• 제목/요약/키워드: Thin-film technology

검색결과 2,966건 처리시간 0.33초

P3HT(poly-3-hexylthiophene)를 이용한 고분자 유기 TFT 제작을 위한 Ink-jet printing 기술 응용 (Application of Ink-jet Printing Technology for Fabrication of Polymer Organic TFT using P3HT(poly-3-hexylthiophene))

  • 김준영;송대호;이용균;박태진;권순갑;강문효;이선희;한승훈;조상미;김준희;장진
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집 디스플레이 광소자 분야
    • /
    • pp.84-87
    • /
    • 2005
  • 본 논문에서는 p-type 고분자 물질인 P3HT (Poly-3-hexylthiophene)를 잉크젯 프린팅 방식으로 활성화층을 적층함으로써 Organic thin film transistor를 제작하여 이에 대한 특성을 연구하였다. Piezoelectric 방식의 잉크젯 프린팅을 이용하여 P3HT single drop jetting 시 두께 $150{\sim}200{\AA}$, 직경 약 70 ~ 80 um정도의 drop profile을 얻을 수 있었다. P3HT의 solvent로서 Chlorobenzene을 사용하여 농도 약 0.5 wt.%의 Ink-jet용 ink를 제작하여 이를 Channel Width 37, 236 um 크기의 Au 전극 위에 jetting 하여 각각의 특성을 측정하였다. 상기 실험은 상온의 외부환경에서 실시되었으며 실험 결과 최대 ${\mu}=1{\times}10^{-2}\;cm^2/Vsec$, $I_{on}/I_{off}=10^3{\sim}10^4$ 정도로서 off current가 높은 편이나 이동도 측면에서는 다른 방법의 박막 증착 실험결과와 비교할 때 동등 수준의 결과를 얻을 수 있었다.

  • PDF

흡광 액체의 펄스 레이저 가열에 의해 생성된 기포 거동의 실험적 해석 (Experimental Analysis of Bubble Dynamics Induced by Pulsed-Laser Heating of Absorbing Liquid)

  • 장덕석;홍종간;좌성훈;김동식
    • 대한기계학회논문집B
    • /
    • 제30권5호
    • /
    • pp.413-421
    • /
    • 2006
  • The bubble dynamics induced by direct laser heating is experimentally analyzed as a first step to assess the technical feasibility of laser-based ink-jet technology. To understand the interaction between laser light and ink, the absorption spectrum is measured for various ink colors and concentrations. The hydrodynamics of laser-generated bubbles is examined by the laser-flash photography. When an Ar ion laser pulse (wavelength 488 nm) with an output power up to 600 mW is incident on the ink solution through a transparent window, a hemispherical bubble with a diameter up to ${\sim}100{\mu}m$ can be formed with a lifetime in a few tens of microsecond depending on the laser power and the focal-spot size. Parametric study has been performed to reveal the effect of laser pulse width, output power, ink concentration, and color on the bubble dynamics. The results show that the bubble generated by a laser pulse is largely similar to that produced by a thin-film heater. Consequently, the present work demonstrates the feasibility of developing a laser-actuated droplet generation mechanism for applications in ink-jet print heads. Furthermore, the results of this work indicate that the droplet generation frequency is likely to be further increased by optimizing the process parameters.

전해액 조성에 의한 구리 박막의 표면형상과 물성변화 (Effect of Electrolyte Compositions on the Physical Property and Surface Morphology of Copper Foil)

  • 우태규;박일송;전우용;박은광;정광희;이현우;이만형;설경원
    • 대한금속재료학회지
    • /
    • 제48권10호
    • /
    • pp.951-956
    • /
    • 2010
  • This study examined the effect of copper and sulfuric acid concentrations on the surface morphology and physical properties of copper plated on a polyimide (PI) film. Electrochemical experiments with SEM and a four-point probe were performed to characterize the morphology and mechanical characteristics of copper electrodeposited in the composition of an electrolyte. The resistivity and peel strength were controlled using a range of electrolyte compositions. A lower resistivity and high flexibility were obtained when an electrolyte with 20 g/l of copper was used. However, a uniform surface was obtained when a high current density that exceeded $20mA/cm^2$ was applied, which was maintained at copper concentrations exceeding 40 g/l. Increasing sulfuric acid to >150 g/l decreased the peel strength and flexibility. The lowest resistivity and fine adhesion were detected at a $Cu^{2+}:H_2SO_4$ ratio of 50:100 g/l.

