Root ZX/sup (R)/ showed none(p>0.05). 2. By subtracting values obtained by using periapical radiography, Digora/sup (R)/ and Root ZX/sup (R)/ from the true length and making a distribution table of their absolute values. the following analysis was possible. In the case of periapical film. 140 out of 261<53.6%) were clinically acceptable satisfying the margin of error of less than 0.5 mm. 151 out of 261 (53,6%) were acceptable in the Digora/sup (R)/ system while Root ZX/sup (R)/ had 197 out of 261(75.5%) within the limits of 0.5mm margin of error. 3. In determining whether the thickness of files has any effect on measuring methoths, no statistically significant differences were found(p>0.05). 4. In comparing data obtained from these methods in order to evaluate the difference among measuring methods, there was no statistically significant difference between periapical radiography and Digora/sup (R)/ system(p>0.05), but there was statistically significant difference between Root ZX/sup (R)/ and periapical radiography(p<0.05). Also there was statistically significant difference between Root ZX/sup (R)/ and Digora/sup (R)/ system(p<0.05). In conclusion, Root ZX/sup (R)/ was more accurate when compared with the Digora/sup (R)/ system and periapical radiography and seems to be more effective clinically in determining root canal length. But Root ZX/sup (R)/ has its limits in determining root morphology and number of roots and its accuracy becomes questionable when apical foramen is open due to unknown reasons. Therefore the combined use of Root ZX/sup (R)/ and the periapical radiography are mandatory. Digora/sup (R)/ system seems to be more effective when periapical radiographs are needed in a short period of time because of its short processing time and less exposure.

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근관 전색재의 방사선 불투과성에 관한 비교연구 (A COMPARATIVE STUDY ON RADIOPACITY OF ROOT CANAL SEALERS)

  • 김태민;김서경;황인남;황윤찬;강병철;윤숙자;이재서;오원만
    • Restorative Dentistry and Endodontics
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    • 제34권1호
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    • pp.61-68
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    • 2009
  • 다양한 근관전색제는 방사선 사진상 주위 해부학적 구조와 구별될 만한 방사선 불투과성을 나타내야 한다. 따라서 이런 물질들이 근관에 충전될 때의 방사선 불투과성 정도를 평가해야 할 필요성이 대두되고 있다. 본 실험에서는 다양한 근관전색제들의 방사선 불투과성을 평가하고자, 방사선 노출조건에 따른 aluminium step wedge에 대한 광학 밀도를 알아보고, 그 중 적절한 노출조건을 선택하여 수종의 근관 전색재의 방사선 불투과성 정도를 알루미늄 두께로 환산하여 비교해 보고자 한다. 방사선 불투과성의 기준을 위해 11개의 step으로 구성된 aluminum step wedge을 사용하여, 60kVp, 70kVp 관전압 상태에서 각각 0.2, 0.3, 0.4초 그리고 0.2, 0.3, 0.33초의 노출시간으로 교합필름상에서 방사선 촬영후 적절한 노출 조건을 구하였다. 직경 5 mm, 각각의 두께 0.5, 1.0, 1.5, 2.0, 2.5, 3.0 mm인 10종 (Tubli-$Seal^{TM}$, Kerr pulp Canal $Sealer^{TM}$, $AH26^{(R)}$, $AHplus^{(R)}$, AH plus jet starter $kit^{TM}$, Ad $seal^{TM}$ $Sealapex^{TM}$, Nogenol root canal $sealer^{TM}$, ZOB $seal^{TM}$, $Epiphany^{TM}$)의 근관전색재 시편을 각 재료와 두께당 10개씩 제작한 후, 동일한 두께의 상아질 시편, aluminum step wedge와 함께 정해진 노출시간에 따라 방사선 촬영을 하였다. 모든 필름은 자동현상기로 현상하였다. 시편의 방사선 흑화도를 densitometer로 5회 반복 측정 후, 평균값을 구하여 알루미늄 두께로 환산하였다. 얻어진 정보를 분석하여 다음의 결과를 얻었다. 1. 관전압 60 kVp에서 노출시간 0.2, 0.3, 0.4초, 70 kVp에서 0.2, 0.3, 0.33초로 변화를 주어 방사선 촬영을 하였을 때, 흑화도가 ISO No. 6876 규격에 가장 적합한 것은 60 kVp, 0.2초 일 경우였다. 2. 측정된 근관 전색제의 방사선 불투과성은 2.29 mm Al (NOGENOL)로부터 13.69 mm Al (AH Plus jet)까지 다양하게 나타났으나, 모두 ANSI/ADA specification (2000) 또는 ISO No. 6876 (2001) 규격이 제시한 최소한 3 mm Al이상의 방사선 불투과성을 지녀야 한다는 기준에 적합하였다. 3. 재료의 두께가 증가할수록 방사선 불투과성은 증가하지만, 정비례하지는 않았다. 4. 각 실험재료의 1 mm 두께의 시편에 대한 mm Al값들은 통계적으로 유의한 차이가 있었다. 이상의 결과는 본 실험에 사용된 수종의 근관 전색재는 모든 규격에 적합한 방사선 불투과성을 가지고 있음을 시사한다.

