• Title/Summary/Keyword: Thermal probe array

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Fabrication and Characterization of Thermal Probe Array on SOI Substrates (SOI 기판을 이용한 Thermal Probe 어레이 제작 및 특성 평가)

  • Cho, Ju-Hyun;Na, Kee-Yeol;Park, Keun-Hyung;Lee, Jae-Bong;Kim, Yeong-Seuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.11
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    • pp.990-995
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    • 2005
  • This paper reports the fabrication and characterization of $5\;\times\;5$ thermal cantilever array for nano-scaled memory device application. The $5\;\times\;5$ thermal cantilever array with integrated tip heater has been fabricated with MEMS technology on SOI wafer using 7 photo masking steps. All single-level cantilevers have a diode in order to eliminate any electrical cross-talk between adjacent tips. Electrical measurements of fabricated thermal cantilever away show its own thermal heating mechanism. Thermal heating is demonstrated by the reflow of coated photoresist on the cantilever array surface.

Fabrication and Characterization of 32x32 Silicon Cantilever Array using MEMS Process (MEMS 공정을 이용한 32x32 실리콘 캔틸레버 어레이 제작 및 특성 평가)

  • Kim Young-Sik;Na Kee-Yeol;Shin Yoon-Soo;Park Keun-Hyung;Kim Yeong-Seuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.10
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    • pp.894-900
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    • 2006
  • This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

pH Measurements with a Microcantilever Array-Based Biosensor System

  • Hur, Shin;Jung, Young-Do
    • Journal of Sensor Science and Technology
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    • v.21 no.3
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    • pp.186-191
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    • 2012
  • In this paper, we present a pH measurement method that uses a microcantilever-array-based biosensor system. It is composed of microcantilever array, liquid cell, micro syringe pump, laser diode array, position sensitive detector, data acquisition device, and data processing software. Four microcantilevers are functionalized with pH-sensitive MHA(mercaptohexadecanoic acid) as a probe, while three microcantilevers are functionalized with HDT(hexadecane thiol) as reference. We prepare PBS(phosphate buffered saline) solutions of different pH and inject them into the liquid cell with a predefined volumetric speed at regular time intervals. The functionalized mircocantilevers in the liquid cell deflect as a self-assembled monolayer on the microcantilever binds with probe molecules in the solution. The difference in deflection between the MHA-covered probe microcantilever and the HDT-covered reference microcantilever was used to compensate for thermal drift. The deflection difference clearly increases with increasing pH in the solution. It was shown that when the pH values of the PBS solutions are high, there were large variations in the deflection of microcantilevers, whereas there were small variations for low pH value. The experimental results show that the microcantilever array functionalized with MHA and HDT can detect pH value with good repeatability.

Plasma Uniformity Analysis of Inductively Coupled Plasma Assisted Magnetron Sputtering by a 2D Voltage Probe Array

  • Joo, Junghoon
    • Applied Science and Convergence Technology
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    • v.23 no.4
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    • pp.161-168
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    • 2014
  • A real-time monitoring of immersed antenna type inductively coupled plasma (ICP) was done with a homemade 2 dimensional voltage probe array to check the uniformity of the plasma. Measured voltage values with a high impedance voltmeter are close to the floating potential of the plasma. As the substrate carrier was moving into a magnetron sputtering plasma diffusive from a $125mm{\times}625mm$ size cathode, measured results showed reliably separation of plasma into the upper and lower empty space over the carrier. Infra red thermal imaging camera was used to observe the cross corner effect in situ without eroding a target to the end of the usage. 3 dimensional particle trace model was used to analyze the magnetron discharge's behavior.

Fabrication of Combined Probes for Interstitial hyperthermia and Brachyradiotherapy (고 선량율 근접 및 온열치료 병용 삽입관의 제작과 특성)

  • Chu, Sung-Sil;Kim, Sung-Kyu
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 2004.11a
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    • pp.85-87
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    • 2004
  • We fabricated flexible thermoradiotherapy probes to alternated combination with Interstitial hyperthermia and Brachyradiotherapy thermoradiotherapy probe was coated by gold plate on polyethylene brachytherapy probe. When Agar phantom was heated 15 minute with 30 W radiofrequency power, temperature increased as 5oC for polyethylene probe and 20oC for gold coated polyethylene probe. We observed that the 1 cm square array would heat a volume with a 1.25 cm radius circular field cross section to therapeutic temperatures (90% relative SAR using Tm) and the 2 cm square array with a 1.75 cm radius rectangular field with central inhomogeneity. With 2 cm long electrode implants, we observed that the 1 cm square array would heat a 3 cm long sagittal section to therapeutic temperature (90% relative SAR using Tm). The histopathological changes associated with RF heating of normal canine brains have been correlated with thermal distributions. RF needle electrode heating was applied for 50 min to generate tissue temperatures of 43${\circ}$C. We obtained a quarter of the heated tissue material immediately after heating and sacrificed at intervals from 7${\sim}$30 days. The acute stage was demonstrated by liquefactive necrosis, pyknosis of neuronal element in the gray matter. Mild gliosis occurring around the necrosis was demonstrated in the last sacrificed (days30)canine brain.

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A Study on Detection of Small Defects for MoSi2 by Medical Ultrasonic Testing (의학용 초음파검사기에 의한 MoSi2의 미소결함 탐상)

  • Namkoong, Chai-Kwan;Kim, You-Chul
    • Journal of the Korean Society of Safety
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    • v.10 no.4
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    • pp.9-12
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    • 1995
  • Detection of small defects by medical ultrasonic testing when the thermal sprayed coating by $MoSi_2$ on the metal is done. The defects may occur at the bonded surface. So, the detecting method of the defects by non-destructive in spection is desired. Here, in order to examine the possibility of the detection of the small defects by the ultrasonic. The electronic scanning ultrasonic equipment using an array probe developed as the medical ultrasonic diagnostic equipment is applied for the detection of the metal material defects. It's validity is investigated.

