• Title/Summary/Keyword: Thick Oxidation

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MR Characteristics of $Al_2O_3$ Based Magnetic tunneling Junction ($Al_2O_3$를 절연층으로 이용한 스핀 의존성 터널링 접합에서의 자기저항 특성)

  • 정창욱;조용진;정원철;조권구;주승기
    • Journal of the Korean Magnetics Society
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    • v.10 no.3
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    • pp.118-122
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    • 2000
  • MR characteristics of $Al_2$ $O_3$ based magnetic tunneling juction with various $Al_2$ $O_3$ thicknesses were investigated. Spin-dependent tunneling junctions, in which the tunneling barrier $Al_2$ $O_3$ is formed by depositing a 1-3 nm thick Al layer, followed by thermal oxidation at room temperature in an $O_2$atmosphere, were fabricated on 4$^{\circ}$tilt(111)Si substrate in 3-gun magnetron sputtering system. The top and bottom ferromagnetic electrodes were Ni$_{80}$Fe$_{20}$ and Co. A maximum Tunneling MR ratio of 14% was obtained in the junction of which insulating barrier thickness was 2 nm. By increasing the tunneling voltage across the junction, maximum MR ratio reduced and finally showed no MR characteristics.s.

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Effect of Boron Carbide on the Morphology of SiC Conversion Layer of Graphite Substrate formed by Chemical Vapor Reaction (화학기상반응으로 흑연 위에 만든 SiC 반응층의 모양에 미치는 보론 카바이드의 영향)

  • Hong, Hyun-Jung;Riu, Doh-Hyung;Cho, Kwang-Youn;Kong, Eun-Bae;Shin, Dong-Geun;Shin, Dae-Kyu;Lee, Jae-Sung
    • Journal of the Korean Ceramic Society
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    • v.44 no.8
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    • pp.445-450
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    • 2007
  • A conversion layer of SiC was fabricated on the graphite substrate by a chemical vapor reaction method in order to enhance the oxidation resistance of graphite. The effect of boron carbide containing powder bed on the morphology of SiC conversion layer was investigated during the chemical vapor reaction of graphite with the reactive silicon-source at $1650^{\circ}C\;and\;1700^{\circ}C$ for 1 h. The presence of boron species enhanced the conversion of graphite into SiC, and altered the morphology of the conversion layer significantly as well. A continuous and thick SiC conversion layer was formed only when the boron source was used with the other silicon compounds. The boron is deemed to increase the diffusion of SiOx in SiC/C system.

A Dual Micro Gas Sensor Array with Nano Sized $SnO_2$ Thin Film (나노 박막을 이용한 듀얼 $SnO_2$ 마이크로 가스센서 어레이)

  • Chung Wan-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.9
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    • pp.1641-1647
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    • 2006
  • A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

Fabrication of SiC Schottky Diode with Field oxide structure (Field Oxide를 이용한 고전압 SiC 쇼트키 diode 제작)

  • Song, G.H.;Bahng, W.;Kim, S.C.;Seo, K.S.;Kim, N.K.;Kim, E.D.;Park, H.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.350-353
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    • 2002
  • High voltage SiC Schottky barrier diodes with field plate structure have been fabricated and characterized. N-type 4H-SiC wafer with an epilayer of ∼10$\^$15/㎤ doping level was used as a starting material. Various Schottky metals such as Ni, Pt, Ta, Ti were sputtered and thermally-evaporated on the low-doped epilayer. Ohmic contact was formed at the backside of the SiC wafer by annealing at 950$^{\circ}C$ for 90 sec in argon using rapid thermal annealer. Field oxide of 550${\AA}$ in thickness was formed by a wet oxidation process at l150$^{\circ}C$ for 3h and subsequently heat-treated at l150$^{\circ}C$ for 30 min in argon for improving oxide quality. The turn-on voltages of the Ni/4H-SiC Schottky diode was 1.6V which was much higher than those of Pt(1.0V), Ta(0.7V) and Ti(0.7). The voltage drop was measured at the current density of 100A/$\textrm{cm}^2$ showing 2.1V for Ni Schottky diode, 1.45V for Pt 1.35V, for Ta, and 1.25V for Ti, respectively. The maximum reverse breakdown voltage was measured 1100V in the file plated Schottky diodes with 101an thick epilayer.

