Dry Etching of patternedLiNbO3Waveguides for the High-speed Optical Modulator fabrication
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양우석
(전자부품연구원 광부품연구센터)
김우경 (전자부품연구원 광부품연구센터) 이승태 (단국대학교 전자공학과) 박우정 (성균관대학교 신소재공학과) 장현수 (성균관대학교 정보통신공학부) 윤대호 (성균관대학교 신소재공학과) 이한영 (전자부품연구원 광부품연구센터) |
1 |
Reactive ion beam etching of lithium tantalate and its application for pyroelectric infrared detectors
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2 |
Growth of crystalline LiF on CF₄plasma etched LiNbO₃substrates
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DOI ScienceOn |
3 |
Wet etching of proton-exchanged lit hum niobate-A novel proceeding technique
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4 |
Highly efficient 40-GHz band width Ti:LiNbO₃optical modulator employing ridge structure
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5 |
Surface precipitates on single crystal LiNbO₃after dry-etching by CHF₃plasma
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DOI ScienceOn |
6 |
Lithum niobate ridge waveguides by nikel diffusion and proton-exchanged wet etching
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