• Title/Summary/Keyword: Thin-film multilayer

검색결과 234건 처리시간 0.031초

Zirconium Titanate Thin FIlm Prepared by Surface Sol-Gel Process and Effects of Thickness on Dielectric Property

  • Kim, Chy-Hyung;Lee, Moon-Hee
    • Bulletin of the Korean Chemical Society
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    • 제23권5호
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    • pp.741-744
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    • 2002
  • Single phase of multicomponent oxide ZrTiO4 film could be prepared through surface sol-gel route simply by coating the mixture of 100 mM zirconium butoxide and titanium butoxide on $Pt/Ti/SiO_2Si(100)$ substrate, following pyro lysis at $450^{\circ}C$, and annealing it at 770 $^{\circ}C.$ The dielectric constant of the film was reduced as the film thickness decreased due to of the interfacial effects caused by layer/electrode and a few voids inside the multilayer. However, the dielectric property was independent of applied dc bias sweeps voltage (-2 to +2 V).The dielectric constant of bulk film, 31.9, estimated using series-connected capacitor model was independent of film thickness and frequency in the measurement range, but theoretical interfacial thickness, ti, was dependent on the frequency. It reached a saturated ti value, $6.9{\AA}$, at high frequency by extraction of some capacitance component formed at low frequency range. The dielectric constant of bulk ZrTiO4 pellet-shaped material was 33.7 and very stable with frequency promising as good applicable devices.

유기반도체용 고성능 박막 봉지재의 제조 및 평가 (Fabrication and Characterization of High-Performance Thin-Film Encapsulation for Organic Electronics)

  • 김남수
    • 대한기계학회논문집B
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    • 제36권10호
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    • pp.1049-1054
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    • 2012
  • 유기전자재료의 발전으로 박막화, 유연화, 경량화가 가능하면서, 저가의 생산비용으로 제조 될 수 있는 유기반도체의 개발 및 상용화에 대한 연구가 활발히 이루어지고 있다. 하지만, 유기반도체를 구성하는 유기재료 및 전극재료가 미량의 수분과 반응으로 성능이 저하되는 문제로 상용화의 큰 걸림돌이 되고 있다. 따라서 유기재료 및 전극을 동작환경의 수분으로부터 보호할 수 있는 고성능 투습 방지막 개발에 대한 연구가 많이 진행되고 있다. 본 연구에서는 $SiO_x$/parylene 및 $SiN_x$/parylene 구조를 이용한 다중 구조의 고성능 박막 봉지막을 개발하고, 개발된 박막을 Ca-corrosion test를 이용하여 수분투과율을 측정하였다. 또한 박막 봉지재를 유기태양전지에 적용하여 유기태양전지의 수명과 투습특성과의 관계를 확인하였다.

Study of complex electrodeposited thin film with multi-layer graphene-coated metal nanoparticles

  • Cho, Young-Lae;Lee, Jung-woo;Park, Chan;Song, Young-il;Suh, Su-Jeong
    • Carbon letters
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    • 제21권
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    • pp.68-73
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    • 2017
  • We have demonstrated the production of thin films containing multilayer graphene-coated copper nanoparticles (MGCNs) by a commercial electrodeposition method. The MGCNs were produced by electrical wire explosion, an easily applied technique for creating hybrid metal nanoparticles. The nanoparticles had average diameters of 10-120 nm and quasi-spherical morphologies. We made a complex-electrodeposited copper thin film (CETF) with a thickness of $4.8{\mu}m$ by adding 300 ppm MGCNs to the electrolyte solution and performing electrodeposition. We measured the electric properties and performed corrosion testing of the CETF. Raman spectroscopy was used to measure the bonding characteristics and estimate the number of layers in the graphene films. The resistivity of the bare-electrodeposited copper thin film (BETF) was $2.092{\times}10^{-6}{\Omega}{\cdot}cm$, and the resistivity of the CETF after the addition of 300 ppm MGCNs was decreased by 2% to ${\sim}2.049{\times}10^{-6}{\Omega}{\cdot}cm$. The corrosion resistance of the BETF was $9.306{\Omega}$, while that of the CETF was increased to 20.04 Ω. Therefore, the CETF with MGCNs can be used in interconnection circuits for printed circuit boards or semiconductor devices on the basis of its low resistivity and high corrosion resistance.

