• 제목/요약/키워드: Ti / Al

검색결과 2,524건 처리시간 0.031초

Ti-Al-Si-N 박막 제작을 위한 합금 타겟 제조 및 박막의 기계적 특성 (Fabrication of Alloy Target for Formation of Ti-Al-Si-N Composite Thin Film and Their Mechanical Properties)

  • 이한찬
    • 한국전기전자재료학회논문지
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    • 제29권10호
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    • pp.665-670
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    • 2016
  • Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

Osteoblastic behavior to zirconium coating on Ti-6Al-4V alloy

  • Lee, Bo-Ah;Kim, Hae-Jin;Xuan, Yun-Ze;Park, Yeong-Joon;Chung, Hyun-Ju;Kim, Young-Joon
    • The Journal of Advanced Prosthodontics
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    • 제6권6호
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    • pp.512-520
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    • 2014
  • PURPOSE. The purpose of this study was to assess the surface characteristics and the biocompatibility of zirconium (Zr) coating on Ti-6Al-4V alloy surface by radio frequency (RF) magnetron sputtering method. MATERIALS AND METHODS. The zirconium films were developed on Ti-6Al-4V discs using RF magnetron sputtering method. Surface profile, surface composition, surface roughness and surface energy were evaluated. Electrochemical test was performed to evaluate the corrosion behavior. Cell proliferation, alkaline phosphatase (ALP) activity and gene expression of mineralized matrix markers were measured. RESULTS. SEM and EDS analysis showed that zirconium deposition was performed successfully on Ti-6Al-4V alloy substrate. Ti-6Al-4V group and Zr-coating group showed no significant difference in surface roughness (P>.05). Surface energy was significantly higher in Zr-coating group than in Ti-6Al-4V group (P<.05). No difference in cell morphology was observed between Ti-6Al-4V group and Zr-coating group. Cell proliferation was higher in Zr-coating group than Ti-6Al-4V group at 1, 3 and 5 days (P<.05). Zr-coating group showed higher ALP activity level than Ti-6Al-4V group (P<.05). The mRNA expressions of bone sialoprotein (BSP) and osteocalcin (OCN) on Zr-coating group increased approximately 1.2-fold and 2.1-fold respectively, compared to that of Ti-6Al-4V group. CONCLUSION. These results suggest that zirconium coating on Ti-6Al-4V alloy could enhance the early osteoblast responses. This property could make non-toxic metal coatings on Ti-6Al-4V alloy suitable for orthopedic and dental implants.

기계적 분쇄화법으로 제조된 $(Ti_{52}Al_{48})_{100-x}$-xB(x=0,0.5,2,5) 합금분말의 제조 및 미세조직 특성 (Synthesis and Microstructural Characterization of Mechanically Milled $(Ti_{52}Al_{48})_{100-x}$-xB (x=0,0.5,2,5) Alloys)

  • 표성규
    • 한국분말재료학회지
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    • 제5권2호
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    • pp.98-110
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    • 1998
  • $Ti_{52}Al_{48}$ and $(Ti_{52}Al_{48})_{100-x}B_x(x=0.5, 2, 5)$ alloys have been Produced by mechanical milling in an attritor mill using prealloyed powders. Microstructure of binary $Ti_{52}Al_{48}$ powders consists of grains of hexagonal phase whose structure is very close to $Ti_2Al$. $(Ti_{52}Al_{48})_{95}B_5$ powders contains TiB2 in addition to matrix grains of hexagonal phase. The grain sizes in the as-milled powders of both alloys are nanocrystalline. The mechanically alloyed powders were consolidated by vacuum hot pressing (VHP) at 100$0^{\circ}C$ for 2 hours, resulting in a material which is fully dense. Microstructure of consolidated binary alloy consists of $\gamma$-TiAl phase with dispersions of $Ti_2AlN$ and $A1_2O_3$ phases located along the grain boundaries. Binary alloy shows a significant coarsening in grain and dispersoid sizes. On the other hand, microstructure of B containing alloy consists of $\gamma$-TiAl grains with fine dispersions of $TiB_2$ within the grains and shows the minimal coarsening during annealing. The vacuum hot pressed billets were subjected to various heat treatments, and the mechanical properties were measured by compression testing at room temperature. Mechanically alloyed materials show much better combinations of strength and fracture strain compared with the ingot-cast TiAl, indicating the effectiveness of mechanical alloying in improving the mechanical properties.

