• 제목/요약/키워드: Thin-film technology

검색결과 2,959건 처리시간 0.032초

Hydrogen Passivation for the Enhancement of Poly-Si Performance Crystallized By Double-Frequency YAG Laser

  • Li, Juan;Chong, Luo;Ying, Yao;He, Li;Meng, Zhiguo;Chunya, Wu;Xiong, Shaozhen;Kwok, Hoi-Sing
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1608-1611
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    • 2009
  • Here the hydrogen passivation treatment has been adopted to enhance the performance of poly-Si crystallized by YAG laser annealing (LA poly-Si). We have investigated the effects of passivation time, passivation power and passivation temperature on the hall mobility of the LA poly-Si and analyzed the mechanism of the hydrogen passivation preliminary. It has been found that the quality of the poly-Si annealed by YAG laser could be improved after proper hydrogen plasma treatment.

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투명 박막 리튬이차전지를 위한 LiNiPO4 박막의 광학 및 전기화학적 특성 (Optical and Electrochemical Properties of LiNiPO4 Thin Film for Transparent Thin Film Lithium Secondary Battery)

  • 이현석;;김광범;최지원
    • 센서학회지
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    • 제27권1호
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    • pp.36-39
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    • 2018
  • Transparent olivine $LiNiPO_4$ thin films on sapphire substrates were fabricated by radio frequency (RF) magnetron sputtering. The X-ray diffraction patterns show these thin films have the phase of $LiNiPO_4$ with an ordered olivine structure indexed to the orthorhombic Pmna space group. $LiNiPO_4$ thin films deposited on sapphire substrates exhibit transmittance of about 83 %. It was confirmed that the $LiNiPO_4$ thin film exhibits a high potential of 5 V-class.

Screen printing에 위한 Pb계 압전세라믹스 후막의 제조 (Pb-based piezoelectric thick films prepared by a screen printing)

  • 백동수;신효순;심성훈;박용욱;강종윤;신현용;윤석진
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1541-1543
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    • 1999
  • Screen printing에 의해 압전 후막을 제조하기 위하여 약 $0.6{\mu}m$의 평균 입자 크기를 갖는 PMN-PZT와 PAN-PZT 분말을 산화물 혼합법에 의해 제조하였다. 치밀한 후막의 제조를 위한 분말과 유기물의 비율은 분산이 가능한 범위에서 80:20 (분말:유기물)의 중량비를 나타내었다 사용된 기판과 하부전극은 각각 $SiO_2$/Si와 AgPd 였으며, 후막 제조시 박리 및 균열현상은 발생되지 않았다. 프린트된 후막은 건조온도와 무관한 미세구조를 나타내었으며, 보다 치밀한 구조를 갖는 후막의 제조를 이해 입자의 분산 및 열처리 조건 그리고 기판과의 매칭에 대해 연구가 계속되어야 할 것으로 생각된다.

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Rheology of Slurries and Effects of Polymer Volume Ratio in Aqueous PZT Tape Casting

  • Yoon, Seok-Jin;Shin, Hyo-Soon;Lee, Dong-Kyun;Kang, Chong-Yun;Park, Ji-Won;Kim, Hyun-Jai
    • The Korean Journal of Ceramics
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    • 제7권1호
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    • pp.16-19
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    • 2001
  • For the fast dry of the aqueous tape, the process which water was reaplaced by organic solvent was proposed. Socalled, it was the solvent washing dry. Three organic solvents (methanol, ethanol and acetone) were selected for the washing solvent. The weight loss of the washed tapes was measured to evaluate the dry rate of the tapes and dried tapes were examined the generation of the cracks with the variations of the organic solvent and the washing time. Methanol, ethanol and acetone were available organic solvents for this method. The tapes washed in methanol, ethanol and acetone were dried rapidly for twenty minutes. After thirty minutes, the weight losses were not found any more, The solvent of the lower surface tension can decreases the crack of dried tape. If solvent substitutes water completely, though it was fast dried, crack can be eliminated.

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Engineered Stretchability of Conformal Parylene Thin-film On-skin Electronics

  • Jungho Lee;Gaeun Yun;Juhyeong Jeon;Phuong Thao Le;Seung Whan Kim;Geunbae Lim
    • 센서학회지
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    • 제32권6호
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    • pp.335-339
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    • 2023
  • Skin-compatible electronics have evolved to achieve both conformality and stretchability for stable contact with deformable biological skin. While existing research has largely concentrated on alternative materials, the potential of Parylene-based thin-film electrodes for stretchable on-skin applications remains relatively untapped. This study proposes an engineering strategy to achieve stretchability using the Parylene thin-film electrode. Unlike the conventional Parylene thin-film electrode, we introduce morphological adaptability via controlled microscale slits in the Parylene electrode structure. The slits-containing device enables unprecedented stretchability while maintaining critical electrical insulation properties during mechanical deformation. Finally, the demonstration on human skin shows the mechanical adaptability of these Parylene-based bioelectrodes while their electrical characteristics remain stable during various stretching conditions. Owing to the ultra-thinness of the Parylene coating, the wearable bioelectrode not only achieves stretchability but also conforms to the skin. Our findings broaden the practical use of Parylene thin-film bioelectrodes.