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Properties of the oxynitride films prepared by reoxidation of thermal oxide in $N_2O$ ($N_2O$ 가스에서 열산화막의 재산화에 의해 형성된 oxynitride막의 특성)

  • Bae, Sung-Sig;Lee, Cheol-In;Choi, Hyun-Sik;Seo, Yong-Jin;Kim, Tae-Hyung;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.05a
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    • pp.39-43
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    • 1993
  • Electricial characteristics of gate dielectrics prepared by reoxidation of thermal $SiO_2$ in nitrous oxide gas have been investigated. 10 and 19nm-thick oxides were reoxidized at temperatures of $900-1000^{\circ}C$ for 10-60 min in $N_2O$ ambient. As reoxidation proceeds, it is shown that nitrogen concentration at $Si/SiO_2$ interface increases gradually through the AES analysis. Nitrogen pile-up at $Si/SiO_2$ interface acts as a oxidant diffusion barrier that reduces the oxidation rate significantly. And it not only strengthen oxynitride structure at the interface but improve the gate dielectric qualities. Reliabilities of oxynitride films are conformed by the breakdown distributions and constant current stress technique. Therefore, the oxynitride films made by this process show a good promise for future ULSI applications.

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Hardness and microstructural changes by cooling rate and holding time during porcelain firing of a multi-purpose dental gold alloy (다목적용 치과용 금합금의 소성 시 냉각속도와 계류시간에 따른 경도와 미세구조의 변화)

  • Cho, Mi-Hyang
    • Journal of Technologic Dentistry
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    • v.33 no.4
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    • pp.271-281
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    • 2011
  • Purpose: The aim of this study is to investigate the changes in hardness and microstructure of a dental multipurpose alloy after simulated complete firing with controlled cooling rate and holding time by characterizing the changes in hardness and microstructure after simulated firing with various cooling rates and holding times. Methods: Before hardness testing, the specimens were solution treated and then were rapidly quenched into ice brine. The specimens were completely fired in furnace. Hardness measurements were made using a Vickers microhardness tester. The specimens were examined at 15 kV using a field emission scanning electron microscope. Results: The maximum hardness value was obtained at stage 0 after simulated firing with various cooling rates (quick cooling, stage 0, stage 1, stage 2, stage 3). By the repetitive firing, the hardness of the tested alloy decreased gradually. By holding the specimen at $500^{\circ}C$ for 10-20min after simulated firing, the hardness increased apparently. However, to hold the alloy for long periods of time in the relatively high temperature after simulated firing resulted in the formation of thick oxidation layer. The oxide film formed on the surface of the alloy after simulated complete firing with controlled cooling rate, which was mainly composed of O and Zn. Conclusion: It is reasonable to hold the alloy at $500^{\circ}C$ for 10-20min after complete firing in other to improve the final hardness of the alloy.

A Study on the Alternative Method for Weathering Test of Military Coated Fabrics (군용 도포직물의 내후성시험 대체에 대한 연구)

  • Son, Chanyoung
    • Journal of Korean Society for Quality Management
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    • v.44 no.3
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    • pp.509-526
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    • 2016
  • Purpose: We would like to find the alternative method for the weathering test on rubber coated fabrics and adhesive-coated fabrics for the military products, KS M 0706 (Sunshine carbon arc) to KS M ISO 4892-2 (Xenon arc). Methods: We measured the tensile strength of adhesive-coated fabrics and adhesive products treated with sunshine carbon arc and xenon arc during 100, 150 and 200 hours, respectively. All of the results were treated with statistical test, ANOVA method. We also validate the surface modifications caused by treatment method and time by using FT-IR ATR and, SEM. Results: In case of the thick adhesive-coated fabrics (app. 1 mm), there was no distinctive difference on tensile strength by treatment method and time. In case of the thin mask hood (app. 0.22 mm) and TENT (app. 0.5 mm), there was distinctive difference on tensile strength. Especially, carbon arc showed a huge lowering properties. We could validate the curing from light and moisture, and the functional group change from cross-linking and oxidation using FT-IR ATR. In case of IBS, there was a surface cracks on SEM images. In case of mask hood, there was no distinctive differences, except for a particle falling from decreased affinity between rubber and particles caused by carbon arc. Conclusion: We concluded that there was no problems for changing xenon arc weathering test with same treatment time on IBS, KM7, K21 and adhesive products. In case of TENT and mask hood, there was a difference in tensile strength in accordance with the change of the treated time and method.

