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Development of Transfer Method for Transparent Thin Film Transistor of Heat-treated Zinc Oxide Thin Film by Solution Process  

Kwon, Soon Yeol (yungpook National University, School of Electronics Engineering)
Jung, Dong Geon (yungpook National University, School of Electronics Engineering)
Choi, Young Chan (yungpook National University, School of Electronics Engineering)
Lee, Jae Yong (yungpook National University, School of Electronics Engineering)
Kong, Seong Ho (yungpook National University, School of Electronics Engineering)
Publication Information
Journal of the Semiconductor & Display Technology / v.17, no.2, 2018 , pp. 57-60 More about this Journal
Abstract
Recently, Thin-film transistors (TFTs) are fundamental building blocks for state-of-the-art microelectronics, such as flat-panel displays and system-on-glass. Zinc oxide thin films have the advantage that they can grow at low temperature and can obtain high charge movility. Also the zinc oxide thin film can be used to control the resistance according to the oxygen content, so it is very easy to obtain the desired physical properties. In this paper, we fabricated a zinc oxide thin film on a polished copper substrate through a solution process, then improved the crystallinity through a geat treatment porcess, and studied to transfer it on a flexible substrate after the heat treatment was completed.
Keywords
ZnO Thin Film Transistors; Flexible Thin Film; Transparent Thin Film Transistor; ZnO Heat Treatment;
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Times Cited By KSCI : 1  (Citation Analysis)
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