• The Magazine of the IEIE
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• v.24 no.6
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• pp.38-49
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• 1997

0.4mm Resign Rule의 Super Low Power Dissipation, Low Voltage. Operation-5- Full CMOS SRAM Cell을 개발하였다. Retrograde Well과 PSL(Poly Spacer LOCOS) Isolation 공정을 사용하여 1.76mm의 n+/p+ Isolation을 구현하였으며 Ti/TiN Local Interconnection을 사용하여 Polycide수준의 Rs와 작은 Contact저항을 확보하였다. p-well내의 Boron이 Field oxide에 침적되어 n+/n-well Isolation이 취약해짐을 Simulation을 통해 확인할 수 있었으며, 기생 Lateral NPN Bipolar Transistor의 Latch Up 특성이 취약해 지는 n+/n-wellslze는 0.57mm이고, 기생 Vertical PNP Bipolar Transistor는 p+/p-well size 0.52mm까지 안정적인 Current Gain을 유지함을 알 수 있었다. Ti/TiN Local Interconnection의 Rs를 Polycide 수준으로 낮추는 것은 TiN deco시 Power를 증가시키고 Pressure를 감소시킴으로써 실현할 수 있었다. Static Noise Margin분석을 통해 Vcc 0.6V에서도 Cell의 동작 Margin이 있음을 확인할 수 있었으며, Load Device의 큰 전류로 Soft Error를 개선할수 있었다. 본 공정으로 제조한 1M Full CMOS SRAM에서 Low Vcc margin 1.0V, Stand-by current 1mA이하(Vcc=3.7V, 85℃기준) 를 얻을 수 있었다.

• The Journal of Korean Academy of Prosthodontics
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• v.49 no.1
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• pp.16-21
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• 2011

Purpose: The purpose of this study was to investigate the bioactivity of precalcified nanotubular $TiO_2$ layer on Ti-6Al-7Nb alloy. Materials and methods: Anodic oxidation was carried out at a potential of 20 V and current density of 20 mA/$cm^2$ for 1 hour. The glycerol solution containing 1 wt% $NH_4F$ and 20 wt% deionized water was used as an electrolyte. Precalcification treatment was obtained by soaking in $Na_2HPO_4$ solution at $80^{\circ}C$ for 30 minutes followed by soaking in saturated $Ca(OH)_2$ solution at $100^{\circ}C$ for 30 minutes, followed by heat treatment at $500^{\circ}C$ for 2 hours. To evaluate the activity of precalcified nanotubular $TiO_2$ layer, specimens were immersed in a simulated body fluid with pH 7.4 at $36.5^{\circ}C$ for 10 days. Results: 1. Nanotubular $TiO_2$ layer showed the highly ordered dense structure by interposing small diameter nanotubes between large ones, the shape of nanotubes was enlarged as going down. 2. The mean length of nanotubes was $517.0{\pm}23.2\;nm$ innm glycerol solution containing 1 wt% $NH_4F$ and 20 wt% $H_2O$ at 20 V for 1 hour. 3. The bioactivity of Ti-6Al-7Nb alloy was improved with formation of nanotubular $TiO_2$ layer and precalcification treatment in $80^{\circ}C$ 0.5 M $Na_2HPO_4$ and saturated $100^{\circ}C$ $Ca(OH)_2$ solution. Conclusion: Bioactivity of precalcified nanotubular $TiO_2$ layer on Ti-6Al-7Nb alloy was improved.

• Journal of the Korean Society for Heat Treatment
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• v.8 no.1
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• pp.32-43
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• 1995

Ti-6Al-4V alloy are widely used in chemical and aircraft industries for their good corrosion resistance and high strength to weight ratio. Surface alloying of Ti alloy by $CO_2$ laser is able to produce few hundred micrometers thick TiN surface-alloyed layer with high hardness on the substrate very simplely by injecting reaction gas($N_2$) into a laser-generated melt pool and adjust the hardness to the specific requirements of the individual application by changing of laser processing parameters. This research has been investigated the effect of such parameters on TiN surface-alloying of Ti-6Al-4V alloy by $CO_2$ laser. The maximum hardness of TiN surface-alloyed zone waw obtained by injecting 100% $N_2$ gas and it was decreased as the amount of $N_2$ gas in Ar and $N_2$ gas mixture was decreased. As scanning speed was increased, the hardness and depth of TiN surface-alloyed zone was decreased at constant laser power. The surface hardness after double scanning laser treatment is higher than that of single scanning. At constant laser power, the surface roughness is increased after the surface alloying if laser scanning speed is decreased.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.75-75
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• 2018

