• Title/Summary/Keyword: Ti 전극

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Characteristics of (Ba,Sr)RuO$_3$Bottom Electrodes by Liquid Delivery Metalorganic Chemical Vapor Deposition (액체 운반 유기 금속 화학 기상 증착법에 의한 $(Ba,Sr)RuO_3$ 하부전극의 특성)

  • Choe, Eun-Seok;Yun, Sun-Gil
    • Korean Journal of Materials Research
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    • v.11 no.11
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    • pp.997-1000
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    • 2001
  • Conducting perovskite oxide, $(Ba,Sr)RuO_3(BSR)$, which has many advantages for $(Ba,Sr)TiO_3(BST)$ due to their similarity in crystal structure, lattice constant and chemical composition, was prepared on n-type Si (100) by liquid delivery metalorganic chemical vapor deposition(LDMOCVD). The deposition characteristics of BSR were controlled by gas-phase mass-transfer in the experiment. The BSR films deposited at 50$0^{\circ}C$ and oxygen flow rate of 100 sccm(standard cc/min) showed an average roughness of 22 $\AA$and resistivity of 810 $\mu$$\Omega$-cm. The roughness of BSR films with oxygen flow rate showed a close relationship with the resistivity of films. BSR (110) peak shifted toward lower Bragg angle with increase of x in the$(Ba_x,Sr_{1-x})TiO_3$. The resistivity of BSR films increased from 810 to 924 $\mu$$\Omega$-cm with increase of Ba content(x).

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Disinfection of harmful organism for ballast water using electrolytic treatment system (전해처리를 통한 밸러스트수의 유해생물 살균처리)

  • 박상호;김인수
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2004.04a
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    • pp.227-232
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    • 2004
  • Ballast water from ship harmful microorganism sterilized use of electrolytic sterilization system. The experimental methods were use of peristaltic flow pump upward on electrode pole. Due to reaction time, HRT were unlike microorganism on flow rate. In electrolysis, dioxide iridium coated titanium(Ti/IrO$_2$) and stainless steel plate were used for anode and cathode respectively. Current density controls make use of D.C Power supply on 250V 100Amper. Experimental use of current density between 0.1 and 0.5A was able to disinfect microorganism at 5 seconds by the reaction time. This study shows that the electrolyzed water has a potential for the sterilization of ballast water.

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The effect of substitution elements(Co, Cr, Fe) on the properties of Zr-based hydrogen storage alloy electrode for Ni-MH secondary battery (Ni-MH 2차 전지용 Zr계 수소저장합금전극의 특성에 미치는 치환원소(Co, Cr, Fe)의 영향)

  • Choi, Seung-Jun;Jung, So-Yi;Seo, Chan-Yeol;Choi, Jeon;Park, Choong-Nyeon
    • Transactions of the Korean hydrogen and new energy society
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    • v.10 no.3
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    • pp.185-189
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    • 1999
  • Effects of alloy modification with the $Zr_{0.6}Ti_{0.4}V_{0.4}Ni_{1.2}Mn_{0.4}$ alloy for an electrode use have been investigated. For the alloy composition, a part of Mn was substituted by Co, Cr and Fe. The experimental results showed that Co accelerated activation of alloy, and Fe and Cr improved the discharge capacity. These results agree with P-C-T curves of each alloy. But substituting Fe for Mn showed the decrease of the discharge capacity when discharged at high rate (60mA, about 1C rate). Considering both the discharge capacity and the high rate discharge property, $Zr_{0.6}Ti_{0.4}V_{0.4}Ni_{1.2}Mn_{0.3}Cr_{0.1}$ alloy was found to be the best alloy among the alloys subjected to the test.

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Electrical properties of PZT films on Pt and $LaNiO_3$ electrode by using sol-gel method (Pt와 $LaNiO_3$ 전극에 대한 PZT(53/47) sol-gel 막의 전기적 특성)

  • Seo, Byung-Jun;Yeo, Ki-Ho;Ryu, Ji-Goo;Kim, Kang-Eon;Chung, Su-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.641-643
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    • 2003
  • The ferroelectric properties of PZT(53/47) thin film was investigated by methoxy enthanol solution based on sol-gel method. The thickness of each layer by spincoating 0.25M sol at one time was $0.1{\mu}m$ and crack-free film was formed. $LaNiO_3/Si(100)$ electrode and $Pt/Ti/SiO_2/Si(100)$ electrode was coated by PZT sol at several times. PZT orientation was confirmed as a method of XRD and coercive field(Ec) as well as remnant polarization(Pr) was investigated from hysterisis curve. As a result of XRD analysis, we can know that the orientation of on PZT/LNO/Si(100) is better than on $Pt/Ti/SiO_2/Si(100)$. The remnant polarization(Pr) in LNO electrode was $87.5{\mu}C/cm^2$ and $39.8{\mu}C/cm^2$ in Pt. From this figures, it is investigated that the Pr in LNO electrode was better than in Pt.

