• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.477-477
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• 2008

For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.169-169
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• 2008

To keep pace with scaling trends of CMOS technologies, high-k metal oxides are to be introduced. Due to their high permittivity, high-k materials can achieve the required capacitance with stacks of higher physical thickness to reduce the leakage current through the scaled gate oxide, which make it become much more promising materials to instead of $SiO_2$. As further studying on high-k, an understanding of the relation between the etch characteristics of high-k dielectric materials and plasma properties is required for the low damaged removal process to match standard processing procedure. There are some reports on the dry etching of different high-k materials in ICP and ECR plasma with various plasma parameters, such as different gas combinations ($Cl_2$, $Cl_2/BCl_3$, $Cl_2$/Ar, $SF_6$/Ar, and $CH_4/H_2$/Ar etc). Understanding of the complex behavior of particles at surfaces requires detailed knowledge of both macroscopic and microscopic processes that take place; also certain processes depend critically on temperature and gas pressure. The choice of $BCl_3$ as the chemically active gas results from the fact that it is widely used for the etching o the materials covered by the native oxides due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. In this study, the surface reactions and the etch rate of $Al_2O_3$ films in $BCl_3/Cl_2$/Ar plasma were investigated in an inductively coupled plasma(ICP) reactor in terms of the gas mixing ratio, RF power, DC bias and chamber pressure. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by AFM and SEM. The chemical states of film was investigated using X-ray photoelectron spectroscopy (XPS), which confirmed the existence of nonvolatile etch byproducts.

• Journal of the Korean Institute of Gas
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• v.16 no.2
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• pp.18-24
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• 2012

This research seeks to evaluate damage on type II gas cylinder by an acoustic emission test when executing 20000 cycles fatigue test and thereafter burst test. Used gas cylinders in the experimental are three types as follows; one is sound cylinder, others are cylinders which contain longitudinal and transverse artificial defect. The size of artificial defect is a depth of 3 mm, width of 3 mm and length of 50 mm. In the case of the cylinder which artificial defect, unlike the expectation that it will burst in low pressure, the burst pressure of the cylinder did not differ much according to whether or not there were defects. However, when there was longitudinal defect, the location of burst was near the location of defect. This leads to the effect in which the thickness of the composite material becomes thinner according to the length of the longitudinal defect and this is judged to have an effect on the location of initiation and growth of crack in the liner. Also, for the acoustic emission signal, when there is longitudinal defect, the ratio of an event occurring at defect position among overall hits is more than 50 %, and the source location also accords very precisely with defect position.

• Korean Chemical Engineering Research
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• v.51 no.4
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• pp.476-481
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• 2013

Ethylbenzene (EB) which has a similar physical properties with p-xylene (pX) was separated from EB/pX mixture by using MFI-type zeolite (TS-1, ZSM-5, and Silicalite-1) coated membranes. The zeolites were synthesized by microwave method to reduce the synthesis time and uniformly formed zeolite particles were coated on the ${\alpha}$-almina tubular support with a thickness of $3-4{\mu}m$. Separation factor and permeation flux of the synthesized zeolite coated membranes were measured to survey the best performance of ethylbenzene separation from different composition of EB/pX mixtures. When the EB/pX mixture of 5:5 molar ratio applied for the separation experiment, it represented the highest separation factor. We also have studied about the effect of the atomic composition of zeolites on the separation performance within the temperature range from 160 to $220^{\circ}C$. TS-1 showed the highest permeation flux of $1,666mol/m^{2*}s^*Pa$ and Silicate-1 showed the highest separation factor of 1.73 at $200^{\circ}C$ respectively.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.29 no.6
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• pp.529-538
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• 2016

