• Title/Summary/Keyword: Thermal profile

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Process Control of Titanium Silicide Formation Using RTP (RTP를 사용한 타이타늄 실리사이드 형성의 공정 조절)

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    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.15 no.5
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    • pp.399-405
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    • 1990
  • Rapid Thermal Process(RTP) has been used to precisely control and study the reaction rate for the formation of refractory titanuium silicide. Samples were prepared by sputtering deposition layer of titanium on n-type, poly-deposit silicon wafers. The process were then sujected to a matrix of rapid time-temperature profile under nitrgen, argon gas ambient to precisely control the silicide formation. Reacted films were analyzed by the sheet resistance measursrement, SEM, ASR and X-ray diffraction. Results were shown that the resistivity of the silicide films are below 20u-cm and the thickness of silicide films are about two times than that of as-deposited titanium films. Silicidation ambient was likely to happen at the same tamperature-time condition for argon and nitrogen gas.

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A study on integrated device TaN/$Al_2O_3$ thin film resistor development (TaN/$Al_2O_3$ 집적화 박막 저항소자 개발에 관한 연구)

  • Kim, I.S.;Cho, Y.R.;Min, B.K.;Song, J.S.
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1476-1478
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    • 2002
  • In recent years, the tantalum nitride(TaN) thin-film has been developed for the electronic resistor, inductor and capacitor. In this papers, this study presents the surface profile and sheet-resistance property relationship of reactive-sputtered TaN thin film resistor processed by TaN(tantalum nitride) on alumina substrate. The TCR properties of the TaN films were discussed in terms of crystallization and thin films surface morphology due to annealing temperature. It is clear that the TaN thin-films resistor electrical properties are low TCR related with it's annealing temperature and ambient annealing condition. Respectively, at $300{\sim}400^{\circ}C$ on vacuum and nitrogen annealed thin film resistor having a goof thermal stability and lower TCR properties then as deposited thin films expected for the application to the dielectric material of passive component.

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Characteristics of Surface Hardening for Hot Work Tool Steel using Continuous Wave Nd:YAG Laser (연속파형 Nd:YAG 레이저를 이용한 열간금형 공구강의 표면경화 특성)

  • Shin, Ho-Jun;Shin, Byung-Heon;Yoo, Young-Tae
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.4 s.193
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    • pp.57-67
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    • 2007
  • Laser surface hardening technologies have been used to improve characteristics of wear and to enhance the fatigue resistance fur mold parts. The objective of this research work is to investigate the influence of the process parameters, such as power of laser and defocused spot position, on the characteristics of laser surface hardening for the case of SKD61 steel. CW Nd:YAG laser is selected as the heat source. The optical lens with the elliptical profile is designed to obtain a wide surface hardening area with a uniform hardness. From the results of the experiments, it has been shown that the maximum average hardness is approximatly 780 Hv when the power, focal position and the travel of laser are 1,095 W, 0mm and 0.3 m/min, respectively. In samples treated with lower scanning speeds, some small carbide particles appear in the interdendritic regions. This region contains fine martensite and carbide in proportions which depend on the local thermal cycle.

An Effects of $CO_2$ Addition on Flame Structure in a Non-premixed Counterflow Flame (비예혼합 대향류 화염에서 $CO_2$ 첨가가 화염 구조에 미치는 영향 연구)

  • Lee, Kee-Man
    • Transactions of the Korean Society of Automotive Engineers
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    • v.15 no.3
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    • pp.166-173
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    • 2007
  • A numerical study was conducted to have the effect of $CO_2$ addition to fuel on the chemical reaction mechanism with the change of the initial concentration of $CO_2$ and the axial velocity gradient. From this study, it was found that there were two serious effects of $CO_2$ addition on a non-premixed flame ; a diluent effect by the reactive species reduction and chemical effect of the breakdown of $CO_2$ by the third-body collision and thermal dissociation. Especially, the chemical effect was serious at the lower velocity gradient of the axial flow. It was certain that the mole fraction profile of $CO_2$ was deflected and CO was increased with the initial concentration of $CO_2$. It was also ascertained that the breakdown of $CO_2$ would cause the increasing of CO mole fraction at the reaction region. It was also found that the addition of $CO_2$ did not alter the basic skeleton of $H_2-O_2$ reaction mechanism, but contributed to the formation and destruction of hydrocarbon products such as HCO. The conversion of CO was also suppressed and $CO_2$ played a role of a dilution in the reaction zone at the higher axial velocity gradient.

