• Journal of Sensor Science and Technology
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• v.6 no.2
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• pp.81-86
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• 1997

Platinum thin films were deposited on $SiO_{2}/Si$ and $Al_{2}O_{3}$ substrates by DC magnetron sputtering for RTD (resistance thermometer devices) temperature sensors. The resistivity and sheet resistivity of these films were decreased with increasing the annealing temperature and time. We made Pt resistance pattern on $Al_{2}O_{3}$ substrate by lift-off method and fabricated Pt-RTD temperature sensors by using W-wire, silver epoxy and SOG(spin-on-glass). In the temperature range of $25{\sim}400^{\circ}C$, we investigated TCR(temperature coefficient of resistance) and resistance ratio of Pt-RTD temperature sensors. TCR values were increased with increasing the annealing temperature, time and the thickness of Pt thin films. Resistance values were varied linearly within the range of measurement temperature. At annealing temperature of $1000^{\circ}C$, time of 240min and thin film thickness of $1{\mu}m$, we obtained TCR value of $3825ppm/^{\circ}C$ close to the Pt bulk value.

• Carbon letters
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• v.21
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• pp.68-73
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• 2017

We have demonstrated the production of thin films containing multilayer graphene-coated copper nanoparticles (MGCNs) by a commercial electrodeposition method. The MGCNs were produced by electrical wire explosion, an easily applied technique for creating hybrid metal nanoparticles. The nanoparticles had average diameters of 10-120 nm and quasi-spherical morphologies. We made a complex-electrodeposited copper thin film (CETF) with a thickness of $4.8{\mu}m$ by adding 300 ppm MGCNs to the electrolyte solution and performing electrodeposition. We measured the electric properties and performed corrosion testing of the CETF. Raman spectroscopy was used to measure the bonding characteristics and estimate the number of layers in the graphene films. The resistivity of the bare-electrodeposited copper thin film (BETF) was $2.092{\times}10^{-6}{\Omega}{\cdot}cm$, and the resistivity of the CETF after the addition of 300 ppm MGCNs was decreased by 2% to ${\sim}2.049{\times}10^{-6}{\Omega}{\cdot}cm$. The corrosion resistance of the BETF was $9.306{\Omega}$, while that of the CETF was increased to 20.04 Ω. Therefore, the CETF with MGCNs can be used in interconnection circuits for printed circuit boards or semiconductor devices on the basis of its low resistivity and high corrosion resistance.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.384-388
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• 2007

Aerodynamic characteristics of Coleoptera species of Epilachna quadricollis and Allomyrina dichotoma are experimentally and numerically investigated. Using digital high speed camera and smoke wire technique, we visualized the continuous wing kinematics and the flight motion of free-flying coleoptera. The experimental visualization shows that the elytra flapped concurrently with the main wing both in the downstroke and upstroke motions. The wing motion of Epilachna quadricollis was captured and analyzed frame by frame to identify the kinematics of the wings and to implement it in the movement of a model wing (thin plate) in the simulation. The two-dimensional simulation of Epilachna quadricollis hovering flight was performed by assuming the wing cross section shape as a thin plate, even though most of insect's wings are made of curved corrugated membrane. The effect of Reynolds number are investigated by the simulation. Meanwhile, in order to investigate the role and effect of elytra, the flow visualization of Allomyrina dichotoma was carried on using smoke wire visualization technique. Here, we confirmed that the vortex generated by elytra due to its movement is strongly influence the vortex dynamic generated by hind wings.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2003.11a
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• pp.17-20
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• 2003

The EMC's rheological effects on molding process are evaluated in this study. When considering mold processing for IC packages, the major concerning items in current studies are incomplete fill, severe wire sweeping and paddle shifts etc. To simulate EMC's fast curing rheokinetics with 3D mold flow behavior, one should select appropriate rheometry which characterize each EMC's rheological motion and finding empirical parameters for numerical analysis current studies present the new rheometry with parallel plate rheometry for reactive rheokinetic experiments, the experiment and numerical analysis is done with the commercial higher filler loaded EMC for the case of Thin Quad Plant Packages (TQFP) with package thickness below 1.0 mm. The experimental results and simulation results based on new rheometry matches well in point of the prediction of wire sweep, filling behavior of melt front advancement and void trapping position.

• International Journal of Fluid Machinery and Systems
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• v.4 no.1
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• pp.33-46
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• 2011

Concave surface boundary-layer flows are subjected to centrifugal instability which results in the formation of streamwise counter-rotating vortices. Such boundary layer flows have been experimentally investigated on concave surfaces of 1 m and 2 m radius of curvature. In the experiments, to obtain uniform vortex wavelengths, thin perturbation wires placed upstream and perpendicular to the concave surface leading edge, were used to pre-set the wavelengths. Velocity contours were obtained from hot-wire anemometer velocity measurements. The most amplified vortex wavelengths can be pre-set by the spanwise spacing of the thin wires and the free-stream velocity. The velocity contours on the cross-sectional planes at several streamwise locations show the growth and breakdown of the vortices. Three different vortex growth regions can be identified. The occurrence of a secondary instability mode is also shown as mushroom-like structures as a consequence of the non-linear growth of the streamwise vortices. Wall shear stress measurements on concave surface of 1 m radius of curvature reveal that the spanwise-averaged wall shear stress increases well beyond the flat plate boundary layer values. By pre-setting much larger or much smaller vortex wavelength than the most amplified one, the splitting or merging of the streamwise vortices will respectively occur.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1598-1600
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• 2003

