• 한국세라믹학회지
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• 제37권1호
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• pp.96-101
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• 2000

Comparative studies on microstructure, and mechanical and anti-oxidation properties between TiN and Ti-Si-N films were performed. The Ti-Si-N films were deposited on high-speed steel and silicon wafer substrates by plasma-assisted chemcial vapor deposition(PACVD) technique. The Si addition to TiN film caused to change the microstructure such as grain size refinement, randomly multi-oriented microstructure, and nano-sized codeposition of silicon nitride in the TiN matrix. The Ti-Si-N film, contains Si content of ∼7 at.%, showed the micro-hardness value of ∼3400 HK, which was higher than the pure TiN film whose hardness was ∼1500HK. The Ti-Si(7 at.%)-N film also showed much improved anti-oxidation properties compared with those of the pure TiN film. These properties were also related to the microstructure of Ti-Si(7 at.%)-N film was formed and retarded further oxidation of the nitridelayer. These properties were also related to the microstructure of Ti-Si(7 at.%)-N film which was characterized by nano-sized precipitates of silicon nitride phase in the TiN matrix and randomly oriented grains.

• Corrosion Science and Technology
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• 제5권1호
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• pp.15-22
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• 2006

The introduction of two-grid inside a conventional process system produces a reactive coating deposition and increases metal ion ratio in the plasma, resulting in denser and smoother films. The corrosion behaviors of TiN coatings were investigated by electrochemical methods, such as potentiodynamic polarization test and electrochemical impedance spectroscopy (EIS) in deaerated 3.5% NaCl solution. Electrochemical tests were used to evaluate the effect of microstructure on the corrosion behavior of TiN coatings exposed to a corrosive environment. The crystal structure of the coatings was examined by X-ray diffractometry (XRD) and the microstructure of the coatings was investigated by scanning electron microscopy (SEM) and transmission electron spectroscopy (TEM). In the potentiodynamic polarization test and EIS measurement, the corrosion current density of TiN deposited by two grid-attached magnetron sputtering was lower than TiN deposited by conventional magnetron type and also presented higher Rct values during 240 h immersion time. It is attributed to the formation of a dense microstructure, which promotes the compactness of coatings and yields lower porosity.

• 대한금속재료학회지
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• 제50권7호
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• pp.539-544
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• 2012

Thermal shock behavior of TiN-coated SUS 304 substrate was investigated using a laser ablation method. By short surface ablation with a pulse Nd-YAG laser, considerable surface crack and spalling were observed, whereas there were few oxidation phenomena, such as grain growth of TiN crystallites, nucleation and growth of $TiO_2$ crystallites, which were observed from the coatings quenched from $700^{\circ}C$ in a chamber. The oxygen concentration of the ablated coating surface with the pulse laser also had a lower value than that of the quenched coating surface by Auger electron spectroscopy and electron probe micro analysis. These results were attributed to the fact that the properties of the pulse laser method have a very short heating time and so the diffusion time for oxidation was insufficient. Consequently, it was verified that the laser thermal shock test provides a way to evaluate the influence of the thermal shock load reduced oxidation effect.

• 한국표면공학회지
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• 제30권6호
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• pp.391-399
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• 1997

To figure out wheher the tribological properties of a hras-coating layer can be imporved by ion implantatio, TiN-coated SKD 11 61 were implanted with nitrogen ion and their wear peoperties were examined systematically. The amount of nitrgen ione implanted on the coating layer was $2 \times 10^{15},\;10^{16},\;10^{17},\;and\;10^{18}\;ions/\textrm{cm}^2$, respectively. X-ray diffraction revealed theintensity of the peaks belong TiN tended to increase as the ion dose increased, which implied that the implantation promoted the formation of TiN in the coated later. Howeverthe hardensity of the specimens increased then decreased again as the ion dose increased, resulting in a obvious drop of the hardness for the ion does of $2 \times 10^{18}\;ions/\textrm{cm}^2$<\TEX>. While the adhesion of the coated layer of SKD 61 was excllent regrdless of the implatation, the adhesion of the later of SKD 11 was apparently improved by the implantation. The overall wear properties of SKD 11 was better than that of SKD 61, and the best result was yielded at the ion dose of $2 \times 10^{15}\;ions/\textrm{cm}^2$<\TEX>.

• 한국표면공학회지
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• 제54권3호
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• pp.133-138
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• 2021

Ternary Ti-X-N coatings, where X = Al, Si, Cr, O, etc., have been widely used for machining tools and cutting tools such as inserts, end-mills, and etc. Ti-Al-N-O coatings were deposited onto silicon wafer and WC-Co substrates by a cathodic arc evaporation (CAE) technique at various negative substrate bias voltages. In this study, the influence of substrate bias voltages during deposition on the microstructure and mechanical properties of Ti-Al-N-O coatings were systematically investigated to optimize the CAE deposition condition. Based on results from various analyses, the Ti-Al-N-O coatings prepared at substrate bias voltage of -80 V in the process exhibited excellent mechanical properties with a higher compressive residual stress. The Ti-Al-N-O (-80 V) coating exhibited the highest hardness around 30 GPa and elastic modulus around 303 GPa. The improvement of mechanical properties with optimized bias voltage of -80 V can be explained with the diminution of macroparticles, film densification and residual stress induced by ion bombardment effect. However, the increasing bias voltage above -80 V caused reduction in film deposition rate in the Ti-Al-N-O coatings due to re-sputtering and ion bombardment phenomenon.