Shape Optimization of Internally Finned Tube with Helix Angle (나선형 핀이 내부에 부착된 관의 형상최적화)

  • Kim, Yang-Hyun;Ha, Ok-Nam;Lee, Ju-Hee;Park, Kyoung-Woo
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.19 no.7
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    • pp.500-511
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    • 2007
  • The Optimal solutions of the design variables in internally finned tubes have been obtained for three-dimensional periodically fully developed turbulent flow and heat transfer. For a trapezoidal fin profile, performances of the heat exchanger are determined by considering the heat transfer rate and pressure drop, simultaneously, that are interdependent quantities. Therefore, Pareto frontier sets of a heat exchanger can be acquired by integrating CFD and a multi-objective optimization technique. The optimal values of fin widths $(d_1,\;d_2)$, fin height(h) and helix angle$(\gamma)$ are numerical1y obtained by minimizing the pressure loss and maximizing the heat transfer rate within ranges of $d_1=0.5\sim1.5mm$, $d_2=0.5\sim1.5mm$, $h=0.5\sim1.5mm$, and $\gamma=0\sim20^{\circ}$. For this, a general CFD code and a global genetic algorithm(GA) are used. The Pareto sets of the optimal solutions can be acquired after $30^{th}$ generation.

A Numerical Study on the Heat Transfer Characteristics of the Multiple Slot Impinging Jet (다양한 노즐 수 변화에 따른 충돌 제트의 열전달 특성에 관한 수치적 연구)

  • Kim, Sang-Keun;Ha, Man-Yeong;Son, Chang-Min
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.11
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    • pp.754-761
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    • 2011
  • The present study numerically investigates two-dimensional flow and heat transfer in the multiple confined impinging slot jet. Numerical simulations are performed for the different Reynolds numbers(Re=100 and 200) in the range of nozzles from 1 to 9 and height ratios(H/D) from 2 to 5, where H/D is the ratio of the channel height to the slot width. The vector plots of velocity profile, stagnation and averaged Nusselt number distributions are presented in this paper. The dependency of thermal fields on the Reynolds number, nozzle number and height ratio can be clarified by observing the Nusselt number as heat transfer characteristic at the stagnation point and impingement surface. The Nusselt number at the stagnation point of the central slot shows unsteadiness at H/D=3 and Re=200. The value of Nusselt number at the stagnation point of the central slot decreases with higher Reynolds number and number of nozzle although overall area averaged Nusselt number increases. Hence careful selection of geometrical parameters and number of nozzle are necessary for optimization of the heat transfer performance of multiple slot impinging jet.

Numerical Study on Control Factors of Defrosting Performance for Automobile Windshield Glass in Winter (수치해석을 통한 자동차 전면유리 제상성능 제어인자 연구)

  • Youn, Young-Muk;Kader, Md. Faisal;Lee, Kum-Bae;Jun, Yong-Du
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.20 no.12
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    • pp.789-794
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    • 2008
  • Recently, much attention has been paid in the field of defrosting because clear windshield in vehicle without effecting the thermal comfort is realized essentially. Then in winter, defrosting performance is one of the important factors in vehicle design to make certain driver's view. In this study, the velocity profile, temperature distribution and frost melting pattern on the windshield screen have been predicted in three dimensional geometry of an automobile interior. Numerical analyses predict a detailed description of fluid flow and temperature patterns on the inside windshield screen, utilizing the flow through defroster nozzle. Numerical prediction established a good defrosting performance with the standard distance ratio and the defroster nozzle angle ranging from $30^{\circ}$ to $40^{\circ}$, which satisfy the condition of National Highway Traffic Safety Administration (NHTSA) completely.

