• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• 한국공작기계학회논문집
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• 제13권4호
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• pp.44-55
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• 2004

In order to meet the requirement for higher thickness accuracy in tandem cold rolling processes, it is strongly necessary to have good performance in control units. To meet this requirement, this paper suggested an output regulating control system with a roll-eccentricity estimator for each rolling stand of tandem cold mills. Considering entry thickness variation and roll eccentricity simultaneously as the major disturbances, a synthesis of multivariable control systems was presented based on H$\infty$ control theory, which could reflect the knowledge of input direction and spectrum of disturbance signals on design. Then, to effectively reject roll eccentricity, a weight function having some poles on the imaginary axis was introduced. This lead to a non-standard H$\infty$ control problem, and the design procedures for solving this problem were analytically presented. The effectiveness of the proposed control method was evaluated through computer simulations and compared to that of the conventional linear quardratic control and feedforward control methods for roll eccentricity.

• Journal of Mechanical Science and Technology
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• 제18권1호
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• pp.45-54
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• 2004

In order to meet the requirement for higher thickness accuracy in cold rolling processes, it is strongly desired to have high performance in control units. To meet this requirement, we have considered an output regulating control system with a roll-eccentricity estimator for each rolling stand of tandem cold mills. Considering entry thickness variation as well as roll eccentricity as the major disturbances, a synthesis of multivariable control systems is presented based on H$\sub$$\infty$/ control theory, which can reflect the knowledge of input direction and spectrum of disturbance signals on the design. Then, to reject roll eccentricity effectively, a weight function having some poles on the imaginary axis is introduced. This leads to a non-standard H_ control problem, and the design procedures for solving this problem are analytically presented. The effectiveness of the proposed control method is evaluated through computer simulations and compared to that of the conventional LQ control and feedforward control methods for roll eccentricity.

• Structural Engineering and Mechanics
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• 제48권6호
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• pp.791-807
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• 2013

Ultra High Performance Cementitious Composites with compressive strength 200MPa (UHPCC-200) is proposed for the structural design of super high hybrid wind turbine tower to gain durability, ductility and high strength design objectives. The minimal wall thickness is analyzed using basic bending and compression theory and is modified by a toque influence coefficient. Two cases of wall thickness combination of middle and bottom segment including varied ratio and constant ratio are considered within typical wall thickness dimension. Using nonlinear finite element analysis, the effects of wall thickness combinations with varied and constant ratio and prestress on the structural stress and lateral displacement are calculated and analyzed. The design limitation of the segmental wall thickness combinations is recommended.

• 한국전문물리치료학회지
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• 제26권1호
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• pp.28-36
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• 2019

Background: Temporomandibular disorder (TMD) is characterized by pain and limited range of motion in the jaw. TMD patients generally prefer to chew on the unaffected or less-affected side, and this tendency often results in asymmetries in masseter muscle thickness and range of mandibular motion. Objects: The purpose of this study was to compare the asymmetries in masseter muscle thickness and range of mandibular motion in subjects with and without temporomandibular disorders. Methods: Thirty-nine subjects were divided into two groups: A TMD group ($n_1=19$) and a control group ($n_2=20$). The jaw opening range and laterotrusion were measured using a digital vernier caliper. The masseter muscle thickness was examined in both the resting state and the maximal clenching state using ultrasonography. The absolute asymmetry indices calculated based on the laterotrusion and masseter muscle thickness of the respective right and left sides. A two-way ANOVA and a Mann-Whitney U test were used for statistical analysis. Results: No significant different was found in the masseter muscle thickness between the TMD and control group. A significant difference was found in the absolute asymmetry indices of mandibular laterotrusion between the TMD and control groups (p<.05). Furthermore, the ranges of jaw opening were significantly different between males and females (p<.05). The absolute asymmetry index values of masseter muscle thickness at rest and during maximal clenching were also significantly different between males and females (p<.05). Conclusion: These results demonstrated that the subjects with TMD had a larger degree of asymmetry in laterotrusion than those without TMD. Therefore, a physiotherapy program needs to be designed to restore normal laterotrusion capacities for TMD subjects. These results also showed that female subjects had greater absolute asymmetry indices in masseter muscle thickness than male subjects. Therefore, more training is needed to promote bilaterally balanced chewing among women.