• 구강회복응용과학지
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• 제32권3호
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• pp.194-201
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• 2016

목적: 본 연구는 Co-Cr, Ti-6Al-4V 합금에 Zirconium Nitride (이하 ZrN) 적용 시, 의치상 레진과의 접착력을 비교하는 것이다. 연구 재료 및 방법: Co-Cr, Ti-6Al-4V 디스크(직경 10 mm, 두께 2.5 mm)를 각각 14개씩 제작하였고, ZrN 코팅에 따라 2개의 그룹으로 나누었다. Primer로 시편 전처리 후, 의치상 레진(직경 6 mm, 두께 5 mm)을 부착하였다. 표면 측정기를 이용하여 시편의 거칠기를 측정한 후, 만능 시험기를 이용하여 전단결합강도를 측정하였으며, 이원분산분석으로 통계 분석하였다. 시편 표면과 파절 양상을 주사전자현미경을 이용하여 관찰하였다. 결과: ZrN을 코팅한 시편에서 유의하게 높은 표면 거칠기를 나타내었고(P < 0.05), 전단결합강도는 낮았다(P < 0.001). ZrN 코팅 시편에서는 혼합성 파절과 부착성 파절이 함께 나타났다. 결론: Co-Cr, Ti-6Al-4V 합금에서 ZrN 코팅 처리는 의치상 레진과의 결합력을 약화시켰다.

• 대한치과기공학회지
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• 제30권1호
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• pp.25-31
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• 2008

Cp-Ti and Ti-6Al-4V alloys commonly used dental implant materials, particularly for orthopaedic and osteosynthesis because of its suitable mechanical properties and excellent biocompatibility. This alloys have excellent corrosion behavior in the clinical environment. The first factor to decide the success of dental implantation is sufficient osseointegration and high corrosion resistance between on implant fixture and its surrounding bone tissue. In this study, in order to increase corrosion resistance and biocompatibility of Cp-Ti and Ti-6Al-4V alloy that surface of manufactured alloy was coated with TiN by RF-magnetron sputtering method. The electrochemical behavior of TiN coated Cp-Ti and Ti-6Al-4V alloy were investigated using potentiodynamic (EG&G Co, PARSTAT 2273. USA) and potentiostatic test (250mV) in 0.9% NaCl solution at 36.5 $\pm$ 1$^{\circ}C$. These results are as follows : 1. From the microstructure analysis, Cp-Ti showed the acicular structure of $\alpha$-phase and Ti-6Al-4V showed the micro-acicular structure of ${\alpha}+{\beta}$ phase. 2. From the potentiodynamic test, Ecorr value of Cp-Ti and Ti-6Al-4V alloys showed -702.48mV and -319.87mV, respectively. Ti-6Al-4V alloy value was higher than Cp-Ti alloy. 3. From the analysis of TiN and coated layer, TIN coated surface showed columnar structure with 800 nm thickness. 4. The corrosion resistance of TiN coated Cp-Ti and Ti-6Al-4V alloys were higher than those of the non-coated Ti alloys in 0.9% NaCl solution from potentiodynamic test, indicating better protective effect. 5. The passivation current density of TiN coated Cp-Ti and Ti-6Al-4V alloys were smaller than that of the noncoated implant fixture in 0.9% NaCl solution, indicating the good protective effect resulting from more compact and homogeneous layer formation.

• 전기학회논문지
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• 제58권11호
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• pp.2214-2218
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• 2009

Dye-sensitized solar cell (DSC) has been considered as a possible alternative to current silicon based p-n junction photovoltaic devices due to its advantages of high efficiency, simple fabrication process and low production cost. Numerous researches for high efficient DSC in the various fields are under way even now. Among them, the compact layer, which prevents the back electron transfer between transparent conductive oxides and the redox electrolyte, is fabricated by various methods such as a ZnO dip-coating, $TiCl_4$ dip-coating, and Ti sputtering. In this study, we tried to fabricate the $TiO_2$ compact layer by the spin-coating method using aqueous $TiCl_4$ solution. The effect of the spin-coating method was checked as compared with conventional dip-coating method. As a result, DSC with a spin-coated compact layer had 33.4% and 6% better efficiency than standard DSC and DSC with a dip-coated compact layer.

• 한국전기전자재료학회논문지
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• 제21권7호
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• pp.660-664
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• 2008

Titanium nitride (TiN) thin films are widely used for hard coatings due to their superior hardness, chemical stability, low friction and good adhesion properties. In this study, we investigated the effect of DC power on the characteristics of TiN thin films deposited on Si and glass substrates by DC magnetron sputtering using TiN target. We made TiN films of 300 nm thickness with various DC powers. The structural properties of films are investigated by x-ray diffractions (XRD) and tribological properties are measured by nano-indentation, nano-scratch tester. The rms roughness was measured by atomic forced microscopy (AFM). In the result, TiN films had the smooth surface and exhibited (111) directions with the increase of DC Power. Also, especially in case of 175 W DC power, TiN film exhibited the maximum hardness about 8 GPa, and the critical load near 25.

• 한국기계가공학회지
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• 제12권2호
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• pp.20-26
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• 2013

This study focused on how it affects the surface roughness of work piece in cutting SCM415 steel, widely used steel in industry, by TiCN and TiN tools. Following conclusion was drawn from several experiments. The surface roughness of heat treated workpiece was better than that of non heat-treated materials. Moreover, the roughness of surface roughness(Ra 0.25) on feeding rate of 0.05 was better when it was in wet process, rather than dry process. As the feeding rate increases, TiCN coating tool shows better roughness of surface than TiN tool. Also, in heated treatment, TiCN coating tool shows the least straightness dimension deviation at feeding rate of 0.05, 0.15mm/rev, and concave-like R shape appears by the feeding rate orders of 0.05, 0.15, 0.1, 0.125 and 0.075mm/rev.