Calculation of Electron concentration and Electrostatic potential profile for $Al_{x}Gal{-x}As/Ga_{x}In1$_{-x}$As/GaAs HEMT device by 2-Dimensional Quantum Mechanical analysis) (2차원 양자 역학적 해석에 의한 고속 통신용 $Al_{x}Gal{-x}As/Ga_{x}In1$_{-x}$As/GaAs HEMT 소자의 전자 농도 및 전위분포 계산)

  • 송영진;황호정
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.3
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    • pp.76-87
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    • 1993
  • We present a self-consistent, 2-dimensional solution of the Poisson and Sch rodinger equation based on the finite difference method with a nonuniform mesh size for a AlGaAs/GaInAs/GaAs HEMT devide. During the interative self-consistent calculation, however, we calculate Schrodinger equation only a some region of device, not a fully region in order to save the moemory and the speed-up of computation, and then use the approximated data for the other region using by a interpolation method with a given values. Also we adopt the proper matrix transformation method that allows preservation of the symmetric, form of the discretized Schrodinger equation, even with the use of a nonumiform mesh size, therefor, can reduce the computation time. We calculate the wavefunction, eigenstates and the electron concentration uat channel layer nder the thermal equilibrium and the biased conditions, respectively. Also,these parameters are used to solve 2-dimensional tdistribution of potential in he entire region of device. It is proved that the method is very efficient in finding eigenstages extending over relatively large spatial area without loss of accuracy. So, it can be used rather easily in any sarbitrary modulation doped utucture.

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High-Density Quantum Nanostructure for Single Mode Distributed Feedback Semiconductor Lasers by One-Step Growth (단일 공정에 의한 고효율 단일모드 반도체 레이저 구조 제작을 위한 고밀도 양자 나노구조 형성)

  • Son, Chang-Sik;Baek, Jong-Hyeob;Kim, Seong-Il;Park, Young-Ju;Kim, Yong-Tae;Choi, Hoon-Sang;Choi, In-Hoon
    • Korean Journal of Materials Research
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    • v.13 no.8
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    • pp.485-490
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    • 2003
  • We have developed a new way of the constant growth technique to maintain a grating height of originally-etched V-groove of submicron gratings up to 1.5 $\mu\textrm{m}$ thickness by a low pressure metalorganic chemical vapor deposition. The constant growth technique is well performed on two kinds of submicron gratings that made by holography and electron (e)-beam lithography GaAs buffer layer grown on thermally deformed submicron gratings has an important role in recovering the deformed grating profile from sinusoidal to V-shaped by reducing mass transport effects. The thermal deformation effect on submicron gratings made by e-beam lithography is less than that on submicron gratings made by holography. The constant growth technique is an important step to realize complex optoelectronic devices such as one-step grown distributed feedback lasers and two-dimensional photonic crystals.

Design and Fabrication of Gain Equalization Filer in Optical WDM Systems Using Fiber Lattice Tapered Methods (WDM용 광섬유 증폭기를 위한 전광섬유형 이득등화 필터 제작)

  • Chang, Jin-Hyeon;Jeon, Byung-Goo;Kim, Jin-Sik
    • Journal of The Institute of Information and Telecommunication Facilities Engineering
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    • v.8 no.2
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    • pp.90-95
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    • 2009
  • All-optical fiber-type gain flattening filer (GFF) for an EDFA (Erbium doped fiber amplifier) were fabricated by using a FBT (fiber biconical tapered) process and the performance of the GFF was tested and athermal package was proposed. Historically, the chief contributor to gain unevenness has been the EDFA. Due to the inherent gain response of the EDFA's operation, there is always a modest imbalance in the gain applied as a function of wavelength. FBT methods have been used to make fiber type couplers and WDM filter since 1980. Attractivity of this methods was simple, cost effective and thermal stability. Simulation program tool is made to design target GFF profile for this paper. Fiber coupler manufacturing machine is modified for the GFF process. The final GFF is obtained by cascading 4 unit filter that has 6 taper stage. Test result shows 1 dB of wavelength flatness in the C band. Polarization dependent loss is under 0.15dB. The center wavelength variation is below ${\pm}$0.35nm at the temperature range of $20^{\circ}C$ to $70^{\circ}C$.

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