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알루미늄 용탕에서 Al-TiO2-C의 연소합성반응에 의한 in-situ Al/TiC 복합재료의 제조에 미치는 공정변수의 영향 (Effects of Processing Parameters on the Fabrication of in-situ Al/TiC Composites by Thermally Activated Combustion Reaction Process in an Aluminium Melt using Al-TiO2-C Powder Mixtures)

  • 김화정;이정무;조영희;김종진;김수현;이재철
    • 대한금속재료학회지
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    • 제50권9호
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    • pp.677-684
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    • 2012
  • A feasible way to fabricate in-situ Al/TiC composites was investigated. An elemental mixture of $Al-TiO_2-C$ pellet was directly added into an Al melt at $800-920^{\circ}C$ to form TiC by self-combustion reaction. The addition of CuO initiates the self-combustion reaction to form TiC in $1-2{\mu}m$ at the melt temperature above $850^{\circ}C$. Besides the CuO addition, a diluent element of excess Al plays a significant role in the TiC formation by forming a precursor phase, $Al_3Ti$. Processing parameters such as CuO content, the amount of excess Al and the melt temperature, have affected the combustion reaction and formation of TiC, and their influences on the microstructures of in-situ Al/TiC composites are examined.

6xxx계 알루미늄합금의 압출 금형용 SKD61 강재에 증착된 TiAlN, CrAlN 박막의 마찰.마모에 대한 연구 (A Study on the Friction and Wear Characteristic of TiAlN and CrAlN Coating on the SKD61 Extrusion Mold Steel for 6xxx Aluminum Alloy)

  • 김민석;고진현;김상호
    • 한국표면공학회지
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    • 제43권6호
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    • pp.278-282
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    • 2010
  • In this research, the friction and wear characteristic behaviors of coating materials of TiAlN and CrAlN were investigated. The wear test was conducted in air and un-lubricated state using the reciprocating friction wear tester. Temperature were 50 and $120^{\circ}C$, and load were 3, 7, and 11 kgf for tests. By comparing the coefficient of friction and observing the wear microstructure, the friction and wear characteristic behaviors of TiAlN and CrAlN coating layers on SKD61 were investigated. The coefficient of friction of CrAlN coating was lower than that of TiAlN at all conditions. Therefore, CrAlN was suggested to be more advantageous coating than TiAlN for the extrusion mold of aluminum.

수소 감지 성능 향상을 위한 Pd/TiO2 분말에서의 Al 도핑 효과 (Al Doping Effect of Pd/TiO2 for Improved Hydrogen Detection)

  • 이영안;서형탁
    • 센서학회지
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    • 제23권3호
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    • pp.207-210
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    • 2014
  • $TiO_2$ oxide semiconductor is being widely studied in various applications such as photocatalyst and photosensor. Pd/$TiO_2$ gas sensor is mainly used to detect $H_2$, CO and ethanol. This study focus on increasing hydrogen detection ability of Pd/$TiO_2$ in room temperature through Al-doping. Pd/$TiO_2$ was fabricated by the hydrothermal method. Contacting to Aluminum (Al) foil led to Al doping effect in Pd/$TiO_2$ by thermal diffusion and enhanced hydrogen sensing response. $TiO_2$ nanoparticles were sized at ~30 nm of diameter from scanning electron microscope (SEM) and maintained anatase crystal structure after Al doping from X-ray diffraction analysis. Presence of Al in $TiO_2$ was confirmed by X-ray photoelectron spectroscopy at 73 eV. SEM-energy dispersive spectroscopy measurement also confirmed 2 wt% Al in Pd/$TiO_2$ bulk. The gas sensing test was performed with $O_2$, $N_2$ and $H_2$ gas ambient. Pd/Al-doped $TiO_2$ did not response $O_2$ and $N_2$ gas in vacuum except $H_2$. Finally, the normalized resistance ratio ($R_{H2on}/R_{H2off}$) of Pd/Al-doped $TiO_2$ increases about 80% compared to Pd/$TiO_2$.

반응결합법에 의한 TiC-Ni/Al 복합체의 미세구조 및 기계적 특성 (Microstructure and Mechanical Properties of TiC-Ni/Al Composites by the Reaction-Bonding Method)

  • 한인섭;우상국;김흥수;양준환;정윤중
    • 한국세라믹학회지
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    • 제33권5호
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    • pp.536-546
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    • 1996
  • The TiC-Ni/Al reaction-bonding composites were prepared by the infiltration of Ni/Al melt into the TiC preforms. The microstructure the reaction composition crystalline phase and the mechanical properties of the composites were investigated. During the reaction-bonding Ni/Al mixture had a good wettability and per-meability with TiC preform and pore-free and fully dense sintered bodies were produced. In the case of the Ni/Al atomic ratio of 0.3 and 0.5 TiC raw particle shape was changed to irregular particles because of the decomposition in the liquid matrix and its phenomena was more distinguished in the Al-rich liquid matrix. With increasing more than 1 of the Ni/Al atomic ratio the sample of TiC grain shape was changed from spherical to palatelet particles. Also with increasing the atomic ratio of Ni/Al bending strength and fracture spherical to palatelet particles. Also with increasing the atomic ratio of Ni/Al bending strength and fracture toughness were increased and its maximum value was 1073 MPa and 11 MPa.m1/2 respectively.