푸리에 변환을 이용한 3층 구조 박막의 두께 측정 (Determining the Thickness of a Trilayer Thin-Film Structure by Fourier-Transform Analysis)

  • 조현주;원준연;정영규;우봉주;윤준호;황보창권
    • 한국광학회지
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    • 제27권4호
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    • pp.143-150
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    • 2016
  • 분광광도계로 측정된 반사율 데이터를 활용하여 다층박막 각 층의 두께를 푸리에 변환 방법으로 결정하였다. 이를 위하여 이론적인 3층 다층박막 반사율 데이터를 생성하고 자체 작성한 Matlab 프로그램으로 델타함수의 피크 발생위치로부터 각 층의 두께를 결정하였으며, 박막의 광학적 두께가 730 nm 이상이 되는 경우 결정된 두께 오차는 1.0% 이하임을 알 수 있었다. 이 방법을 사용하여 바 코팅 방법으로 제작된 PI-(얇은 $SiO_2$)-PI 다층박막의 두께를 결정하고 그 결과를 SEM 측정결과와 비교하였다. 본 두께측정 방법은 각 층의 굴절률과 박막의 순서를 미리 인지하고 있어야 하는 단점이 있으나, 비파괴적인 방법으로 빠르게 다층 박막의 두께 분포를 결정할 수 있는 방법임을 확인하였다.

무편광 유전체 다층박막 회절격자의 효율 보정 (Diffraction-efficiency Correction of Polarization-independent Multilayer Dielectric Gratings)

  • 조현주;김관하;김동환;이용수;김상인;조준용;김현태
    • 한국광학회지
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    • 제33권1호
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    • pp.22-27
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    • 2022
  • 격자의 구조가 간단하고 격자의 대조비가 낮은 SBC 시스템 구성을 위한 무편광 유전체 다층박막 회절격자를 제작하였다. 제작된 박막의 굴절률과 두께 오차로 인하여, 제작된 회절격자의 회절 효율은 설계보다 낮은 값을 나타내었다. 오차를 발생시킨 원인을 분석하고, 제작된 회절격자 위에 추가의 코팅을 통하여 회절 효율 보정이 가능함을 시뮬레이션을 통하여 확인하였다. 시뮬레이션 결과를 확인하기 위하여 제작된 회절격자 위에 Ta2O5 추가층을 제작하고 회절격자를 측정한 결과 회절 효율 보상이 이루어졌으며, 최고 91.7%의 무편광 회절 효율을 얻었다.

고성능 유연 투명전극용 SiO2 기반 비대칭 다층 박막의 특성 (Characteristics of SiO2 Based Asymmetric Multilayer Thin Films for High Performance Flexible Transparent Electrodes)

  • 정지원;공헌;이현용
    • 한국전기전자재료학회논문지
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    • 제33권1호
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    • pp.25-30
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    • 2020
  • Oxide (SiO2)/Metal(Ag)/Oxide(SiO2, ITO, ZnO) multilayer films were fabricated using a magnetron sputtering technique at room temperature on Si (p-type, 100) and a glass substrate. The electrical and optical properties of the asymmetric multilayer films depended on the thickness of the mid-layer film and the type of oxide in the bottom layer. As the metal layer becomes thicker, the sheet resistance decreases. However, the transmittance decreases when the metal layer exceeds a threshold thickness of approximately 10~12 nm. In addition, the sheet resistance and transmittance change according to the type of oxide in the bottom layer. If the oxide has a large resistivity, the overall sheet resistance increases. In addition, the anti-reflection effect changes according to the refractive index of the oxide material. The optical and electrical properties of multilayer films were investigated using an ultraviolet visible (UV-Vis) spectrophotometer and a 4-point probe, respectively. The optimum structure is SiO2 (30 nm)/Ag (10 nm)/ZnO (30 nm) multilayer, with the highest FOM value of 7.7×10-3 Ω-1.