• 대한간호학회지
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• 제33권3호
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• pp.405-413
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• 2003

Purpose: This study was performed to investigate effects of behavior modification on obesity index, skinfold thickness, body fat, serum lipids, serum leptin in obese elementary school children. Method: Forty seven students were selected from two elementary schools. Twenty four children in one school were assigned to experimental group and twenty three children in another school were assigned to control group. Experimental group was received 60～70 minutes of behavior modification once a week for 8 weeks. Result: Obesity index of the experimental group was significantly decreased after behavior modification. But there was no significant difference between two groups. The increase of skin fold thickness was significantly low in the experimental group compared to the control group. Percentage of body fat and fat mass were significantly decreased in the experimental group. Fat free mass was significantly increased in the experimental group. HDL-C, triglyceride and serum leptin between the experimental group and control group showed no significant difference. Conclusion: These results indicate that behavior modification is effective in decreasing percentage of body fat and fat mass, in less increasing skinfold thickness and in increasing fat free mass. In conclusion, behavior modification can be used as effective strategy for managing obesity in elementary school children.

• 한국전문물리치료학회지
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• 제18권3호
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• pp.8-15
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• 2011

Abdominal muscle plays a crucial role in postural control and respiration control. However, thickness of abdominal muscle in the paretic side of a hemiplegic patient has not been reported in previous studies. The purpose of this research was to compare lateral abdominal muscle thickness between the nonparetic and paretic side in patients with chronic stroke using rehabilitative ultrasound imaging. Twenty two patients with chronic stroke participated in this study. Absolute thickness of transversus abdominis (TrA), internal oblique (IO) and external oblique (EO) was measured at the end of inspiration and expiration during quiet breathing, and relative thickness was calculated (thickness of each muscle as a percentage of total muscle thickness). Ultrasound imaging was recorded three times and the average value was determined for statistical analysis. Differences in absolute and relative lateral abdominal muscle thickness between the nonparetic and paretic side were assessed with paired t-tests. Absolute muscle thickness of the paretic side TrA was thinner than that of the nonparetic side at the end of inspiration and expiration during quiet breathing. Relative muscle thickness of the paretic side TrA was thinner than the paretic side only at the end of expiration during quiet breathing (p>.05). Therefore, it is necessary to strength TrA in patients with chronic stroke during physical therapy intervention. Further study is needed whether physical therapy intervension will induce TrA thickness in patients with chronic stroke in prospective study design.

• 산업경영시스템학회지
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• 제38권3호
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• pp.21-28
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• 2015

As film products are increasingly used in a wide range of areas, from producing traditional flexible packaging to high-tech electronic products, a higher level of quality is demanded. Most film products are made in the form of rolled finished goods, therefore, various quality issues related to their shape characteristics must be addressed. The thickness of the film products is one of the most common and important critical-to-quality attributes (CTQs). Particularly, the degree of thickness uniformity is more important than other thickness parameters, because it will be potential causes of many secondary thickness-related quality problems, such as wrinkles or faulty windings. To control the degree of thickness uniformity, the fixed bending region is oneof the most important CTQs to manage. Fixed bending regions are special points in the transverse direction of a rolled product with consistent minute variations of the thickness gap. This paper describes the measurement and analysis of thickness uniformity data, which were performed in a real manufacturing field of biaxial oriented polypropylene (BOPP) film. In previous researches, quality function deployment (QFD) or fault tree analysis were used to find the most critical process attributes out to controlthe CTQ of thickness uniformity. Whereas, this paper uses traditional control charts to find the most critical process attributes out in this problem. In addition, the selection of one of the major critical process attributes (CTPs) that is expected to affect the CTQ of thickness uniformity is also described. The selected critical-to-process attributes are the controlled temperatures along the transverse direction. A dramatic improvement in thickness uniformity was observed when the selected CTPs were controlled.

• 한국정밀공학회지
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• 제12권7호
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• pp.114-122
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• 1995

A digital preview controller is designed for tandem cold mills to achieve a more improvement of the thickness accuracy. Simultaneously a blocked noninteracting controller is synthesized for rejecting the interactive effects among adjacent stands and for controlling independently each roll stand of tandem cold mills. The performance effects and characteristics of the suggested roll contol system are discussed in the practical viewpoint. The simulaltion results show that the thickness accuracy of tandem cold mills can be largely improved by the blocked noninteracting and digital preview controller.

• 설비공학논문집
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• 제23권1호
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• pp.54-60
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• 2011

Procedures for estimation of insulation thickness for a horizontal pipe for condensation control or personnel protection has been investigated, parallel to the previous work of a vertical wall case. Parameters include pipe diameter, emissivity, thermal conductivity, and operating temperatures. The results indicated that the surface emissivity plays a very important role in the design of insulation, specially for the case of high temperature application with low Bi. The effect of surface radiation in such case could be up to 65% of the total. Required insulation thickness for the surface temperature control increases as pipe diameter increases and as surface emissivity decreases. Adequate revision of specifications or standards to include newly invented insulation materials with high emissivity has been also suggested.