폴리이미드와 Cu/Ni층과의 계면결합력에 미치는 플라즈마 처리 시간 효과 (Effect of Plasma Treatment Times on the Adhesion of Cu/Ni Thin Film to Polyimide)

  • 우태규;박일송;정광희;전우용;설경원
    • 대한금속재료학회지
    • /
    • 제49권8호
    • /
    • pp.657-663
    • /
    • 2011
  • This study represents the results of the peel strength and surface morphology according to the preprocessing times of polyimide (PI) in a Cu/Ni/PI structure flexible copper clad laminate production process based on the polyimide. Field emission scanning electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy were used to analyze the surface morphology, crystal structure, and interface binding structure of sputtered Ni, Cu, and electrodeposited copper foil layers. The surface roughness of Ni, Cu deposition layers and the crystal structure of electrodeposited Cu layers were varied according to the preprocessing times. In the RF plasma times that were varied by 100-600 seconds in a preprocessing process, the preprocessing applied by about 300-400 seconds showed a homogeneous surface morphology in the metal layers and that also represented high peel strength for the polyimide. Considering the effect of peel strength on plastic deformation, preprocessing times can reasonably be at about 400 seconds.

마이크로 펌프용 디퓨져/노즐의 유동 특성에 관한 CFD 해석 (CFD Analysis on the Flow Characteristics of Diffuser/Nozzles for Micro-pumps)

  • 김동환;한동석;정시영;허남건;윤석진
    • 설비공학논문집
    • /
    • 제17권6호
    • /
    • pp.544-551
    • /
    • 2005
  • The flow characteristics have been numerically investigated for various shapes of the diffuser/nozzles which are used for a valveless micro-pump. The important parameters considered in this study are the throat width ($15\~120\mu$m), the taper angle ($3.15\~25.2^{\circ}$), and the diffuser length ( $600\~4,800\mu$m), and the size of the middle chamber ($1\~16mm^2$). To find the optimal values for these parameters, steady state calculations have been performed assuming the constant pressure difference between the inlet and exit of the flow For the taper angle and the throat width, it is found that there exists an optimum at which the net flow rate is the greatest. The optimal taper angle is in the range of $10\~20^{\circ}$ for all the pressure differences; and the throat width indicates an optimal value near $75\mu$m for the case of 35 kPa pressure difference. The net flow rate is also influenced by the size of the middle chamber. With decreasing chamber size, the net flow rate is reduced because of the interference between two streams flowing into the middle chamber. The unsteady pulsating flow characteristics for a micro-pump with a given diffuser/nozzle shape have been also investigated to show the validity of the steady state parametric study.

The Effect of Plasma Gas Composition on the Nanostructures and Optical Properties of TiO2 Films Prepared by Helicon-PECVD

