Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Polymer 기판상에 제작된 AZO/Ag/AZO 다층박막

  • 김상모 (경원대학교 전기공학과) ;
  • 임유승 (경원대학교 전기공학과) ;
  • 금민종 (플라즈마 응용 표면 기술센터) ;
  • 김경환 (경원대학교 전기공학과)
  • Published : 2007.06.08
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Abstract

We prepared Al doped ZnO/Ag/Al doped ZnO on the polymer substrate by Facing Target Sputtering (FTS). FTS featured Facing Target Sputtering featured that deposition is stable at the low pressure, it has high plasma density and suppresses the substrate damage from energetic particles. We fixed to 50nm up and down thickness of AZO layer, respectively and that of intermediate Ag layer was adjusted with deposition time. In the result, AZO/Ag/AZO multilayer thin films have much better electrical conductivity than AZO single layer thin film. As increasing the thickness of Ag layer, the transmittance decreased.

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