Browse > Article
http://dx.doi.org/10.22156/CS4SMB.2021.11.03.167

Characteristics by deposition and heat treatment of Cr and Al thin film on stainless steel  

Kim, Kyoung-Bo (Department of Metallurgical and Materials Engineering, Inha Technical College)
Lee, Jongpil (Department of Electrical and Electronic Engineering, Jungwon University)
Kim, Moojin (Department of IoT Electronic Engineering, Kangnam University)
Publication Information
Journal of Convergence for Information Technology / v.11, no.3, 2021 , pp. 167-173 More about this Journal
Abstract
There is an increasing interest in manufacturing various electronic devices on a bendable substrate. In this paper, we observed a surface morphology by annealing for 20 minutes at temperatures of 150 ℃, 350 ℃, and 550 ℃, respectively, with samples coated by chromium and aluminum. Data on surfaces are investigated using high-resolution SEM and AFM that can measure roughness up to nm. There is no difference from the sample without heat treatment up to 350 ℃, but the change of crystal grains can be observed at 550 ℃. In the future, for application to the flexible optoelectronic field, additional characteristics such as electrical conductivity and reflectivity will be analyzed and optical devices will be manufactured. In conclusion, we will explore the possibility of applying metal materials to flexible electronic devices.
Keywords
Metal foil; Cr; Al; Thermal annealing; Flexible electronic devices;
Citations & Related Records
연도 인용수 순위
  • Reference
1 K. S. Kim et al. (2018). Extremely flat metal films implemented by surface roughness transfer for flexible electronics. RSC Advances, 8, 10883-10888. DOI : 10.1039/c8ra00298c   DOI
2 K. B. Kim. (2016). Effect of Metal Barrier Layer for Flexible Solar Cell Devices on Stainless Steel Substrates. Applied Science and Convergence Technology, 26(1), 16-19. DOI : 10.5757/ASCT.2017.26.1.16   DOI
3 R. S. Howell, M. Stewart, S. V. Kmik, S. K. Saha & M. K. Hatalis. (2000). Poly-Si thin-film transistors on steel substrates. IEEE Electron Device Letters, 21(2), 70-72. DOI : 10.1109/55.821670   DOI
4 J. K. Jeong et al. (2007). Flexible Full-Color AMOLED on Ultrathin Metal Foil. IEEE Electron Device Letters, 28(5), 389-391. DOI : 10.1109/LED.2007.895449   DOI
5 J. S. Park et al. (2009). Flexible full color organic light-emitting diode display on polyimide plastic substrate driven by amorphous indium gallium zinc oxide thin-film transistors. Applied Physics Letters, 95(10), 013503. DOI : 10.1063/1.3159832   DOI
6 X. G. Gao, L. Lin, Y. Liu & X. Huang. (2015). LTPS TFT Process on Polyimide Substrate for Flexible AMOLED. Journal of Display Technology, 11(8), 666-669. DOI : 10.1109/JDT.2015.2419656   DOI
7 R. Okuda, K. Miyoshi, N. Arai & M. Tomikawa. (2004). Polyimide Coatings for OLED Applications. Journal of Photopolymer Science and Technology, 17(2), 207-213. DOI : 10.2494/photopolymer.17.207   DOI
8 K. B. Kim, J. P. Lee, M. J. Kim & Y. S. Min. (2019). Characteristics of Excimer Laser-Annealed Polycrystalline Silicon on Polymer layers. Journal of Convergence for Information Technology, 9(3), 75-81. DOI : 10.22156/CS4SMB.2019.9.3.075   DOI
9 C. Yi, W. Li, S. Shi, K. He, P. Ma, M. Chen & C. Yang. (2020). High-temperature-resistant and colorless polyimide: Preparations, properties, and applications. Solar Energy, 195, 340-354. DOI : 10.1016/j.solener.2019.11.048   DOI
10 H. J. Ni, J. G. Liu, Z. H. Wang & S. Y. Yang. (2015). A review on colorless and optically transparent polyimide films: Chemistry, process and engineering applications. Journal of Industrial and Engineering Chemistry, 28, 16-27. DOI : 10.1016/j.jiec.2015.03.013   DOI
11 X. Wu et al. (2020). Optically Transparent and Thermal‐Stable Polyimide Films Derived from a Semi-Aliphatic Diamine: Synthesis and Properties. Macromolecular Chemistry and Physics, 221(5), 1900506. DOI : 10.1002/macp.201900506   DOI
12 M. J. Kim. (2021). Atmospheric Pressure Plasma Etching Technology for Forming Circular Holes in Perovskite Semiconductor Materials. Journal of Convergence for Information Technology, 11(2), 10-15. DOI : 10.22156/CS4SMB.2021.11.02.010   DOI
13 Z. Wu, G. Yan, J. Lu, G. Zhang & J. Yang. (2019). Thermal Plastic and Optical Transparent Polyimide Derived from Isophorone Diamine and Sulfhydryl Compounds. Industrial & Engineering Chemistry Research, 58(17), 6992-7000. DOI : 10.1021/acs.iecr.9b00674   DOI
14 K. B. Kim. (2020). Rapid Thermal Annealing for Ag Layers on SiO2 Coated Metal Foils. Journal of Convergence for Information Technology, 10(8), 137-143. DOI : 10.22156/CS4SMB.2020.10.08.137   DOI
15 M. J. Kim, K. B. Kim, D. Y. Lee, S. N. Lee & J. M. Lee. (2015). Effects of rapid thermal annealing for E-beam evaporated Ag films on stainless steel substrates. Surface and Coatings Technology, 278, 18-24. DOI : 10.1016/j.surfcoat.2015.07.073   DOI
16 H. Khachatryan, S. N. Lee, K. B. Kim, H. K. Kim & M. J. Kim. (2018). Al thin film: The effect of substrate type on Al film formation and morphology. Journal of Physics and Chemistry of Solids, 122, 109-117. DOI : 10.1016/j.jpcs.2018.06.018   DOI