• 제목/요약/키워드: Thin film phosphor

검색결과 78건 처리시간 0.022초

증착 온도가 Eu3+ 이온이 도핑된 MgMoO4 형광체 박막의 특성에 미치는 영향 (Effect of Deposition Temperature on the Properties of Eu3+-doped MgMoO4 Phosphor Thin Films)

  • 강동균;조신호
    • 한국표면공학회지
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    • 제49권1호
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    • pp.81-86
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    • 2016
  • $Eu^{3+}$-doped $MgMoO_4$ phosphor thin films were deposited on quartz substrates by radio frequency magnetron sputtering with changing various growth temperatures. The effects of growth temperature on the structure, transmittance, optical band gap, and luminescence of the phosphor thin films were characterized. All the phosphor thin films, irrespective of growth temperature, showed a monoclinic structure with a main (220) diffraction peak. The thin film deposited at a growth temperature of $400^{\circ}C$ indicated an average transmittance of 90% in the wavelength range of 500 ~ 1100 nm and band gap energy of 4.81 eV. The excitation spectra of the phosphor thin films consisted of a broad charge transfer band peaked at 284 nm in the range of 230 ~ 330 nm and two weak peaks located at 368 and 461 nm, respectively. The emission spectra under ultraviolet excitation at 284 nm exhibited a sharp emission peak at 614 nm and several weak bands. All the phosphor thin films showed high asymmetry ratio values, indicating that $Eu^{3+}$ ions incorporated into the host lattice occupied at the non-inversion symmetry sites. The results suggest that the growth temperature plays an important role in growing high-quality phosphor thin films.

Luminescence Characteristics of Red Light Emitting (YVO4:Eu Thin-Film Phosphors Deposited on Si Substrate Using Pulsed Laser Deposition

  • Kim, Dong-Kuk;Kang, Wee-Kyung
    • Bulletin of the Korean Chemical Society
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    • 제25권12호
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    • pp.1859-1862
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    • 2004
  • Europium doped yttrium vanadate ($YVO_4$:Eu) phosphor thin films were grown using a pulsed laser deposition (PLD) technique on silicon substrate. The structural characterization carried out on a series of ($YVO_4$:Eu films at post annealing temperature in the range of 550 $^{\circ}C$-1150 $^{\circ}C$ indicating that films were preferentially (200) oriented at post annealing temperature above 950 $^{\circ}C.$ Photoluminescence of thin film increased with the increase of post annealing temperature and ambient oxygen pressure though the thin film has the powder-like surface morphology at oxygen pressure above 200 mTorr. Photoluminescence decay from $^5D_1$ level of $Eu^{3+}$ show the great concentration dependency, which can be used as a good parameter to control the composition of ($YVO_4$:Eu thin film.

열처리 온도 변화에 따른 라디오파 마그네트론 스퍼터링으로 성장된 MgMoO4:Eu3+ 형광체 박막의 특성 (Properties of MgMoO4:Eu3+ Phosphor Thin Films Grown by Radio-frequency Magnetron Sputtering Subjected to Thermal Annealing Temperature)

  • 조신호
    • Current Photovoltaic Research
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    • 제4권1호
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    • pp.25-29
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    • 2016
  • $Eu^{3+}$-activated $MgMoO_4$ phosphor thin films were grown at $400^{\circ}C$ on quartz substrates by radio-frequency magnetron sputter deposition from a 15 mol% Eu-doped $MgMoO_4$ target. After the deposition, the phosphor thin films were annealed at several temperatures for 30 min in air. The influence of thermal annealing temperature on the structural and optical properties of $MgMoO_4:Eu^{3+}$ phosphor thin films was investigated by using X-ray diffraction (XRD), photoluminescence (PL), and ultraviolet-visible spectrophotometry. The transmittance, optical band gap, and intensities of the luminescence and excitation spectra of the thin films were found to depend on the thermal annealing temperature. The XRD patterns indicated that all the thin films had a monoclinic structure with a main (220) diffraction peak. The highest average transmittance of 91.3% in the wavelength range of 320~1100 nm was obtained for the phosphor thin film annealed at $800^{\circ}C$. At this annealing temperature the optical band gap energy was estimated as 4.83 eV. The emission and excitation spectra exhibited that the $MgMoO_4:Eu^{3+}$ phosphor thin films could be effectively excited by near ultraviolet (281 nm) light, and emitted the dominant 614 nm red light. The results show that increasing RTA temperature can enhance $Eu^{3+}$ emission and excitation intensity.

열처리조건과 기판이 $ZnGa_O_4:Mn$ 박막 형광체의 발광특성에 미치는 영향 (Effects of heat treatment and substrates on luminescent characteristics of $ZnGa_O_4:Mn$ thin film phosphor)

  • 정승묵;김영진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 디스플레이 광소자분야
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    • pp.181-184
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    • 2004
  • The green emitting phosphor, $ZnGa_2O_4:Mn$ thin film with spinel structure were deposited by rf magnetron sputtering. Thin film phosphors were heat-treated in nitrogen, vacuum and air atmosphere, respectively. The effects of the substrates, heat-treatment conditions and the sputtering parameters were investigated. The growing behavior and luminescent properties of thin films depend on the crystallinity of the substrates. The Ga/Zn atomic ratios and luminescent characteristics were dependent on the annealing conditions.