Flexible and Transparent CuO/Cu/CuO Electrodes Grown on Flexible PET Substrate by Continuous Roll-to-roll Sputtering for Touch Screen Panels Cells

  • Kim, Dong-Ju;Kim, Han-Ki
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.217.2-217.2
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    • 2014
  • We prepared a flexible and transparent CuO/Cu/CuO multilayer electrodes on a polyethylene terephthalate (PET) substrate using a specially designed roll-to-roll sputtering system at room temperature for GFF-type touch screen panels (TSPs). By the continuous roll-to-roll sputtering of the CuO and Cu layer, we fabricated a flexible CuO(150nm)/Cu(150nm)/CuO(150nm) multilayer electrodes with a sheet resistance of $0.289{\Omega}/square$, resistivity of $5.991{\times}10^{-23}{\Omega}-cm$, at the optimized condition without breaking the vacuum. To investigate the feasibility of the CuO/Cu/CuO multilayer as a transparent electrode for GFF-type TSPs, we fabricated simple GFF-type TSPs using the diamond patterned CuO/Cu/CuO electrode on PET substrate as function of mesh line width. Using diamond patterned CuO/Cu/CuO electrode of mesh line $5{\mu}m$ with sheet resistance of 38 Ohm/square, optical transmittance of 90% at 550 nm and an average transmittance of 89% at wavelength range from 380 to 780 nm, we successfully demonstrated GFF-type touch panel screens (TPSs). The successful operation of GFF-type TPSs with CuO/Cu/CuO multilayer electrodes indicates that the CuO/Cu/CuO multilayer is a promising transparent electrode for large-area capacitive-type TPSs due to its low sheet resistance and high transparency.

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Azobenzene 유도체 LB막의 광학적 특성 및 비선형 광학 효과 (Nonlinear Optical Effect and Optical Properties of Azobenzene Derivative LB Lilm)

  • 신동명;최강훈;강도열;정치섭
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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    • pp.225-227
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    • 1994
  • The second-order nonlinear optical effect, especially the second harmonic generation, in Langmuir-Blodgett(LB) films have get much attention over the past few years. For second harmonic generation(SHG) of the ultrathin organic films, the multilayer structure of the film should have the noncentrosymmetric arrangements of molecules. The Langmuir-Blodgett technique can result in the production of thin films of precisely controlled dimensions and structure. In this paper, n-octadecyl 4-(4'-nitrophenylazo)-1-naphthyl ether, ONNE(azohenzene derivative), was synthesized and the optical properties of ONNE was studied. Nonccntrosymmctric Z-type LB films of ONNE were prepared and SHG intensity of the film were measured. The structural characteristics of floating monolayer(L film) and LB film of ONNE were discussed with $\pi$-A isotherm. UV-visible absorption spectroscopy and spectroscopic ellipsometry. The polarized UV-visible absorption spectroscopy and SHO intensity suggest the molecular orientation in LB film.

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Polymer 기판상에 제작된 AZO/Ag/AZO 다층박막

  • 김상모;임유승;금민종;김경환
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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    • pp.207-210
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    • 2007
  • We prepared Al doped ZnO/Ag/Al doped ZnO on the polymer substrate by Facing Target Sputtering (FTS). FTS featured Facing Target Sputtering featured that deposition is stable at the low pressure, it has high plasma density and suppresses the substrate damage from energetic particles. We fixed to 50nm up and down thickness of AZO layer, respectively and that of intermediate Ag layer was adjusted with deposition time. In the result, AZO/Ag/AZO multilayer thin films have much better electrical conductivity than AZO single layer thin film. As increasing the thickness of Ag layer, the transmittance decreased.

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Four Point Bending Test for Adhesion Testing of Packaging Strictures: A Review

  • Mahan, Kenny;Han, Bongtae
    • 마이크로전자및패키징학회지
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    • 제21권4호
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    • pp.33-39
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    • 2014
  • To establish the reliability of a packaging structures, adhesion testing of key interfaces is a critical task. Due to the material mismatch, the interface may be prone to delamination failure due to conditions during the manufacturing of the product or just from the day-to-day use. To assess the reliability of the interface adhesion strength testing can be performed during the design phase of the product. One test method of interest is the four-point bending (4PB) adhesion strength test method. This test method has been implemented in a variety of situations to evaluate the adhesion strength of interfaces in bimaterial structures to the interfaces within thin film multilayer stacks. This article presents a review of the 4PB adhesion strength testing method and key implementations of the technique in regards to semiconductor packaging.