Commercially pure titanium (CP-Ti) and Ti-6Al-4V alloys have been widely used in implant materials such as dental and orthopedic implants due to their corrosion resistance, biocompatibility, and good mechanical properties. However, surface modification of titanium and titanium alloys is necessary to improve osseointegration between implant surface and bone. Especially, when titanium oxide nanotubes are formed on the surface of titanium alloy, cell adhesion is greatly improved. In addition, plasma electrolytic oxide (PEO) coatings have a good safety for osseointegration and can easily and quickly form coatings of uniform thickness with various pore sizes. Recently, the effects of bone element such as magnesium, zinc, strontium, silicon, and manganese for bone regeneration are researching in dental implant field. The purpose of this study was researched on the surface morphology of PEO-treated Ti-6Al-4V alloy after anodic titanium oxide treatmentusing various instruments. Ti-6Al-4V ELI disks were used as specimens for nanotube formation and PEO-treatment. The solution for the nanotube formation experiment was 1 M $H_3PO_4$ + 0.8 wt. % NaF electrolyte was used. The applied potential was 30V for 1 hours. The PEO treatment was performed after removing the nanotubes by ultrasonics for 10 minutes. The PEO treatment after removal of the nanotubes was carried out in the $Ca(CH_3)_2{\cdot}H_2O+(CH_3COO)_2Mg{\cdot}4H_2O+Mn(CH_3COO)_2{\cdot}4H_2O+Zn(CH_3CO_2)_2Zn{\cdot}2H_2O+Sr(CH_2COO)_2{\cdot}0.5H_2O+C_3H_7CaO_6P$ and $Na_2SiO_3{\cdot}9H_2O$ electrolytes. And the PEO-treatment time and potential were 3 minutes at 280V. The morphology changes of the coatings on Ti-6Al-4V alloy surface were observed using FE-SEM, EDS, XRD, AFM, and scratch tester. The morphology of PEO-treated surface in 5 ion coating solution after nanotube removal showed formation or nano-sized mesh and micro-sized pores.

• Journal of Welding and Joining
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• v.33 no.2
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• pp.1-7
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• 2015

This article describes the basic technical concepts for applying the friction stir welding (FSW) process to titanium and its alloys. Titanium and its alloys are demanding applications of FSW. During FSW, a protective atmosphere is needed at the welding region to prevent the joints from oxidation due to the absorption of interstitial elements (O, N, and H) at high temperature. The process parameters for FSW have great influence on the microstructure and properties of the joints. No phase transformation occurred in CP Ti because FSW was achieved below the ${\beta}$-transus temperature. Therefore, the mechanical properties of the joints with CP Ti were governed by recrystallization and grain refinement. Furthermore, the strong crystallographic texture indicating <0001>//ND formed in the stir zone. On the other hands, the phase transformation occurred in Ti-6Al-4V alloy because the process temperature reached above ${\beta}$-transus temperature. For this reason, the mechanical properties of the joints with Ti-6Al-4V alloy were altered by not only recry stallization and grain refinement but also phase transformation during FSW. Engineers who want to get sound FSW joints with Ti-6Al-4V alloy have to pay attention to the control about process conditions.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.159-159
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• 2017

Ti-6Al-4V alloy have been used for dental implant because of its excellent biocompatibility, corrosion resistance, and mechanical properties. However, the integration of such implant in bone was not in good condition to achieve improved osseointergraiton. For solving this problem, calcium phosphate (CaP) has been applied as coating materials on Ti alloy implants for hard tissue applications because its chemical similarity to the inorganic component of human bone, capability of conducting bone formation and strong affinity to the surrounding bone tissue. Various metallic elements are known to play an important role in the bone formation and also affect bone mineral characteristics. Especially, Zn is essential for the growth of the human and Zn coating has a major impact on the improvement of corrosion resistance. Plasma electrolytic oxidation (PEO) is a promising technology to produce porous and firmly adherent inorganic Zn containing TiO2(Zn-TiO2)coatings on Ti surface, and the a mount of Zn introduced in to the coatings can be optimized by altering the electrolyte composition. In this study, effect of Zn content on the corrosion behavior of Ti-6Al-4V alloy after plasma electrolytic oxidation were studied by SEM, EDS, XRD, AC impedance, and potentiodynamic polarization test. The potentiodynamic polarization and AC impedance tests for corrosion behaviors were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67 mV/s and potential range from -1500 mV to +2000 mV. Also, AC impedance was performed at frequencies ranging from 10 MHz to 100 kHz for corrosion resistance.

