• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.670-673
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• 2003

Fabrication of three dimensional microstructures by laser-assisted chemical vapor deposition of material is investigated. To fabricate microstructures, a thin layer of deposit in desired patterns is first written using laser direct writing technique and on top of this layer a second layer is deposited to provide the third dimension normal to the surface. By depositing many layers. a three dimensional microstructure is fabricated. Optimum deposition conditions for direct writing of initial and subsequent layers with good surface quality and profile uniformity are determined. Using an arson ion laser and ethylene as the light source and reaction gas, respectively, fabrication of three-dimensional carbon microstructures is demonstrated.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.172-172
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• 2016

Dual-beam experiments (Focused ion beam - Orientation mapping microstructure, FIB-OIM) is a widely used experimental tool because this experiments tool available alternates between automated serial sectioning and EBSD with the help of dual beams. We investigated the reconstruction procedure for analysis tool which three-dimensional internal microstructure using Ni superalloy(IN100) and ZrO2. As a results, we observed annealing twin boundary each layer in Ni superalloy(IN100) and fairly isotropic internal microstructure in ZrO2 using marching cubes algorithm. According to these results, this procedure is reconstructed well and we gained ability to arrange the EBSD map and internal microstructure.

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.425-427
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• 1996

New fabrication technique was developed to make three dimensional silicon microstructure with five fold vertical steps through entire wafer thickness. Each step is pre-defined on multiply stacked thermal oxide and silicon nitride (O/N) layers by photolithographies. Multi-stepped silicon microstructure is formed by anisotropic etch in aqueous KOH solution with the patterned nitride film as masking layer. Fabricated microstructure consists of four $16{\mu}m$ thick flexural spring beams, $290{\mu}m$ thick proof mass, mesas for overrange stop with $10{\mu}m$ height from the surface of the proof mass, and the other mesas and V grooves used for assembling this structure to the packaging frame of pendulous servo accelerometer. Using the numerical finite element method (FEM) simulator: ABAQUS, mechanical characteristics of the fabricated microstructure by the developed technique was compared with those of the same structure processed by one step silicon bulk etch followed by oxidation and patterning the etched region.

• 한국전산유체공학회:학술대회논문집
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• 2009.04a
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• pp.355-362
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• 2009

Most material of engineering interest undergoes solidification process from liquid to solid state. Identifying the underlying mechanism during solidification process is essential to determine the microstructure of material which governs the physical properties of final product. In this paper, we expand our previous two-dimensional numerical technique to three-dimensional simulation for computing dendritic solidification process with fluid convection. We used Level Contour Reconstruction Method to track the moving liquid-solid interface and Sharp Interface Technique to correctly implement phase changing boundary condition. Three-dimensional results showed clear difference compared to two-dimensional simulation on tip growth rate and velocity.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.1262-1265
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• 2004

To increase the performance of the light diffusion films, we controlled the three dimensional microstructure of the organic fillers(beads). The refractive index, the size distribution and the three dimensional distribution of beads play an important role to determine the performance of light diffusion films for the backlight unit of TFT-LCD.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.213-216
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• 2009

In this study, three cold-rolled TRIP steels containing different Al content (0.04wt%, 1.0 wt.% and 2.00wt%) were fabricated to understand the complex effects of Al in TRIP steel. The influences of Al on microstructural evolution of cold-rolled TRIP steels have been analyzed by using advanced analysis techniques, such as transmission electron microscope (TEM) and three dimensional atom probe tomography (3D-APT). TEM results revealed that second phases such as bainte and retained austenite decrease with increase of Al content. In addition, 3D-APT was used to characterize atomic-scale distribution of alloying elements at the constituent phases. Through these analysis techniques, the advanced characteristics of constituent microstructure in TRIP steels were identified depending on Al contents in TRIP steels.

• The Korean Journal of Ceramics
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• v.5 no.1
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• pp.30-34
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• 1999

Particle settling behavior was studied by the computer simulation using simultaneous particle condensation and relaxation. This three-dimensional settling algorithm includes the estimation of powder sediment density. Density distribution through the powder sediment was compared and was agreed well with the experimental findings. Settling density depended strongly of the degree of particle relaxation. Sediment strength and isotropy also depended on the degree of particle relaxation. Sever particle bridging was found near sharp corners.

• Journal of Powder Materials
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• v.19 no.1
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• pp.67-71
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• 2012

The present paper gives an overview about the Atom Probe Tomography technique and its application to powder materials. The preparation of needle-shaped Atom Probe specimens from a single powder particle using focused-ion-beam milling is described. Selected experimental data on mechanically alloyed (and sintered) powder materials are presented, giving insight into the atomic-scale elemental redistribution occurring under powder metallurgical processing.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.4
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• pp.303-309
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• 2008

Dense and fine polymer patterns often collapse, as they come into contact with each other at their protruding tips. Resist pattern collapse depends on the aspect ratio of patterns and the surface tension of rinsing materials. The pattern collapse is a very serious problem in microfabrication, because it is one of the factors which limit the device dimensions. The reasons for the pattern collapse are known as the surface tension of rinse liquid, centrifugal force and rinse liquid flow produced in the developing process. In this work, we tried to evaluate the pattern collapse of three-dimensional microstructures that were fabricated by two-photon induced photopolymerization, and showed the way how to reduce the deformation of microstructures.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.10a
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• pp.273-276
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• 2008

In this study, microstructure and distribution of alloy elements were investigated in thermo-mechanically processed C-Mn-Si transformation induced plasticity (TRIP) steels. The microstructures of TRIP steels were investigated by using advanced analysis techniques, such as three dimensional atom probe tomography (3D-APT). At first, the microstructure was observed by using TEM. TEM results revealed that microstructure of C-Mn-Si TRIP steel was composed of ferrite, bainte, and retained austenite. 3D-APT was used to characterize atomic-scale partitioning of added elements at the phase interface. In the retained austenite phase, Ti and B were enriched with C. However, there was no fluctuation of Mn and Si concentration across the interface. Through these analysis techniques, the advanced characteristics of constituent microstructure in C-Mn-Si TRIP steels were identified.