• 제목/요약/키워드: Thick films

검색결과 944건 처리시간 0.033초

Li 도핑된 NiO 합성 및 열전식 수소센서에의 적용 (Synthesis of Li-doped NiO and its application of thermoelectric gas sensor)

  • 한치환;한상도;김병권
    • 한국수소및신에너지학회논문집
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    • 제16권2호
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    • pp.136-141
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    • 2005
  • Li-doped NiO was synthesized by molten salt method. $LiNO_3$-LiOH flux was used as a source for Li doping. $NiCl_2$ was added to the molten Li flux and then processed to make the Li-doped NiO material. Li:Ni ratios were maintained from 5:1 to 30:1 during the synthetic procedure and the Li doping amount of synthesized materials were found between 0.086-0.190 as a Li ion to Ni ion ratio. Li doping did not change the basic cubic structural characteristics of NiO as evidenced by XRD studies, however the lattice parameter decreased from 0.41769nm in pure NiO to 0.41271nm as Li doping amount increased. Hydrogen gas sensors were fabricated using these materials as thick films on alumina substrates. The half surface of each sensor was coated with the Pt catalyst. The sensor when exposed to the hydrogen gas blended in air, heated up the catalytic surface leaving rest half surface (without catalyst) cold. The thermoelectric voltage thus built up along the hot and cold surface of the Li-doped NiO made the basis for detecting hydrogen gas. The linearity of the voltage signal vs $H_2$ concentration was checked up to 4% of $H_2$ in air (as higher concentrations above 4.65% are explosive in air) using Li doped NiO of Li ion/Ni ion=0.111 as the sensor material. The response time T90 and the recovery time RT90 were less than 25 sec. There was minimum interference of other gases and hence $H_2$ gas can easily be detected.

전도성 AFM 탐침에 의한 YBa2Cu3O7-x 스트립 라인의 산화피막 형성 (Anodization Process of the YBa2Cu3O7-x Strip Lines by the Conductive Atomic Force Microscope Tip)

  • 고석철;강형곤;임성훈;한병성;이해성
    • 한국전기전자재료학회논문지
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    • 제17권8호
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    • pp.875-881
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    • 2004
  • Fundamental results obtained from an atomic force microscope (AFM) chemically-induced direct nano-lithography process are presented, which is regarded as a simple method for fabrication nm-scale devices such as superconducting flux flow transistors (SFFTs) and single electron tunneling transistors (SETs). Si cantilevers with Pt coating and with 30 nm thick TiO coating were used as conducting AFM tips in this study. We observed the surfaces of superconducting strip lines modified by AFM anodization' process. First, superconducting strip lines with scan size 2 ${\mu}{\textrm}{m}$${\times}$2 ${\mu}{\textrm}{m}$ have been anodized by AFM technology. The surface roughness was increased with the number of AFM scanning, The roughness variation was higher in case of the AFM tip with a positive voltage than with a negative voltage in respect of the strip surface. Second, we have patterned nm-scale oxide lines on ${YBa}-2{Cu}_3{O}_{7-x}$ superconducting microstrip surfaces by AFM conductive cantilever with a negative bias voltage. The ${YBa}-2{Cu}_3{O}_{7-x}$ oxide lines could be patterned by anodization technique. This research showed that the critical characteristics of superconducting thin films were be controlled by AFM anodization process technique. The AFM technique was expected to be used as a promising anodization technique for fabrication of an SFFT with nano-channel.

압전박막을 이용한 감압전장효과 트랜지스터(PSFET)의 동작 특성 (The Operational Characteristics of a Pressure Sensitive FET Sensor using Piezoelectric Thin Films)

  • 양규석;조병욱;권대혁;남기홍;손병기
    • 센서학회지
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    • 제4권2호
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    • pp.7-13
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    • 1995
  • MOSFET의 전장효과와 압전물질의 압전효과를 결합한 새로운 FET형 반도체압력소자(PSFET : pressure sensitive field effect transistor)를 제조하고 동작 특성을 조사하였다. PSFET의 압전박막은 RF 마그네트론 스퍼터링으로 ZnO박막을 약 $5000{\AA}$ 게이트 위에 성막하였다. ZnO 압전박막의 최적 c-축 배향분극 구조를 얻기 위한 막 제조조건은 기판온도가 $300^{\circ}C$, RF 전력이 140W, 작업 분위기압은 5mtorr였으며, 플라즈마가스는 아르곤이었다. 제조된 PSFET는 적용된 압력범위($1{\times}10^{5}\;Pa{\sim}4{\times}10^{5}\;Pa$)에서 비록 감도는 낮으나 비교적 안정한 동작특성을 나타내었다.