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메모리소자를 위한 Ti1-xAlxN 방지막의 산화 거동 (Oxidation Behavior of Ti1-xAlxN Barrier Layer for Memory Devices)

  • 박상식
    • 한국재료학회지
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    • 제12권9호
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    • pp.718-723
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    • 2002
  • $Ti_{1-x}$ $Al_{ x}$N thin films as barrier layer for memory devices application were deposited by reactive magnetron sputtering. The crystallinity, micro-structure, oxidation resistance and oxidation mechanism of films were investigated as a function of Al content. Lattice parameter and grain size of thin films were decreased with increasing the Al content Oxidation of the film with higher Al content is slow and then, total oxide thickness is thinner than that of lower Al content film. Oxide layer formed on the surface is AlTiNO layer. Oxidation of $Ti_{1-x}$ /$Al_{x}$ N barrier layer is diffusion limited process and thickness of oxide layer with oxidation time increased with a parabolic law. The activation energy of oxygen diffusion, Ea and diffusion coefficient, D of $Ti_{0.74}$ /X$0.74_{0.26}$N film is 2.1eV and $10^{-16}$ ~$10^{-15}$ $\textrm{cm}^2$/s, respectively. $_Ti{1-x}$ /$Al_{x}$ XN barrier layer showed good oxidation resistance.

TiAlCrSiN 박막의 고온 산화 부식 (High-temperature Oxidation of the TiAlCrSiN Film)

  • 이동복;김민정
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.107-107
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    • 2016
  • TiCrAlSiN films were developed in order to improve the high-temperature oxidation resistance, corrosion resistance, and mechanical properties of conventional TiN films that are widely used as hard films to protect and increase the lifetime and performance of cutting tools or die molds. In this study, a nano-multilayered TiAlCrSiN film was deposited by cathodic arc plasma deposition. It displayed relatively good oxidation resistance at $700-900^{\circ}C$, owing to the formation protective oxides of $Al_2O_3$, $Cr_2O_3$, and $SiO_2$, and semiprotective $TiO_2$. At $1000^{\circ}C$, the increased temperature led to the formation of the imperfect oxide scale that consisted primarily of the outer ($TiO_2$,$Al_2O_3$)-mixed scale and inner ($TiO_2$, $Al_2O_3$, $Cr_2O_3$)-mixed scale.

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RF Magnetron Sputtering에 의한 금속간화합물 TiAI 모재위의 AI-21Ti-23Cr 고온내산화코팅 (Preparation of AI-21Ti-23Cr High Temperature Protective Coating for TiAo Intermatallic Compounds by RF Magnetron Sputtering)

  • 박상욱;박정용;이호년;오명훈;위당문
    • 한국재료학회지
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    • 제6권7호
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    • pp.742-751
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    • 1996
  • Ti-48AI(at.%) 모재위에 RF magnetron sputtering을 이용하여 AI-21Ti-23Cr(at.%) 조성의 박막을 코팅하였다. RF power 200W, 증착압력 0.8Pa, 증착온도 573k에서 증착된 시편의 가장 우수한 고온재산화성을 나타내었다. 573K에서 증착된 AI-21Ti-23Cr 코팅층은 증착시에는 비정질을 형성하나 산화시험동안 결정화가 진행되며, 표면에는 치밀한 ${Al}_{2}{O}_{3}$층이 형성되었다. 573K에서 코팅된 시편에 대하여 1073K, 1173K 및 1273K에서 100시간동안 등온산화시험을 실시하였다. 무게증량곡선은 모든 온도에서 parabolic law를 따르는 안정된 산화거동을 보였으며 이와같은 산화특성은 표면에 치밀한 ${Al}_{2}{O}_{3}$층이 형성되었기 때문인 것으로 판단된다. 1273K에서 산화시험 후 코팅층의 기지는 고온산화에 따른 AI원자의 소모와 모재로부터의 Ti원자의 확산에 의해 TiAICr상을 형성하였으며, 무게증량은 낮은 온도에 비해 다소 크게 증가하는 경향을 나타내었다.

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