  • Li, D.;Dai, S.;Goullet, A.;Granier, A.
    • Nano
    • /
    • 제13권10호
    • /
    • pp.1850124.1-1850124.12
    • /
    • 2018
  • $TiO_2$ films were deposited from oxygen/titanium tetraisopropoxide (TTIP) plasmas at low temperature by Helicon-PECVD at floating potential ($V_f$) or substrate self-bias of -50 V. The influence of titanium precursor partial pressure on the morphology, nanostructure and optical properties was investigated. Low titanium partial pressure ([TTIP] < 0.013 Pa) was applied by controlling the TTIP flow rate which is introduced by its own vapor pressure, whereas higher titanium partial pressure was formed through increasing the flow rate by using a carrier gas (CG). Then the precursor partial pressures [TTIP+CG] = 0:027 Pa and 0.093 Pa were obtained. At $V_f$, all the films exhibit a columnar structure, but the degree of inhomogeneity is decreased with the precursor partial pressure. Phase transformation from anatase ([TTIP] < 0.013 Pa) to amorphous ([TTIP+CG] = 0:093 Pa) has been evidenced since the $O^+_2$ ion to neutral flux ratio in the plasma was decreased and more carbon contained in the film. However, in the case of -50 V, the related growth rate for different precursor partial pressures is slightly (~15%) decreased. The columnar morphology at [TTIP] < 0.013 Pa has been changed into a granular structure, but still homogeneous columns are observed for [TTIP+CG] = 0:027 Pa and 0.093 Pa. Rutile phase has been generated at [TTIP] < 0:013 Pa. Ellipsometry measurements were performed on the films deposited at -50 V; results show that the precursor addition from low to high levels leads to a decrease in refractive index.

금속 기판위에 Cr과 Al 증착 및 열처리 융합 기술에 의한 표면 형상 변화 (Characteristics by deposition and heat treatment of Cr and Al thin film on stainless steel)

  • 김경보;이종필;김무진
    • 융합정보논문지
    • /
    • 제11권3호
    • /
    • pp.167-173
    • /
    • 2021
  • 최근 폴리이미드가 기판으로 사용되어 유기발광다이오드 디스플레이가 구현된 폴더블 스마트폰이 출시되고 있다. 이와 같이 굽힘이 가능한 기판위에 다양한 전자소자를 제작하기 위한 관심이 증가하고 있기 때문에 본 논문에서는 굽힘성이 우수한 127㎛ 두께의 얇은 스테인리스 금속 기판을 이용하여 먼저 크롬을 코팅하고 알루미늄을 형성한 샘플과 알루미늄 구현 후 크롬을 증착한 2가지 샘플을 급속 열처리 장비를 이용하여 150도, 350도, 550도의 온도에서 각각 20분간 어닐링을 진행하여 표면의 형상을 관찰하였다. 고분해능 SEM과 nm까지 거칠기를 측정할 수 있는 AFM을 이용하여 표면에 대한 데이터를 추출하였다. 350도까지는 열처리하지 않은 샘플과 차이가 없지만, 550도에서는 결정립의 변화를 확인할 수 있다. 향후 본 실험 결과는 플렉서블 광전자분야로의 적용을 위해 전기전도도, 반사도와 같은 특성 분석 및 광소자 제작을 통해 금속 소재의 플렉서블 전자소자로의 적용 가능성을 모색할 것이다.

Influence of Fluorine Doping on Hardness and Compressive Stress of the Diamond-Like Carbon Thin Film

  • Sayed Mohammad Adel Aghili;Raheleh Memarzadeh;Reza Bazargan Lari;Akbar Eshaghi
    • 한국재료학회지
    • /
    • 제33권4호
    • /
    • pp.124-129
    • /
    • 2023
  • This study assessed the influences of fluorine introduced into DLC films on the structural and mechanical properties of the sample. In addition, the effects of the fluorine incorporation on the compressive stress in DLC films were investigated. For this purpose, fluorinated diamond-like carbon (F-DLC) films were deposited on cobalt-chromium-molybdenum substrates using radio-frequency plasma-enhanced chemical vapor. The coatings were examined by Raman scattering (RS), Attenuated total reflectance Fourier transform infrared spectroscopic analysis (ATR-FTIR), and a combination of elastic recoil detection analysis and Rutherford backscattering (ERDA-RBS). Nano-indentation tests were performed to measure hardness. Also, the residual stress of the films was calculated by the Stony equation. The ATR-FTIR analysis revealed that F was present in the amorphous matrix mainly as C-F and C-F2 groups. Based on Raman spectroscopy results, it was determined that F made the DLC films more graphitic. Additionally, it was shown that adding F into the DLC coating resulted in weaker mechanical properties and the F-DLC coating exhibited lower stress than DLC films. These effects were attributed to the replacement of strong C = C by feebler C-F bonds in the F-DLC films. F-doping decreased the hardness of the DLC from 11.5 to 8.8 GPa. In addition, with F addition, the compressive stress of the DLC sample decreased from 1 to 0.7 GPa.