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고온초전도 헤어핀 콤 여파기의 급전 구조에 관한 연구 (A Study on the Feeding Structure of the High-Temperature Superconducting Hairpin-comb Filter)

  • 윤석순;박익모;민병철;최영환;문승현;이승민;오병두
    • 전자공학회논문지D
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    • 제36D권12호
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    • pp.11-20
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    • 1999
  • 직접 결합과 사이 결합을 이용하여 신호를 인가하는 두 가지 경우의 마이크로스트립 헤어핀 콤 여파기를 직경 50 mm, 두께 0.5 mm인 하나의 $LaAlO_3$ 기판 위에 양면 증착한 YBCO 박막을 이용하여 설계 제작하였다. 두 가지 헤어핀 콤 여파기 모두 중심 주파수가 1.773 GHz 이였고, 대역폭이 12 MHz 이었으며, 통과 대역에서 최소 삽입 손실이 0.5 dB 이었고, 저지 대역에서는 매우 강한 반사 손실 특성을 지니고 있었다. 직접 결합 헤어핀 콤 여파기는 통과 대역 아래쪽과 위쪽에 감쇠 폴이 생겼으나, 사이 결합 헤어핀 콤 여파기는 통과 대역 아래쪽에서만 감쇠 폴이 존재하였다. 따라서 직접 결합 헤어핀 콤 여파기가 사이 결합 헤어핀 콤 여파기에 비해서 더 좋은 스커트 특성을 보여주었다.

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나노 Indium을 부착한 ZnO:In 가스센서의 제작 및 특성 (Characteristics and Preparation of Gas Sensor Using Nano Indium Coated ZnO:In)

  • 정종훈;유윤식;유일
    • 한국재료학회지
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    • 제21권9호
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    • pp.486-490
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    • 2011
  • Nano-indium-coated ZnO:In thick films were prepared by a hydrothermal method. ZnO:In gas sensors were fabricated by a screen printing method on alumina substrates. The gas sensing properties of the gas sensors were investigated for hydrocarbon gas. The effects of the indium concentration of the ZnO:In gas sensors on the structural and morphological properties were investigated by X-ray diffraction and scanning electron microscopy. XRD patterns revealed that the ZnO:In with wurtzite structure was grown with (1 0 0), (0 0 2), and (1 0 1) peaks. The quantity of In coating on the ZnO surface increased with increasing In concentration. The sensitivity of the ZnO:In sensors was measured for 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air with that in target gases. The highest sensitivity to $CH_4$ gas and $CH_3CH_2CH_3$ gas of the ZnO:In sensors was observed at the In 6 wt%. The response and recovery times of the 6 wt% indiumcoated ZnO:In gas sensors were 19 s and 12 s, respectively.

열처리와 In 중간층 적용에 의한 CBD-In2S3/CIGS 태양전지의 특성 향상 (Annealing and In Interlayer Effects on the Photovoltaic Properties of CBD-In2S3/CIGS Solar Cells)

  • 김희섭;김지혜;신동협;안병태
    • 한국재료학회지
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    • 제21권8호
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    • pp.432-438
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    • 2011
  • In this study, chemical bath deposited (CBD) indium sulfide buffer layers were investigated as a possible substitution for the cadmium sulfide buffer layer in CIGS thin film solar cells. The performance of the $In_2S_3$/CIGS solar cell dramatically improved when the films were annealed at $300^{\circ}C$ in inert gas after the buffer layer was grown on the CIGS film. The thickness of the indium sulfide buffer layer was 80 nm, but decreased to 60 nm after annealing. From the X-ray photoelectron spectroscopy it was found that the chemical composition of the layer changed to indium oxide and indium sulfide from the as-deposited indium hydroxide and sulfate states. Furthermore, the overall atomic concentration of the oxygen in the buffer layer decreased because deoxidation occurred during annealing. In addition, an In-thin layer was inserted between the indium sulfide buffer and CIGS in order to modify the $In_2S_3$/CIGS interface. The $In_2S_3$/CIGS solar cell with the In interlayer showed improved photovoltaic properties in the $J_{sc}$ and FF values. Furthermore, the $In_2S_3$/CIGS solar cells showed higher quantum efficiency in the short wavelength region. However, the quantum efficiency in the long wavelength region was still poor due to the thick buffer layer.

Bone-like Apatite Morphology on Si-Zn-Mn-hydroxyapatite Coating on Ti-6Al-4V Alloy by Plasma Electrolytic Oxidation