용액공정을 이용한 열처리된 산화아연 박막의 투명한 박막 트랜지스터 구현을 위한 전사방법 개발 (Development of Transfer Method for Transparent Thin Film Transistor of Heat-treated Zinc Oxide Thin Film by Solution Process)

  • 권순열;정동건;최영찬;이재용;공성호
    • 반도체디스플레이기술학회지
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    • 제17권2호
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    • pp.57-60
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    • 2018
  • Recently, Thin-film transistors (TFTs) are fundamental building blocks for state-of-the-art microelectronics, such as flat-panel displays and system-on-glass. Zinc oxide thin films have the advantage that they can grow at low temperature and can obtain high charge movility. Also the zinc oxide thin film can be used to control the resistance according to the oxygen content, so it is very easy to obtain the desired physical properties. In this paper, we fabricated a zinc oxide thin film on a polished copper substrate through a solution process, then improved the crystallinity through a geat treatment porcess, and studied to transfer it on a flexible substrate after the heat treatment was completed.

Eutectic Temperature Effect on Au Thin Film for the Formation of Si Nanostructures by Hot Wire Chemical Vapor Deposition

  • Ji, Hyung Yong;Parida, Bhaskar;Park, Seungil;Kim, MyeongJun;Peck, Jong Hyeon;Kim, Keunjoo
    • Current Photovoltaic Research
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    • 제1권1호
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    • pp.63-68
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    • 2013
  • We investigated the effects of Au eutectic reaction on Si thin film growth by hot wire chemical vapor deposition. Small SiC and Si nano-particles fabricated through a wet etching process were coated and biased at 50 V on micro-textured Si p-n junction solar cells. Au thin film of 10 nm and a Si thin film of 100 nm were then deposited by an electron beam evaporator and hot wire chemical vapor deposition, respectively. The Si and SiC nano-particles and the Au thin film were structurally embedded in Si thin films. However, the Au thin film grew and eventually protruded from the Si thin film in the form of Au silicide nano-balls. This is attributed to the low eutectic bonding temperature ($363^{\circ}C$) of Au with Si, and the process was performed with a substrate that was pre-heated at a temperature of $450^{\circ}C$ during HWCVD. The nano-balls and structures showed various formations depending on the deposited metals and Si surface. Furthermore, the samples of Au nano-balls showed low reflectance due to surface plasmon and quantum confinement effects in a spectra range of short wavelength spectra range.

The Effect of H content in Si Precursor on the Performance of Poly-Si Crystallized by Pulsed YAG2${\omega}$ Laser on Soft Substrate

  • Li, Juan;Ying, Yao;Meng, Zhiguo;Chunya, Wu;Xiong, Shaozhen;Kwok, Hoi-Sing
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1604-1607
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    • 2009
  • YAG laser crystallization of Si-based thin film deposited on plastic substrate has been studied. The Si-based thin films as crystallization precursor are with varied hydrogen (H) content. The effect of the H content on the crystallinity of the resulted poly-Si film has been investigated. The experimental results of the poly-Si crystallized by doublefrequency YAG laser shows that the initial dehydrogenation process could be left out if ${\mu}c$-Si was adopted as the crystallization precursor. The YAG laser annealing condition on plastic substrate and the crystallization results have been discussed in the paper.

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Synthesis of Cobalt Oxide Film by Thermal Decomposition for Potential Various Applications

  • Han, Seong Ho;Park, Bo Keun;Son, Seong Uk;Kim, Chang Gyoun;Chung, Taek-Mo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.365.1-365.1
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    • 2014
  • Cobalt oxide has excellent various properties such as high catalytic activity, antiferromagnetism, and electrochromism. So cobalt oxides offer a great potential for their applications in the various areas such as optical gas sensor, catalysts for oxidation reaction, electrochromic devices, high temperature solar selective absorbers, magnetic materials, pigment for glasses and ceramics, and negative electrodes for lithium-ion batteries. We have synthesized novel cobalt complexes by simple reaction of cobalt bistrimethylsilylamide as a starting material with a lot of conventional ligands as potential cobalt oxide precursors. The studies include the facile preparation, structural characterization, and spectroscopic analysis of the new precursors. We are making efforts to grow cobalt oxide thin films using cobalt complexes newly synthesized in this study using deposition techniques.

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기계적 롤링을 통한 수직배향 나노구조의 다용도 박막 프레임워크 변환 (Structural Formulation of As-grown Vertically Aligned Nanostructures to Multifunctional Thin-Film Frameworks through Controlled Mechanical Rolling)

  • 박태준;최석민;윤도경;이승조;박재규;이재혁;김정대;이한길;옥종걸
    • 한국생산제조학회지
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    • 제25권4호
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    • pp.266-270
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    • 2016
  • We present a useful and practical manufacturing technique that enables the structural conversion of delicate as-grown nanostructures to more beneficial and robust thin-film frameworks through controlled mechanical rolling. Functional nanostructures such as carbon nanotubes grown through chemical vapor deposition in a vertically aligned and very loosely packed manner, and thus difficult to manipulate for subsequent uses, can be prepared in an array of thin blades by patterning the growth catalyst layer. They can then be toppled as dominos through precisely controlled mechanical rolling. The nanostructures formulated to horizontally aligned thin films are much more favorable for device applications typically based on thin-film configuration. The proposed technique may broaden the functionality and applicability of as-grown nanostructures by converting them into thin-film frameworks that are easier to handle and more durable and favorable for fabricating thin-film devices for electronics, sensors, and other applications.