a-IGZO TFT 기반 OLED 디스플레이 화소에 내장되는 OLED 열화 보상용 온도 센서의 개발 (Development of a Temperature Sensor for OLED Degradation Compensation Embedded in a-IGZO TFT-based OLED Display Pixel)

  • 문승재;김승균;최세용;이장후;이종모;배병성
    • 센서학회지
    • /
    • 제33권1호
    • /
    • pp.56-61
    • /
    • 2024
  • The quality of the display can be managed by effectively managing the temperature generated by the panel during use. Conventional display panels rely on an external reference resistor for temperature monitoring. However, this approach is easily affected by external factors such as temperature variations from the driving circuit and chips. These variations reduce reliability, causing complicated mounting owing to the external chip, and cannot monitor the individual pixel temperatures. However, this issue can be simply and efficiently addressed by integrating temperature sensors during the display panel manufacturing process. In this study, we fabricated and analyzed a temperature sensor integrated into an a-IGZO (amorphous indium-gallium-zinc-oxide) TFT array that was to precisely monitor temperature and prevent the deterioration of OLED display pixels. The temperature sensor was positioned on top of the oxide TFT. Simultaneously, it worked as a light shield layer, contributing to the reliability of the oxide. The characteristics of the array with integrated temperature sensors were measured and analyzed while adjusting the temperature in real-time. By integrating a temperature sensor into the TFT array, monitoring the temperature of the display became easier and more accurate. This study could contribute to managing the lifetime of the display.

결정화 소결에 의한 생체활성재료의 제조 (Preparation of bioactive materials by crystallization sintering)

  • 명중재;이안배;정용선;신건철;김호건
    • 한국결정성장학회지
    • /
    • 제8권1호
    • /
    • pp.169-178
    • /
    • 1998
  • CaO-$SiO_2-P_2O_5$ 3성분계 유리화 영역(glass forning region)내의 여러조성(A:$SiO_2$- rich조성, B:CaO-rich조성, C:$P_2O_5$-rich조성, D, E:A, B, C의 중간조성)을 가지는 유리분말을 결정화시켰을 때 유리중에 석출되는 결정상(crystal phase)을 분말 XRD로 확인하였다. 여러조성중 apatite(($Ca_{10}(PO_4)_6O$)와 $\beta$-wollastonite($CaSiO_3$)결정이 석출되고, 굽힘강도가 우수한 E조성(CaO 49.4, $SiO_2\;36.8,\;P_2O_5$8.8wt%)을 선택하여 이 조성의 유리분말을 일방향으로 결정화 소결하였다. 제조된 결정화 소결체에 대하여 charaterization을 하고 굽힘강도를 측정하였다. 또한 결정화 소결체와 생체뼈와의 결합성을 조사하기 위하여 유사체액(simulated body fluid)내에서 침적실험을 하였으며, 결정화 소결체의 표면을 thin-film XRD, FT-IR로 분석하였다. 실험결과, apatite와 wollastonite 결정이 석출된 치밀한 결정화 소결체가 얻어졌으며, 이들 결정은 wollastonite 결정의 (202)면이 인상방향에 수직으로 성장하는 경향을 보였다. 또한 제조된 결정화 소결체는 평균 186.9MPa의 굽힘강도를 나타내어 일반적 방법으로 제조되는 결정화 소결체보다 높은 역학적 성질을 보였다. 유사체액내의 침적실험결과, 시료표면위에 apatite 결정층이 3일후부터 형성되어 생체뼈와 화학결합을 이룰 가능성이 있음을 알았다.

  • PDF