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Sputtering 조건이 $CaTiO_3 : Pr$ 형광체 박막의 물성에 미치는 영향 (Effects of Sputtering Conditions on Properties of $CaTiO_3 : Pr$ Phosphor thin Films)

  • 정승묵;김영진;강승구;이기강
    • 한국결정학회지
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    • 제11권3호
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    • pp.167-172
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    • 2000
  • CaTiO₃:Pr phosphor thin films were prepared on Si(100), ZnO/glass, Corning glass and ITO/glass by rf magnetron reactive sputtering. The effects of deposition parameters such as oxygen partial pressure, substrate temperature, and annealing conditions on crystallinity and compositional variation of the films were investigated. PL spectra of CaTiO₃:Pr phosphor thin films exhibited red regime peaking at 613 nm and enhanced PL intensity was observed for the film annealed in vacuum atmosphere as compared to the deposit annealed in N₂ environment.

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The Origin of Change in Luminescent Properties of ZnMgS:Mn Thin Film Phosphor with Varying Annealing Temperature

  • Lee, Dong-Chin;Kang, Jong-Hyuk;Jeon, Duk-Young;Yun, Sun-Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1576-1579
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    • 2005
  • With varying rapid thermal annealing (RTA) temperature, luminescence properties of $Zn_{0.75}Mg_{0.25}S:Mn$ thin film deposited by RF-magnetron sputtering technique were investigated. In this study, $Zn_{0.75}Mg_{0.25}S:Mn$ thin film phosphor showed more red emission than those of the previous studies when annealed around 600 or $650^{\circ}C$. Although all samples were deposited from identical source composition, a main peak wavelength of photoluminescence spectra of $Zn_{0.75}Mg_{0.25}S:Mn$ shifted toward shorter wavelengths depending upon increase of RTA temperature. The same dependence of wavelength on RTA temperature was also observed in cathodoluminescence as well as electroluminescence measurements. It was revealed that the change of the luminescence properties were originated from structural changes in $Zn_{0.75}Mg_{0.25}S:Mn$ thin film phosphor from cubic to hexagonal phases analyze using conventional X-ray pole figure mapping. The phase transition would be the origin of luminescence property changes with respect to RTA temperature.

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CaMoO4:Tb3+ 녹색 형광체 분말과 박막의 제조와 발광 특성 (Synthesis and Emission Properties of CaMoO4:Tb3+ Green Phosphor Powders and Thin Films)

  • 전용일;조신호
    • 한국전기전자재료학회논문지
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    • 제26권4호
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    • pp.264-270
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    • 2013
  • $CaMoO_4:Tb^{3+}$ green phosphor powders and thin films were successfully prepared by using the solid-state reaction method and the radio-frequency magnetron sputtering technique, respectively. The crystalline structure of all phosphor powders with different $Tb^{3+}$ ion concentrations was found to be a tetragonal system with the maximum diffraction intensity at $28.58^{\circ}$, while that of the phosphor thin films, irrespective of the type of substrate, was amorphous. As for the phosphor powders, the grain particles showed the chain-like patterns with inhomogeneous size distribution, the excitation spectra were composed of a broad band peaked at 307 nm and two small narrow bands centered at 381 and 492 nm, and the highest green emission spectrum was observed at 0.01 mol of $Tb^{3+}$ ions. As for the phosphor thin films, the average transmittance exceeding 85% was measured in the 400~1,100 nm range and the optical band gap showed a significant dependence on the type of substrate.

ZnGa$_2$O$_4$형광박막의 발광특성에 미치는 도핑 및 어닐리의 효과 (Doping and Annealing Effect on Luminescent Characteristics of $_2$ Phosphor Thin Films)

  • 정영호;정승묵;김석범;김영진
    • 한국세라믹학회지
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    • 제35권6호
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    • pp.619-625
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    • 1998
  • Mn doped {{{{ {Zn {Ga }_{2 }O }_{4 } }} thin film phosphors were prepared on Si(100) wafers and ITO coated glass substrates by rf magnetron sputtering technique and the effects of the substrates dopant and the sputtering paramet-ers were analyzed, Changes of the oreintation were observed after annealine tratment. The grain size of {{{{ {Zn {Ga }_{2 }O }_{4 } }} : Mn thin film deposited on Si wafer was smaller than that on ITO/glass substrate which resulted in higher PL intensity. The PL spectra of Mn doped {{{{ {Zn {Ga }_{2 }O }_{4 } }} thin films showed sharp green luminescence spec-trum. According to CL spectrum it could be concluded that Mn ions acted as an actuator for green emission by substituting Zn atom sites.

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Deposition and Luminescent Characterization of $Y_3Al_5O_{12}$:Ce Thin Film Phosphor

  • Kim, Joo-Won;Han, Sang-Hyuk;Kim, Young-Jin;Chung, Sung-Mook
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.657-659
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    • 2004
  • Trivalent cerium ($Ce^{3+}$) activated yttrium aluminum garnet ($Y_3Al_5O_{12}$, YAG) phosphor thin films were deposited on quartz glass substrates by rf magnetron sputtering. The effects of sputtering parameters and annealing condition on the luminescent properties were investigated. The sputtering parameters were $O_2$/Ar gas ratio, rf power, and deposition time. The films were annealed at 1200 $^{\circ}C$ for 5 hours in $N_2+$vacuum atmosphere. Polycrystalline YAG:Ce thin film phosphor could be obtained with a gas ratio of $O_2$/(Ar+$O_2$)=0.5 after post-annealing. PL spectra excited at 450 nm showed a yellow single band at 550 nm.

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