근관 충전재 및 치근단 역충전재의 방사선 불투과성에 관한 비교 연구 (A COMPARATIVE STUDY ON RADIOPACITY OF CANAL FILLING AND RETROGRADE ROOT-END FILLING MATERIALS)

  • 김용상;김서경;황윤찬;황인남;오원만
    • Restorative Dentistry and Endodontics
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    • 제33권2호
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    • pp.107-114
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    • 2008
  • 본 실험에서는 다양한 방사선 노출 조건에 따른 aluminum step wedge에 대한 광학 밀도를 알아보고, 그 중 적절한 노출조건을 선택하여 수종의 근관 충전재와 치근단 역충전재의 방사선 불투과성 정도를 평가, 비교하였다. 방사선 불투과성의 기준을 위해 11개의 step으로 구성된 aluminum step wedge를 제작하여, 60 kVp, 70 kVp 관전압 상태에서 각각 0.2, 0.,3, 0.4초와 0.2, 0.3, 0.33초의 노출시간으로 교합 필름상에서 방사선 촬영 후 적절한 노출조건을 구하였다. 직경 5 mm, 각각의 두께 0.5, 1.0, 1.5, 2.0, 2.5, 3.0 mm인 10종 (Gutta-percha, amalgam, Super $EBA^{(R)}$, MTA, $IRM^{(R)}$, Fuji II LC, $Dyract^{(R)}$ AP AH, $26^{(R)}$, $Sealapex^{TM}$, Tubli-$Seal^{TM}$)의 근관 충전재와 치근단 역충전재 시편을 각 재료와 두께당 10개씩 제작한 후, 동일한 두께의 상아질 시편, aluminum step wedge와 함께 정해진 노출조건에 따라 방사선 촬영을 하였다. 모든 필름은 자동현상기로 현상하였다. 시편의 흑화도를 densitometer (Model 07-443, Victoreen Inc, Cleveland, Ohio, USA)로 5회 반복 측정 후, 평균값을 구하여 회귀분석 후 알루미늄 두께로 환산하였다. 얻어진 정보를 분석하여 다음의 결과를 얻었다. 1. 관전압 60 kVp에서 노출시간 0.2, 0.3, 0.4초, 70 kVp에서 0.2, 0.3. 0.33초로 변화를 주어 방사선 촬영을 하였을 때, 흑화도가 0.5-2.5 사이여야 한다는 ISO No. 6876 규격에 가장 적합한 것은 60 kVp, 0.2초일 경우였다. 2. 측정된 근관 충전재와 치근단 역충전재들의 방사선 불투과성 모두 ISO No.4049 규격에 적합하였다. 3. 광중합형 글래스 아이오노머 (Fuji II LC)와 컴포머 (Dyract)를 제외하고는 ANSI/ADA specification (2000) 또는 ISO No. 6876 (2001)규격이 제시한 최소한 3 mm Al 이상의 방사선 불투과성을 지녀야 한다는 규격에 적합하였다. 이상의 결과는 본 실험에 사용된 수종의 근관 충전재와 치근단 역충전재 중 Fuji II LC와 Dyract를 제외하고 모두 규격에 적합한 방사선 불투과성을 가지고 있음을 시사한다.