  • Park, Min-Gyu;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.158-158
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    • 2017
  • Titanium and its alloys have been used in the field dental and orthopedic implants because of their excellent mechanical properties and biocompatibility. Despite these attractive properties, their passive films were somewhat bioinert in nature so that sufficient adhesion of bone cells to implant surface was delayed after surgical treatment. Recently, plasma electrolyte oxidation (PEO) of titanium metal has attracted a great deal of attention is a comparatively convenient and effective technique and good adhesion to substrates and it enhances wear and corrosion resistances and produces thick, hard, and strong oxide coatings. Silicon(Si), Zinc(Zn), and Manganese(Mn) have a beneficial effect on bone. Si in particular has been found to be essential for normal bone and cartilage growth and development. And, Zn has been shown to be responsible for variations in body weight, bone length and bone biomechanical properties. Also, Mn influences regulation of bone remodeling because its low content in body is connected with the rise of the concentration of calcium, phosphates and phosphatase out of cells. The objective of this work was research on bone-like apatite morphology on Si-Zn-Mn-hydroxyapatite coating on Ti-6Al-4V alloy by plasma electrolytic oxidation. Anodized alloys were prepared at 280V voltage in the solution containing Si, Zn, and Mn ions. The surface characteristics of PEO treated Ti-6Al-4V alloy were investigated using XRD, FE-SEM, and EDS.

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DIC 법을 이용한 구리박막의 인장시험 (Tensile Tests for Copper Thin Foils by Using DIC Method)

  • 김정엽;송지호;박경조
    • 대한기계학회논문집A
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    • 제36권12호
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    • pp.1529-1534
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    • 2012
  • 본 연구에서는 DIC 법을 이용하여 두께 $12{\mu}m$ 의 구리박막에 대한 인장시험을 수행하였다. 시험결과 정밀한 응력-변형률 곡선의 시험결과를 얻을 수 있었으며, 특히 잉크젯프린터를 이용한 시험편 표면 스펙클패턴의 작성은 DIC 법을 적용하기가 어려운 시험편 표면의 콘트라스트가 낮은 경우에 유용하게 사용할 수 있을 것이다. 측정된 구리박막의 기계적 물성은 탄성계수 E = 89.2 GPa, 0.2% 오프셋 항복응력 $S_{0.2%}$= 232.8 MPa, 인장강도 $S_u$= 319.2 MPa, 파단연신률 ${\varepsilon}_f$= 16.8 %, Poisson 비 ${\nu}$= 0.34 의 결과를 얻었으며, 탄성계수는 알려진 벌크소재에 대한 결과보다는 작다.

Influence of high energy electron beam treatment on the photocatalytic activity of $TiO_2$ nanoaparticles on carbon fiber

  • 심채원;김명주;서현욱;김광대;닐로이 쿠마르 데;김동운;남종원;정명근;이병철;박지현;김영독
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.441-441
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    • 2011
  • $TiO_2$ nanoparticles were grown on carbon fiber by atomic later deposition (ALD) with TTIP $(Ti(OCH(CH_3)_2)_4$ and $H_2O$ precusors. After sampe surfaces were treated by electron beam (1 MeV, 5 KGy), an improvement in the photocatalytic reacitivity of $TiO_2$ nanoparticles on carbon fiber was observed. An increase in the population of hydroxyl group on $TiO_2$ particles and the oxidation of carbon fiber were found upon e-beam exposure, whereas there was no noticeable changes of their morphology. It implies that those changes in O and C 1s state of $TiO_2$ particles/carbon fiber induced by e-beam treatment could be related to the enhancement of the photocatalytic activity. In contrast, when carbon fiber fully covered with $TiO_2$ thick films was treated with high-energy electron beam under same conditions, the improvement of photocatalytic activity as well as any changes in XPS spectra (Ti 2p, O 1s and C 1s) could not be found.

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비진공법 CuInSe2 태양전지에서 MoSe2의 생성을 억제하기 위한 산화 몰리브데늄 확산장벽 층 (Molybdenum Oxides as Diffusion Barrier Layers against MoSe2 Formation in A Nonvacuum Process for CuInSe2 Solar Cells)

  • 이병석;이도권
    • Current Photovoltaic Research
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    • 제3권3호
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    • pp.85-90
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    • 2015
  • Two-step processes for preparing $Cu(In,Ga)Se_2$ absorber layers consist of precursor layer formation and subsequent annealing in a Se-containing atmosphere. Among the various deposition methods for precursor layer, the nonvacuum (wet) processes have been spotlighted as alternatives to vacuum-based methods due to their potential to realize low-cost, scalable PV devices. However, due to its porous nature, the precursor layer deposited on Mo substrate by nonvacuum methods often suffers from thick $MoSe_2$ formation during selenization under a high Se vapor pressure. On the contrary, selenization under a low Se pressure to avoid $MoSe_2$ formation typically leads to low crystal quality of absorber films. Although TiN has been reported as a diffusion barrier against Se, the additional sputtering to deposit TiN layer may induce the complexity of fabrication process and nullify the advantages of nonvacuum deposition of absorber film. In this work, Mo oxide layers via thermal oxidation of Mo substrate have been explored as an alternative diffusion barrier. The morphology and phase evolution was examined as a function of oxidation temperature. The resulting Mo/Mo oxides double layers were employed as a back contact electrode for $CuInSe_2$ solar cells and were found to effectively suppress the formation of $MoSe_2$ layer.