Study of Producing Natural Gas From Gas Hydrate With Industrial Flue Gas (산업용 배기가스를 이용한 가스 하이드레이트로부터의 천연가스 생산 연구)

  • Seo, Yu-Taek;Kang, Seong-Pil;Lee, Jae-Goo;Cha, Min-Jun;Lee, Huen
    • 한국신재생에너지학회:학술대회논문집
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    • 2008.10a
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    • pp.188-191
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    • 2008
  • There have been many methods for producing natural gas from gas hydrate reservoirs in permafrost and sea floor sediments. It is well knownthat the depressurization should be a best option for Class 1 gas hydrate deposit, which is composed of tow layers: hydrate bearing layer and an underlying free gas. However many of gas hydrate reservoirs in sea floor sediments are classified as Class 2 that is composed of gas hydrate layer and mobile water, and Class 3 that is a single gas hydrate layer. The most appropriate production methods among the present methods such as thermal stimulation, inhibitor injection, and controlled oxidation are still under development with considering the gas hydrate reservoir characteristics. In East Sea of Korea, it is presumed that the thick fractured shale deposits could be Class 2 or 3, which is similar to the gas hydrate discovered offshore India. Therefore it is needed to evaluate the possible production methods for economic production of natural gas from gas hydrate reservoir. Here we would like to present the production of natural gas from gas hydrate deposit in East Sea with industrial flue gases from steel company, refineries, and other sources. The existing industrial complex in Gyeongbuk province is not far from gas hydrate reservoir of East Sea, thus the carbon dioxide in flue gas could be used to replace methane in gas hydrate. This approach is attractive due to the suggestion of natural gas productionby use of industrial flue gas, which contribute to the reduction of carbon dioxide emission in industrial complex. As a feasibility study, we did the NMR experiments to study the replacement reaction of carbon dioxide with methane in gas hydrate cages. The in-situ NMR measurement suggeststhat 42% of methane in hydrate cages have been replaced by carbon dioxide and nitrogen in preliminary test. Further studies are presented to evaluate the replacement ratio of methane hydrate at corresponding flue gas concentration.

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Influence of high energy electron beam treatment on the photocatalytic activity of $TiO_2$ nanoaparticles on carbon fiber

  • Sim, Chae-Won;Kim, Myeong-Ju;Seo, Hyeon-Uk;Kim, Gwang-Dae;;Kim, Dong-Un;Nam, Jong-Won;Jeong, Myeong-Geun;Lee, Byeong-Cheol;Park, Ji-Hyeon;Kim, Yeong-Dok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.441-441
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    • 2011
  • $TiO_2$ nanoparticles were grown on carbon fiber by atomic later deposition (ALD) with TTIP $(Ti(OCH(CH_3)_2)_4$ and $H_2O$ precusors. After sampe surfaces were treated by electron beam (1 MeV, 5 KGy), an improvement in the photocatalytic reacitivity of $TiO_2$ nanoparticles on carbon fiber was observed. An increase in the population of hydroxyl group on $TiO_2$ particles and the oxidation of carbon fiber were found upon e-beam exposure, whereas there was no noticeable changes of their morphology. It implies that those changes in O and C 1s state of $TiO_2$ particles/carbon fiber induced by e-beam treatment could be related to the enhancement of the photocatalytic activity. In contrast, when carbon fiber fully covered with $TiO_2$ thick films was treated with high-energy electron beam under same conditions, the improvement of photocatalytic activity as well as any changes in XPS spectra (Ti 2p, O 1s and C 1s) could not be found.

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Study of High Temperature Corrosion Behavior of Fe-Cr Steel in Sewage Sludge-(SO2-O2-H2O-bal. CO2) mixed Gas Environment (하수슬러지-(SO2-O2-H2O-bal. CO2) 혼합 가스 분위기에서 Fe-Cr 강의 고온부식거동 연구)

  • Kim, Min Jung;Park, Joo Chang;Ryu, In Sun
    • Journal of Surface Science and Engineering
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    • v.53 no.2
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    • pp.72-79
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    • 2020
  • Two Fe-Cr steels of T22 steel and STS430 steel were corroded at 650 and 750℃ for 100hr in sewage sludge-(0.3% SO2-6% O2-10% H2O-balance CO2) mixed gas environment. T22 steel corroded faster than STS430, indicating that the Cr content significantly influence the corrosion rates. T22 formed thick and non-protective Fe2O3 as the major oxide and Fe3O4 as the minor one. With an increase in corrosion temperature, their corrosion rates increased, being accompanied with formation of pores and cracks in the thickened oxide scales that were non-adherent. STS430 steel formed Fe2O3, Fe3O4 as the outer scale and (Fe, Cr)-O as the inner layer by which its corrosion rate is greatly reduced. Both the T22 and STS430 steel samples formed multi-layered scales by outward diffusion of Fe ions and inward diffusion of oxygen and sulfur ions at high-temperature more than 650℃.