• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.2
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• pp.89-94
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• 2011

The cause of the thickness non-uniformity in the large area deposition of $SiO_2$ films by PECVD(Plasma Enhanced Chemical Vapor Deposition) was investigated by the plasma diagnostics. The spatial distribution of the plasma species in the chamber was obtained with DLP(Double Langmuir Probe) and the new-designed probe-type QMS(Quadrupole Mass Spectrometer). From the relationship between the spatial distribution of the plasma species and the depositing rate of the $SiO_2$ films, it was conformed that the non-uniform deposition of $SiO_2$ films was related with the spatial distribution of the oxygen radical density and electron temperature.

• Journal of the Korea Institute of Military Science and Technology
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• v.7 no.1
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• pp.34-46
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• 2004

Copper films were prepared by using ECR-MOCVD(Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with a DC bias system. The DC bias is connected to the electrode which placed 1∼3cm above the polymer substrate. The pulse electrical field around the electrode attracts the positive charged copper ions generated from the dissociation of copper precursor, $Cu(hfac)_2$, under ECR plasma. Condensation of supersaturated copper ions in the space between the electrode and substrate, makes it possible to deposit copper film on the polymer substrate even at room temperature. In this study, optimization of the electrode configuration was carried out in order to obtain the uniform films. The uniformity of the deposited films were closely related to the parameters of electrode geometry such as electrode shape, thickness, grid size and the spacing between electrodes. The most uniform copper film was observed with the electrode that enabled uniform electrical field distribution across the whole dimension of electrode.

• Journal of Mechanical Science and Technology
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• v.19 no.6
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• pp.1329-1337
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• 2005

The OLED (Organic Light Emitting Diodes) display recently used for the information indicating device has many advantages over the LCD (Liquid Crystal Display), and its demand will be increased highly. The linear cell should be designed carefully considering the uniformity of thin film on the substrate. Its design needs to compute the temperature field analytically because the uniformity for the thin film thickness depends on the temperature distribution of the source (organic material). In the present study, the design of the linear cell will be modified or improved on the basis of the temperature profiles obtained for the simplified linear cell. The temperature distributions are numerically calculated through the STAR-CD program, and the grids are generated by means of the ICEM CFD program. As the results of the simplified linear cell, the temperature deviation was shown in the parabolic form among the both ends and the center of the source. In order to reduce the temperature deviation, the configuration of the rectangular ends of the crucible was modified to the circular type. In consequence, the uniform temperature is maintained in the range of about 90 percent length of the source. It is expected that the present methods and results on the temperature analysis can be very useful to manufacture the vapor deposition device.

• Journal of the Society of Naval Architects of Korea
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• v.47 no.5
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• pp.743-749
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• 2010

Multi-nozzle spray painting procedure of the inorganic zinc shop primer was established in order to obtain uniform film thickness. The shop primer paint prevents the corrosion of steel block during shipbuilding. When the dry film thickness of shop primer is insufficient, rust will be generated on the steel block. Otherwise, thick coating of shop primer may be a problem of weld defect. So, it is important to obtain the uniform film thickness of shop primer. The uniformity of dry film thickness is affected by spray speed, distance from spray gun to target surface and overlapping span of spray path. In order to uniformly maintain coating thickness of shop primer, the coating procedure was established based on the correlation of shop primer spray variables.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.1
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• pp.104-109
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• 2013

In order to apply nano imprint technology in large area process, roller pressing is promising because of its low cost and high productivity. When pressing mold by roller, liquid resin is locally squeezed between mold and substrate. In this study, the main focus is to understand which process parameter affects residual layer. To do this, a simple analytical model was introduced. Especially, we consider the aspect ratio of patterns as essential cause of variation of the thickness in the equation. As a result, when the aspect ratio of pattern in the mold increases, the thickness of residual layer also increases. In conclusion, we show that the uniformity of residual layer could be accomplished by the control of velocity and pressing force in roller pressing imprint process.

• Journal of Information Display
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• v.2 no.1
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• pp.34-37
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• 2001

We developed the tension mask of which thickness increased from 25 urn to 50 urn to reduce the mask cost and improve the vibration property. First of all, the limitation by which rail structure can support is calculated and the optimal thickness of mask is determined. To prevent the reduction of brightness and brightness uniformity, the dimensions of mask was reassigned. As a result, the increase of mask thickness brought about a reduction in cost and improvement of howling property which had been a weak point of flat CRTs.

• Journal of Internet Computing and Services
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• v.11 no.1
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• pp.21-26
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• 2010

In this paper, film uniformity is improved by the bolt-mapping of convolutional image processing between bolts and a film using soft X-ray based in-line LCD TV film thickness controls. The automatic film thickness analysis of 3 inter-bolt's convolution function is proposed for the reduction of offset error from the X-ray changing of line scan in film profiles.

• Progress in Superconductivity and Cryogenics
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• v.6 no.1
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• pp.1-5
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• 2004

Long length of Bi-2223/Ag superconducting wives were fabricated by stacking and drawing process with advanced heat-treatment schedules. Intermediate annealing was carried out to increase the homogeneity and uniformity of the superconducting filaments embedded in the silver matrix. Phase modification from tetragonal to orthorhombic Bi-2212 by pre heat treatment(PHT) was executed to improve the texture and phase transformation of Bi-2223. Drawing stress was measured to predict the sausaging and stress limit. Rolling Parameters such as thickness. width and winding tension were investigated to roll the tape with uniformity. 1 km length of Bi-2223/Ag superconducting wires were fabricated without any breakage. Critical current (Je) of 270 m length of superconducting tapes was measured over than $70 A/cm^2$ continuously after final sintering.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.187-194
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• 2010

Shape optimization of an upper plenum of PBMR type gas cooled nuclear reactor has been performed by using three-dimensional Reynolds-Averaged Navier-Stokes (RANS) analysis and surrogate modeling technique. The objective function is defined as a linear combination of uniformity of flow distribution in the core and pressure drop in the upper plenum and the core. The ratio of thickness of slot to diameter of rising channels, ratio of height of upper plenum to diameter of rising channels, and ratio of eight of the slot at inlet to outlet, are used as design variables for optimization. Design points are selected through Latin-hypercube sampling. The optimal point is determined through surrogate-based optimization method which uses 3-D RANS analyses at design points. The results show that the optimum shape represent remarkably improved performance in flow uniformity and friction loss than the reference shape.

• Journal of computational fluids engineering
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• v.15 no.3
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• pp.16-23
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• 2010

Shape optimization of an upper plenum of a PBMR type gas cooled nuclear reactor has been performed by using three-dimensional Reynolds-Averaged Navier-Stokes (RANS) analysis and surrogate modeling technique. The objective function is defined as a linear combination of uniformity of flow distribution in the core and pressure drop in the upper plenum and the core. The ratio of thickness of slot to diameter of rising channels, ratio of height of upper plenum to diameter of rising channels, and ratio of height of the slot at inlet to outlet, are used as design variables for optimization. Design points are selected through Latin-hypercube sampling. The optimal point is determined through surrogate-based optimization method which uses 3-D RANS analyses at design points. The results show that the optimum shape represent remarkably improved performance in flow uniformity and friction loss than the reference shape.