The simplified plate theory is presented for static and free vibration analysis of power-law(P) and sigmoid(S) Functionally Graded Materials(FGM) plates. This theory considers the parabolic distribution of the transverse shear stress, and satisfies the condition that requires the transverse shear stress to be zero on the upper and lower surfaces of the plate, without the shear correction factor. The simplified plate theory uses only four unknown variables and shares strong similarities with classical plate theory(CPT) in many aspects such as stress-resultant expressions, equation of motion and boundary conditions. The material properties of the plate are assumed to vary according to the power-law and sigmoid distributions of the volume fractions of the constituents. The Hamilton's principle is used to derive the equations of motion and Winkler-Pasternak elastic foundation model is employed. The results of static and dynamic responses for a simply supported FGM plate are calculated and a comparative analysis is carried out. The results of the comparative analysis with the solutions of references show relevant and accurate results for static and free vibration problems of FGM plates. Analytical solutions for the static and free vibration problems are presented so as to reveal the effects of the power law index, elastic foundation parameter, and side-to-thickness ratio.

• Journal of the East Asian Society of Dietary Life
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• v.26 no.1
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• pp.25-33
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• 2016

The study was performed to investigate the effects of whey protein-rich meal substitute added with vitamins, minerals, and lactobacillus powder probiotics on weight loss, body fat, and body composition in 24 female volunteers for 4 weeks. Whey protein-rich meal substitute was consumed with low-fat, high calcium milk (1% fat, 260 mg/200 mL) twice a day. Subjects submitted 3-day diet records and a life-style questionnaire before the study. During the study, subjects were required to turn in a diet record every day and consume the meal substitute formula in the metabolic ward at C university for 4 weeks. Anthropometric measurements were carried out weekly by Inbody 7.0. The dietary intake and anthropometric data were analyzed to compare changes before and after the study by paired t-test with SPSS version 23.0. The subjects were mostly early 20's and either overweight or obese and highly motivated to lose weight. Most of the subjects consumed three meals per day regularly and spent mostly 10~15 minutes for a meal. Their caloric intake was relatively low and decreased from 1,360 kcal at week 0 to 1,100 kcal after 4 weeks. However, total protein intake increased while carbohydrate and fat intakes decreased (p<0.05) after the trial. Nine vitamin intakes after the study improved compared to those before the study (p<0.05). After the study, subjects showed lower body weight (-1.8 kg), body fat (-0.94 kg), percent body fat (-0.86%), as well as waist circumference (-4.52 cm), hip circumference (-0.44 cm), waist hip ratio (-0.05), and triceps skinfold thickness (-2.39 mm) compared to those at week 0 (p<0.05). Muscle mass tended to be less compared to week 0, although there was no significant differences between weeks 0 and 4. In conclusion, diet trial with whey protein-rich meal substitute induced weight loss and positively changed body fat parameters and body composition.

• Journal of the Korean Magnetics Society
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• v.16 no.6
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• pp.279-282
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• 2006

Magnetic tunnel junctions (MTJs), which consisted of amorphous ferromagnetic NiFeSiB free layers, were investigated. The NiFeSiB layers were used to substitute for the traditionally used CoFe and/or NiFe layers with the emphasis being given to obtaining an understanding of the effect of the amorphous free layer on the switching characteristics of the MTJs. $Ni_{16}Fe_{62}Si_{8}B_{14}$ has a lower saturation magnetization ($M_{s}:\;800\;emu/cm^{3}$) than $Co_{90}Fe_{10}$ and a higher anisotropy constant ($K_{u}:\;2700\;erg/cm^{3}$) than $Ni_{80}Fe_{20}$. The $Si/SiO_{2}/Ta$ 45/Ru 9.5/IrMn 10/CoFe $7/AlO_{x}/CoFeSiB\;(t)/Ru\;60\;(in\;nanometers)$structure was found to be beneficial for the switching characteristics of the MTJ, leading to a reduction in the coercivity ($H_{c}$) and an increase in the sensitivity resulted from its lower saturation magnetization and higher uniaxial anisotropy. Furthermore, by inserting a very thin CoFe layer at the tunnel barrier/NiFeSiB interface, the TMR ratio and switching squareness were improved more with the increase of NiFeSiB layer thickness up to 11 nm.