• International Journal of Precision Engineering and Manufacturing-Green Technology
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• v.5 no.5
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• pp.605-612
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• 2018

This work investigates the relationships between the static mechanical properties of Ti-6Al-4V manufactured through selective laser melting (SLM) and post-process heat treatments, namely stress relieve, annealing and hot isostatic pressing (HIP). In particular, Ti-6Al-4V parts were fabricated in three different build orientations of X, Z, and $45^{\circ}$ to investigate the multi-directional mechanical properties. The results showed that fully densified Ti-6Al-4V parts with densities of up to 99.5% were obtained with optimized SLM parameters. The microstructure of stress relieved and mill annealed samples was dominated by fine ${\alpha}^{\prime}$ martensitic needles. After HIP treatment, the martensite structure was fully transformed into ${\alpha}$ and ${\beta}$ phases (${\alpha}+{\beta}$ lamellar). Within the realm of tensile properties, the yield and ultimate strength values were found statistically similar with respect to the built orientation for a given heat treatment. However, the ductility was found orientation dependent for the HIP samples, where a lower value was observed for samples built in the X direction.

• Journal of the Korean Society for Heat Treatment
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• v.12 no.3
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• pp.199-205
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• 1999

The quaternary Ti-Al-V-N films have been grown on glass substrates by reactive dc and rf magnetron sputter deposition from a Ti-6Al-4V target in mixed Ar-$N_2$ discharges. The Ti-Al-V-N films were investigated by means of X-ray diffraction(XRD), electron probe microanalysis(EPMA) and scratch tester. Both XRD and EPMA results indicated that the Ti-Al-V-N films were of single B1 NaCl phase having columnar structure with the (111) preferred orientation. Scratch tester results showed that the adhesion strength of Ti-Al-V-N films which treated with substrate heating and vacuum annealing was superior to that of as-deposited film. The good adhesion strength was also achieved in the double-layer structure of Ti-Al-V-N/Ti-Al-V/Glass.

• Korean Journal of Metals and Materials
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• v.50 no.1
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• pp.86-91
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• 2012

Ti-6Al-4V extra low interstitial (ELI) alloy has been widely used as an orthopedic implant material because of its excellent biocompatibility, corrosion resistance and mechanical properties. However, V-free titanium alloys such as Ti-6%Al-7%Nb and Ti-5%Al-2.5%Fe have recently been developed because of the toxicity of V. Hydroxyapatite (HA) is used as a coating material on Ti or Ti biomaterials due to its good biocompatibility. However, HA coated on Ti alloy causes a problem for tissue by peeling off during usage. Therefore, such peeling off during long time usage can be suppressed by adding HA in Ti or Ti alloy composites. The aim of this study was to manufacture an ultra fine grained (UFG) Ti-Nb-HA bulk alloy, which is usually difficult to fabricate using melting and casting technology, by rapid sintering process using high energy mechanical milled (HEMM) powder.

• Journal of the Mineralogical Society of Korea
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• v.14 no.1
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• pp.73-84
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• 2001

티타늄과 산소의 함량이 서로 다른 4가지의 합성 페롭스카이트형(perovskite-type) 광물(($K_2$$La_2$$Ti_{n}$/$O_{2n+4}$, n=3, 4, 5, 6; 14/mcm, 14/mmm, I42 m)을 대상으로 리트벨트(Rietveld)구조분석법을 실시하여 결정구조를 밝히고 티타늄함량에 따른 층상형 구조를 연구하였다. 4가지 합성시료에 대하여 구조분석을 실시한결과 대표적인 페롭스카이트형 광물인 토소나이트(taustonite, $La_{1-x}$ //$K_{x}$ /$TiO_3$, x<0.4)가 주성분으로 나타났으며 토스나이트내에 12개의 산소를 배위하는 A자리 양이온은 자리점유율에 의해 $La^{3+}$ 와 $K^{+}$ /의 치환관계를 보여준다 공간군은 14/mcm, 단위포는 a=5.505(1)~5.510(1)$\AA$, c=7.793(1)~7.796(1)$\AA$ V=236.25~236.66 $\AA^3$ 범위의 값을 갖는다. 구조의 정밀도를 나타내는 R지수를 살펴보면 $R_{B}$ 값은 5.31~9.10 S(GofF)값은 0.86~1.24로 각각 계산되었다. 12배위를 하는 A자리 양이온인 란탄과 산소의 평균거리는 2.755$\AA$이고 6배위를 하는 B자리 양이온인 티타늄과 산소의 평균거리는 1.948 $\AA$의 결과를 얻었다. 합성된페롭스카이트형 광물의 층상구조가 알려져 있지 않아 시뮬레이션을 통해 구조모델을 결정하였으며 그결과 n=3인 R-38시료에서만 두 종류의 층상 페롭스카이트($La_2$$K_2$$Ti_3$$O_{10}$ ) 구조 (A-type: 14/mmm, a=3.8178 $\AA$, c=29.9189 $\AA$, V=436.04 $\AA^3$, B-type: 142 m, a =3.8376 $\AA$, c=28.023 $\AA$, V=412.6 $\AA^3$)가 존재함을 확인하였으나 다른 시료에서는 토소나이트, 금홍석 외에 새로운 합성광물로 제파이트의 존재를 확인하였다.