• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.7
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• pp.109-116
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• 1998

In this work was produced and analyzed a z-cut Ti:LiNbO$_{3}$ optical waveguide which applies for various optical devices.A waveguide channel with a thickness 8 .mu.m and a length 66,000.mu.m and a mach-zehnder interferometer type waveguide were fabricated at a diffusion temperature 1050.deg. C for 6-8hours in a wet $O_{2}$ environment. The resulting Ti:LiNbO$_{3}$ optical waveguide was measured to have a Ti-strip thickness of 950.angs. and low loss. Surfaces and cross-sections of a fabricated waveguide were analysed. The mode pattern anaysis revealed that the waveguide showed a single mode at a 1550nm wavelength. The effective dimension of the waveguide was calculated by measuring a gaussian profile; Wx=10.95.mu. and Wy=9.14.mu.m. a propagation loss, of 0.50dB/cm for a TM mode and 0.45dB/cm for a TE mode, was low enough to be accepatable for optical devices.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.6
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• pp.64-71
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• 2000

An optical switch composed of identical, equally-spaced $Ti:LiNbO_3$ three-waveguides was designed and fabricated. Patterned Ti was diffused into z-cut $LiNbO_3$ substrates. $SiO_2$ buffer layer was evaporated to reduce the propagation loss of TM mode, and Al electrodes of CPW structure were built on the layer for switching of the guided beam. The optical switching phenomenon was confirmed when a beam of ${\lambda}=1.3{\mu}m$ was launched into the center waveguide and an electric field was applied to detune the three waveguides symmetrically.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.5
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• pp.400-406
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• 1998

We investigated the preparation and guided-mode properties of $Ti:LiNbO_3$ waveguides which were fabricated by Ti in-diffusion. The diffusion method to reduce the Li out-diffusion was proposed. The optical guided-mode and propagation loss based on butt-coupling pigtailed with PMF-input were measured. How to improve the polishing grade of waveguide endfaces is newly proposed in this paper. To show the mode propagations, the BPM simulations of channel waveguide are described.

• Journal of the Optical Society of Korea
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• v.8 no.2
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• pp.90-95
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• 2004

The structure of Ti:LiNbO$_3$optical waveguide with a mode size far different from that of single mode optical fiber has been optimized by tapering the waveguide ends. This work was focused on determining the optimized sets of parameters for the fabrication of low-loss Ti indiffused optical waveguides in LiNbO$_3$. Numerical and analytical modeling were applied to simulate the guiding quality and to determine the mode sizes. Based on these modeling results, new waveguide structures with tapered ends have been defined, fabricated and characterized in the respect of the coupling of fiber to Ti-indiffused LiNbO$_3$waveguide.

• Electrical & Electronic Materials
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• v.10 no.7
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• pp.682-691
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• 1997

We have investigated the guided optical properties of a Ti:LiNbO$_3$optical waveguide which was fabricated by Ti-diffusion in an air atmosphere and proposed an effective polishing method of waveguide endfaces. And the results of guided optical mode and fabrication condition were obtained as follows; \circled1 propagation loss : 0.53 dB/cm \circled2 mode size : horizontal/vertical=12.5${\mu}{\textrm}{m}$ \circled3 mode mismatch : 1.7 dB \circled4 diffusion temperature : 105$0^{\circ}C$, time : 8 hours \circled5 atmosphere : air

• Korean Journal of Optics and Photonics
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• v.2 no.3
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• pp.149-152
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• 1991

We report a new method of fabricating a Ti:LiNb03 waveguide with no out-diffusion by coating the waveguide with $SiO_2$ thin film. It was coated before diffusion process, and the $LiO_2$ out-diffusion was prevented in the diffusion process. We compare the near field patterns of the guided modes between the typical waveguide and the waveguide fabricated by new method proposed here.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.1 no.1
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• pp.1-4
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• 1991

The applicability of $LiNbO_{3}$ as a substrate for fabrication of Ti-indiffused waveguide electro-optic devices is limited. Ti diffuses comparatively in congruently melting $LiNbO_{3}$; the Curie temperature of this material is too low to permit diffusion temperatures much above $1100^{\circ}C$ without the necessity of re-poling the crystal. Both of hese difficulties could be eliminated by incorporating certain dopants in $LiNbO_{3}$. Crystals of $LiNbO_{3}$ doped with Ti and Mg were grown and evaluated. The electroptic coefficients and birefringence of $LiNbO_{3}$ doped crystals were measured at ${\lambda}=.6328$ and $1.32\;$\mu{m}$. Curie temperatures were measured. The Curie temperature of both undoped and Ti-doped $LiNbO_{3}$ was $1130^{\circ}C$; that for Mg-doped $LiNbO_{3}$ was $30^{\circ}$ higher. From these data, a composition for the crystals was estimated. Thermogravimetric data confirmed this estimate and showed that the composition of Mg : $LiNbO_{3}$ was $49.3{\pm}0.2mole%\;Li_{2}O$ ; the composition of the undoped and Ti : $LiNbO_{3}$ samples was $48.6{\pm}0.2mole%$. Diffusion of Ti into both Mg-doped and Ti-doped $LiNbO_{3}$ crystals was studied as a function of $Li/NbO_{3}$ ratio and temperature.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.10
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• pp.1584-1590
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• 1989

In this study, a planar waveguide has been fabricated on a Y-cut LiNbO3 substrate by the Ti indiffusion technique and its guiding characteristics are measured by bright M-line spectroscopy. Using the photolithography method, an electro-optic grating modulator with interdigital electrodes has been fabricated by depositing Al on the Ti:LiNbO3 planar waveguide. And the beam intensity diffracted by the grating is measured as the applied voltage is increased.

• Korean Journal of Optics and Photonics
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• v.17 no.5
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• pp.430-436
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• 2006

Polarization-independent $Ti:LiNbO_3\;2{\times}2$ optical add/drop multiplexer for the 1550nm wavelength region is fabricated. The device consists of two input waveguides, two polarization beam splitters. two polarization conversion/electrooptic tuning waveguide sections, and two output waveguides. The single mode channel waveguides for both TE and TM polarizations are fabricated on a x-cut $Ti:LiNbO_3$substrate by Ti diffusion. Spectral section is based on phase-matched polarization conversion due to shear strain induced by a thick $SiO_2$ grating overlay film. An applied voltage tunes the device by changing the waveguide birefringence, hence the optical wavelength at which most efficient polarization conversion occurs. Tuning rate of 0.094nm/V with a maximum range of 17nm has been obtained. The nearest side-lobe is about 8.2dB. The FWHM is 3.72nm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.8
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• pp.731-735
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• 2003

Ti-indiffused LiNbO$_3$waveguide have been used to various high speed optical device based on electro-optic effect such as modulators, switches, and sensor, etc. In order to high speed modulation of optical modulator have, one of the further devices, needed to increasing of electrode surrounding air by LiNbO$_3$dry etching because of impedance matching for optical and RF phase velocity between waveguide and electrode. We studied property of LiNbO$_3$dry etching after waveguide patterning lot optical modulation by using neutral loop discharge (NLD) plasma.