Blister Phenomenon in $TiSi_2$ Thin Flim by Ion Implantation
(이온주입에 의한 $TiSi_2$ 박막에서의 Blister 현상)
-
- Journal of the Korean Vacuum Society
- /
- v.4 no.3
- /
- pp.287-292
- /
- 1995