• Food Science and Preservation
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• v.13 no.5
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• pp.538-542
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• 2006

Physicochemical properties and positional distribution of Hallabong Tangor (Citrus Kiyomi ${\times}$ ponkan) cultivated in heated greenhouse were investigated. About 90% of Hallabong produce fruit within the range of $250{\sim}400g$ fruit weight on a tree, larger fruits were mainly consisted of $400{\sim}450g$ in M16A, a variant species of Hallabong, due to younger tree and fruit thinning. Nevertheless fruit sizes of M16A were larger than Hallabong, and peel thickness of M16A (3.29 mm) was thinner than that of Hallabong (3.51 mm). Hardness of m6h was 994.69g-force, compared to 832.8 g-force of Hallabong on the average. Soluble solids and acid content of Hallabong were $12.20{\sim}12.98^{\circ}Brix$ and $1.08{\sim}1.14%$, while those of M16A were $1.48{\sim}12.63^{\circ}Brix$ and $0.92{\sim}1.00%$, respectively. Vitamin C content of Hallabong was $71.30{\sim}78.77 mg/100 g$, compared to $64.40{\sim}68.01mg/100g$ in M16A. Soluble solid in the part of stem was lower than that of end part among the same segment. Fruit size in the upper part of the tree was larger, the peel was thicket and flesh ratio was lower than the middle or lower part. However, soluble solids and acid content were high, due to cumulative sunshine during cultivation.

• Journal of the Ergonomics Society of Korea
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• v.27 no.4
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• pp.37-44
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• 2008

To design the cockpit of Korean helicopter, anthropometric data for Korean helicopter pilots as a target population is necessary. The present study measured the body sizes of Korean helicopter pilots to design the cockpit of Korean helicopter, and compared the measurements with those of Korean civilian and the US Army. The sample size was 100 which determined by a statistical analysis. Anthropometric measurements were collected for 100 samples (male = 94, female = 6; age group = 20~40) of Korean helicopter pilots by applying standard measurement protocol. To compare three anthropometric data, Korean civilian and US Army data were controlled by considering age group (20~40) and gender ratio (male: female = 9:1) of Korean helicopter pilots. The average body sizes of Korean helicopter pilots were mostly similar to those of Korean civilian, however, lower limb related variables (hip breadth, popliteal height and thigh clearance) and shoulder-to-elbow length were significantly greater (1~7%) at α=0.05. Furthermore, the average body sizes for Korean helicopter pilots regarding lower limb length and thickness were significantly smaller than those of the US Army (1~12%); however, the average body sizes for Korean helicopter pilots regarding upper body related variables (sitting height, sitting eye height, and acromial height) and hip breadth were significantly greater (0.7~1.9%). Lastly, size variability for Korean helicopter pilots was significantly smaller than those of Korean civilian and the US Army. Anthropometric data for Korean helicopter pilots of the present study was applied to design and evaluate a Korean helicopter cockpit.

• Polymer(Korea)
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• v.36 no.2
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• pp.216-222
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• 2012

We synthesized microcapsule absorbent with crosslinked poly(styrene-$alt$-maleic anhydride) (PSMA) as a core and PSMA as a shell by a precipitation polymerization method for the delayed absorption of excess water in cement mortar. cPSMA-PSMAs with core-shell structure were synthesized with ratios of 1/1, 1/2 and 1/3 as core monomer mass to shell monomer mass to control shell thickness. We observed the hydrolysis of PSMA in cement-saturated aqueous solution by a FTIR spectrometer. We observed good core-shell structure microcapsules for 1/2(cPSMA #3), but observed incomplete core-shell structure for 1/1(cPSMA #2) and 1/3(cPSMA #4) of core/shell monomer ratios. The swelling ratio of cPSMA #3 in cement-saturated aqueous solution was increased until 20 min. After that it was decreased until 2 hrs swelling time, and they started to increase again. The viscosities of cement paste with cPSMA #3 microcapsules were very slowly increased until 1 hr and increased fast after 1.5 hrs. Cement mortar with 0.5 wt% cPSMA #1 having only core part showed about 5% increase in compressive strength compared to that of plain cement mortar. cPSMA #3 added cement mortar showed the highest compressive strength with 7% increase.