Abstract
The characteristics of optical waeguides and IDT electrodes fabricated for acousto-optic tunable filters (AOTE) used for optical communications were analyzed. A $Ti:LiNbO_3$ in-diffusion method was employed for the formation of the optical waveguide with a dimension of width $8\mu\textrm{m}$, length $30000\mu\textrm{m}$, and thickness $1150{\AA}$. The diffusion was carried at $1050^{\circ}C$ for 8 houss to pattern the optical waveguide with Ti. The resulted waveguide exhibited a single mode at a 1550nm wavelength range and its propagation loss was less than 0.5dB/cm. The width of IDT, with 10 SAW periods, was $5000\mu\textrm{m}$, S11 reflection characteristics and impedances of th eelectrodes deposited with Au were analyzed using a network analyzer; $48.1\Omega$ at th ecenter frquency of 193MHz for Au deposition thickness of $1500{\AA}$ and $50.7\Omega$ at the center frequency of 192MHz for au deposition thickness of $1600{\AA}$.