Journal of Sensor Science and Technology (센서학회지)
- Volume 6 Issue 2
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- Pages.81-86
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- 1997
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
The Study on Characteristics of Platinum Thin Film RTD Temperature Sensors with Annealing Conditions
열처리 조건에 따른 백금박막 측온저항체 온도센서의 특성에 관한 연구
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Chung, Gwiy-Sang
(Div. of Electronic and Mechanics Eng., Dongseo University) ;
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Noh, Sang-Soo
(Div. of Electronic and Mechanics Eng., Dongseo University)
- Published : 1997.03.31
Abstract
Platinum thin films were deposited on
DC 마그네트론 스퍼터링을 이용하여 측온저항체 온도센서용 백금박막을
Keywords