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A Scientific Approach for Improving Sensitivity and Selectivity of Miniature, Solid-state, Potentiometric Carbon Monoxide Gas Sensors by Differential Electrode Equilibria Mechanism (전극평형전위차 가스 센싱 메커니즘을 적용한 일산화탄소 소형 전위차센서의 특성 향상에 관한 연구)

  • Park, Jun-Young;Kim, Ji-Hyun;Park, Ka-Young;Wachsman, Eric D.
    • Journal of the Korean Ceramic Society
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    • v.47 no.1
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    • pp.92-96
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    • 2010
  • Based on the differential electrode equilibria approach, potentiometric YSZ sensors with semiconducting oxide electrodes for CO detection are developed. To improve the selectivity, sensitivity and response-time of the sensor, our strategy includes (a) selection of an oxide with a semiconducting response to CO, (b) addition of other semiconducting materials, (c) addition of a catalyst (Pd), (d) utilization of combined p- and n-type electrodes in one sensor configuration, and (e) optimization of operating temperatures. Excellent sensing performance is obtained by a novel device structure incorporating $La_2CuO_4$ electrodes on one side and $TiO_2$-based electrodes on opposite substrate faces with Pt contacts. The resulting response produces additive effects for the individual $La_2CuO_4$ and $TiO_2$-based electrodes voltages, thereby realizing an even higher CO sensitivity. The device also is highly selective to CO versus NO with minor sensitivity for NO concentration, compared to a notably large CO sensitivity.

Effects of substrate temperatures on the properties of PLZT thin films deposited by RF magnetron sputtering (기판온도에 따른 PLZT박막의 결정성과 전기적 특성)

  • Lee, In-Seok;Yoon, Ji-Eun;Kim, Sang-Jih;Son, Young-Guk
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.225-225
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    • 2008
  • PLZT 박막을 Pt/Ti/$SiO_2$/Si 기판 위에 RF-마그네트론 스퍼터링방법으로 형성할 때 기판온도에 따른 PLZT 박막의 결정성과 전기적 특성 및 강유전 특성에 미치는 영향에 관하여 연구하였다. 하부전극 Pt와 PLZT 박막 사이에는 완충층으로 $TiO_2$를 사용하여 계면에서의 상호확산을 제어하면서 우수한 물성의 PLZT 박막을 얻고자 하였으며, 여러 기판온도에서 PLZT 박막을 증착한 후, 박막의 결정화를 위해 급속열처리법으로 $700^{\circ}C$로 후열처리하였다. 그 결과 기판온도 $400^{\circ}C$에서 증착한 PLZT 박막이 가장 우수한 특성을 나타내었으며, 이때의 잔류분극과 누설전류밀도는 각각 15.8 ${\mu}C/cm^2$, $5.4\times10^{-9}A/cm^2$ 이였다. 그러나 $500^{\circ}C$에서는 결정립 조대화현상이 나타나면서 잔류분극과 누설전류밀도는 9 ${\mu}C/cm^2$, $3.09\times10^{-7}A/cm^2$로 특성이 저하되었다.

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Silver Nanowire-Based Stretchable Transparent Electrodes for Deformable Organic Light-Emitting Diodes (신축성 유기발광다이오드를 위한 은 나노와이어 기반의 신축성 투명 전극 기판 연구)

  • Jung, Hyunsu;Go, Hyeck;Park, Gye-Choon;Yun, Changhun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.10
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    • pp.609-614
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    • 2017
  • The proposed stretchable transparent electrodes based on silver nanowires (AgNWs) were prepared on a polyurethane (PU) substrate. In order toavoid the surface roughness caused by the silver nanowires, a titanium oxide ($TiO_2$) buffer layer was addedby coating and heating the organometallic sol-gel solution. The fabricated stretchable electrodes showedan electrical sheet resistance of $24{\Omega}sq^{-1}$, 78% transmittance at 550 nm, and an average surface roughness below 5 nm. Furthermore, the AgNW-based electrode maintained its initial electrical resistance under 130% strain testing conditions, without the assistance of additional conductive polymer layers. In this paper, the critical role of the $TiO_2$ buffer layer between the AgNW network and the PU substrate has been discussed.