Microcrystalline silicon(c-Si:H) thin-film solar cells are prepared with intrinsic Si-layer by hot wire CVD. The operating parameters of solar cells are strongly affected by the filament temperature ($T_f$) during intrinsic layer. Jsc and efficiency abruptly decreases with elevated $T_f$ to $1400^{\circ}C$. This deterioration of solar cell parameters are resulted from increase of crystalline volume fraction and corresponding defect density at high $T_f$ The heater temperature ($T_h$) are also critical parameter that controls device operations. Solar cells prepared at low $T_h$ (<$200^{\circ}C$) shows a similar operating properties with devices prepared at high $T_f$, i.e. low Jsc, Voc and efficiency. The origins for this result, however, are different with that of inferior device performances at high $T_f$. In addition the phase transition of the silicon films occurs at different silane concentration (SC) by varying filament temperature, by which highest efficiency with SC vanes with $T_f$.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2007.04a
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• pp.427-432
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• 2007

In general, the response of bulk material is independent of its size when it comes to considering classical elasticity theory. Because the surface to bulk ratio of the large solids is very small, the influence of surface can be negligible. But the surface effect plays important role as the surface to bulk ratio becomes larger, that is, the contribution of the surface effect must be considered in nano-size elements such as thin film or beam structure. Molecular dynamics computation has been a conventional way to analyze these ultra-thin structures but this method is limited to simulate on the order of $10^6-10^8$ atoms for a few nanoseconds, and besides, very time consuming. Analysis of structures in submicro to micro range(thin-film, wire etc.) is difficult with classical molecular dynamics due to the restriction of computing resources and time. Therefore, in this paper, the continuum-based method is considered to simulate the overall physical and mechanical properties of the structures in nano-scale, especially, for the thin-film.

• Mass Spectrometry Letters
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• v.12 no.2
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• pp.47-52
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• 2021

Evaluating the impurity concentrations in semiconductor thin films using time of flight secondary ion mass spectrometry (ToF-SIMS) is an effective technique. The mass interference between isotopes and matrix element in data interpretation makes the process complex. In this study, we have investigated the doping concentration of phosphorus in, phosphorus doped silicon thin film on glass using ToF-SIMS in the dynamic mode of operation. To overcome the mass interference between phosphorus and silicon isotopes, the quantitative analysis of counts to concentration conversion was done following two routes, standard relative sensitivity factor (RSF) and SIMetric software estimation. Phosphorus doped silicon thin film of 180 nm was grown on glass substrate using hot wire chemical vapor deposition technique for possible applications in optoelectronic devices. Using ToF-SIMS, the phosphorus-31 isotopes were detected in the range of 10¹~10⁴ counts. The silicon isotopes matrix element was measured from p-type silicon wafer from a separate measurement to avoid mass interference. For the both procedures, the phosphorus concentration versus depth profiles were plotted which agree with a percent difference of about 3% at 100 nm depth. The concentration of phosphorus in silicon was determined in the range of 10¹⁹~10²¹ atoms/cm³. The technique will be useful for estimating distributions of various dopants in the silicon thin film grown on glass using ToF-SIMS overcoming the mass interference between isotopes.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1555-1558
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• 2002

This paper presents deposition and characterizations of microcrystalline silicon(${\mu}c$-Si:H) films prepared by hot wire chemical vapor deposition at substrate temperature below $300^{\circ}C$. The $SiH_4$ Concentration$[F(SiH_4)/F(SiH_4)+F(H_2)]$ is critical parameter for the formation of Si films with microcrystalline phase. At 6% of silane concentration, deposited intrinsic ${\mu}c$-Si:H films shows sufficiently low dark conductivity and high photo sensitivity for solar cell applications. P-type ${\mu}c$-S:H films deposited by Hot-Wire CVD also shows good electrical properties by varying the rate of $B_2H_6$ to $SiH_4$ gas. The solar cells with structure of Al/nip ${\mu}c$-Si:H/TCO/glass was fabricated with sing1e chamber Hot-Wire CVD. About 3% solar efficiency was obtained and applicability of HWCVD for thin film solar cells was proven in this research.

• International Journal of Highway Engineering
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• v.11 no.2
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• pp.121-132
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• 2009

Thin bonded continuously reinforced concrete overlay(CRCO) was constructed on He existing jointed plain concrete pavement(HCP) surface at Seo-Hae-Ahn express highway in South Korea in order to evaluate its applicability and performance. Two sections of road were considered for this evaluation. In the first section, the concrete overlayer was placed and cut down to the existing layer to form transverse joints while CRCO was constructed on top of the existing layer in the second section. Early strength concrete(Type III) was utilized for both overlay sections. The depth of milling and the thickness of overlaid layer were 5 cm and 10 cm, respectively. Several vibrating wire gauges(VWG) were installed to evaluate the performance of CRCO with respect to curling, delamination, and crack propagation. As a result of the strength test, it was found that strength of the material reaches the design criteria within 1-3 days. Analysis with vibrating wire gauge(VWG) showed CRCO effectively restricts joint movement. High adhesive strength also was observed from the material regardless of length of aging. Meanwhile, transverse cracks were observed on the middle of the section where JPCP overlay was applied whereas arbitrarily cracks in transverse direction were observed on the section where CRCP was applied.