The characteristics of optical waveguides and IDT electrodes fabriacted for acousto-optic tunable filters (AOTF용 광도파로 및 IDT 전극제작)

  • 윤형도;한상필;김성구;임영민;윤대원
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.11
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    • pp.76-82
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    • 1997
  • The characteristics of optical waeguides and IDT electrodes fabricated for acousto-optic tunable filters (AOTE) used for optical communications were analyzed. A $Ti:LiNbO_3$ in-diffusion method was employed for the formation of the optical waveguide with a dimension of width $8\mu\textrm{m}$, length $30000\mu\textrm{m}$, and thickness $1150{\AA}$. The diffusion was carried at $1050^{\circ}C$ for 8 houss to pattern the optical waveguide with Ti. The resulted waveguide exhibited a single mode at a 1550nm wavelength range and its propagation loss was less than 0.5dB/cm. The width of IDT, with 10 SAW periods, was $5000\mu\textrm{m}$, S11 reflection characteristics and impedances of th eelectrodes deposited with Au were analyzed using a network analyzer; $48.1\Omega$ at th ecenter frquency of 193MHz for Au deposition thickness of $1500{\AA}$ and $50.7\Omega$ at the center frequency of 192MHz for au deposition thickness of $1600{\AA}$.

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The Electric and Ferroelectric of Pb(Zr0.52Ti0.48)O3 Thin Films Deposited on Ruthenium Electrodes (루테늄 전극위에 증착된 PZT 박막의 전기적 및 강유전 특성)

  • Hwang, Hyun Suk;Yu, Yougn Sik;Lim, Yun-Sik;Kang, Hyun-Il
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.63 no.1
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    • pp.46-49
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    • 2014
  • $Pb(Zr_{0.52}Ti_{0.48})O_3(PZT)$ thin films deposited on $Ru/RuO_2$ bottom electrode that grown for in-situ progress used rf magnetron sputtering method. We investigated the dependence of the crystalline and electrical properties in the way of capacitors PZT thin films. Our results show that all PZT films indicated polycrystalline perovskite structure with preferred orientation (110) and no pyrochlore phase is observed. The electric properties of the Ru improved with increasing Ru thin films thickness. A well-fabricated Ru/PZT/Ru (100 nm) /$RuO_2$ capacitor showed a leakage current density in the order of $2.03{\times}10^{-7}$ $A/cm^2$ as a 50 kV/cm, a remnant polarization (Pr) of 9.22 ${\mu}C/cm^2$, and a coercive field (-EC) of -32.22 kV/cm. The results show that $Ru/Ru/RuO_2$ bottom electrodes are expected to reduce the degradation ferroelectric fatigue and excellent ferroelectric properties.

Electrodic properties of PZT thin films growed on Ru/$RuO_2$ bottom eletrode (Ru/$RuO_2$ 하부전극에 성장한 PZT 박막의 전기적 특성 연구)

  • Choi, Jang-Hyun;Kang, Hyun-Il;Kim, Eung-Kwon;Park, Young;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.58-62
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    • 2002
  • Pb($Zr_{0.52}Ti_{0.48}$)$O_3$ (PZT) thin films deposited on the Pt/Ti and Ru/$RuO_2$ bottom electrode by rf magnetron sputtering methode. Ru/$RuO_2$ bottom electrode deposited on the p-type wafer as Ru thickness by in-situ process. Our results show that all PZT films indicated perovskite polycrystalline structure with perferred orientation (110) and no pyrochlore phase is observed. A well-fabricated $RuO_2$/PZT/Ru(100nm)/$RUO_2$ capacitor showed a leakage current density in the order of $2.13{\times}10^{-7}A/cm^2$ as 100 kV/cm, a remanent polarization of 7.20 ${\mu}C/cm^2$, and a coercive field of 58.37 kV/cm. The results show that the new Ru/$RuO_2$ bottom electrodes are expected to reduce the degradation ferroelectric fatigue and excellent ferroelectric properties.

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