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Probing galactic and intergalactic magnetic fields using Faraday tomography (optionally title in Korean in parentheses)

  • Ideguchi, Shinsuke;Takahashi, Keitaro;Akahori, Takuya;Ryu, Dongsu
    • The Bulletin of The Korean Astronomical Society
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    • v.40 no.2
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    • pp.31.1-31.1
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    • 2015
  • For probing magnetic fields in the universe, rotation measure (RM) have been often used. RM allows us to obtain the information of integrated (or averaged) magnetic fields along a line of sight (LOS). On the other hand, the new technique so-called Faraday tomography will be used in practical in the near future thanks to the wide-band polarimetry by Square kilometre Array and/or its precursors. The technique allows us to obtain so-called Faraday dispersion function (FDF). FDF is the distribution function of magnetic fields and polarized sources along a LOS. Because of this fact, it is expected that the studies of magnetic fields associated with various astronomical objects will progress dramatically. Since FDF also includes information of cosmic-rays and thermal electrons, the investigation of FDF may advance the studies of dynamics of external galaxies and/or the star formation activities. We have studied the potentials of Faraday tomography such as a tool to probe the intergalactic magnetic field associated with filaments of galaxies in the large scale structure. We have also studied the realistic FDFs of galaxies for understanding global magnetic field, cosmic-ray and thermal electrons of external galaxies. In the talk, we briefly introduce the Faraday tomography technique and report the results related to the Faraday tomography.

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THE PROCESSING OF CLUMPY MOLECULAR GAS AND STAR FORMATION IN THE GALACTIC CENTER

  • LIU, HAUYU BAOBAB;MINH, YOUNG CHOL;MILLS, ELISABETH
    • Publications of The Korean Astronomical Society
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    • v.30 no.2
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    • pp.133-137
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    • 2015
  • The Galactic center uniquely provides opportunities to resolve how star clusters form in neutral gas overdensities engulfed in a large-scale accretion flow. We have performed sensitive Green Bank 100m Telescope (GBT), Karl G. Jansky Very Large Array (JVLA), and Submillimeter Array (SMA) mapping observations of molecular gas and thermal dust emission surrounding the Galaxy's supermassive black hole (SMBH) Sgr $A^{\ast}$. We resolved several molecular gas streams orbiting the center on ${\gtrsim}10$ pc scales. Some of these gas streams appear connected to the well-known 2-4 pc scale molecular circumnuclear disk (CND). The CND may be the tidally trapped inner part of the large-scale accretion flow, which incorporates inflow via exterior gas filaments/arms, and ultimately feeds gas toward Sgr $A^{\ast}$. Our high resolution GBT+JVLA $NH_3$ images and SMA+JCMT 0.86 mm dust continuum image consistently reveal abundant dense molecular clumps in this region. These gas clumps are characterized by ${\gtrsim}100$ times higher virial masses than the derived molecular gas masses based on 0.86 mm dust continuum emission. In addition, Class I $CH_3OH$ masers and some $H_2O$ masers are observed to be well associated with the dense clumps. We propose that the resolved gas clumps may be pressurized gas reservoirs for feeding the formation of 1-10 solar-mass stars. These sources may be the most promising candidates for ALMA to probe the process of high-mass star-formation in the Galactic center.

Measurement of Internal Temperature Distribution for the Evaluation of Focused Ultrasound (FUS) Stimulation Devices (집속초음파 자극기의 성능평가를 위한 팬텀 내부온도 측정)

  • Doh, Il;Joe, Daniel J.;Kim, Sung Mok;Baik, Kyung Min;Kim, Yong Tae;Park, Seung Min
    • Journal of Biomedical Engineering Research
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    • v.43 no.3
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    • pp.147-152
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    • 2022
  • This research is to measure real-time temperature distribution inside a tissue-mimicking phantom for the safety and effectiveness evaluations of focused ultrasound (FUS) device capable of linear scanning stimulation. Since the focusing area of the FUS stimulation device is smaller than diameter of conventional thermal probe and keeps moving, it is impossible to monitor temperature distribution inside the phantom. By using the phantom with a thin film temperature sensor array inserted, real-time temperature change caused by the FUS device was measured. The translation of the measured temperature peak was also tracked successfully. The present phantom had been experimentally proven to be applicable to validate the performance and safety of the therapeutic ultrasound devices.

A Preliminary Study on Measuring Void Fraction in a Fuel Rod Assembly by using an X-ray Imaging System (X선 영상 장치를 이용한 핵연료 집합체 내 기포율 측정을 위한 선행 연구)

  • Lee, Sun-Young;Oh, Oh-Sung;Lee, Se-Ho;Lee, Seung-Wook
    • Journal of the Korean Society of Radiology
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    • v.11 no.7
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    • pp.571-578
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    • 2017
  • Bubbles are generated by the boiling of the cooling water when an accident occurs in the reactor and then in order to measure the void fraction, the Optical Fiber Probe(OFP) and optical camera are used in thermal hydraulic safety research. However, such an optical method is not suitable for measuring the void fraction in a $17{\times}17$ array of fuel rods due to the geometrical limitations. This study was conducted as a preliminary study using x-ray system and various phantoms before applying to rod bundles. Through radiographic and tomographic experiments, the tube voltage of the x-ray generator was 130 kVp and the tube current was 1 mA. In addition, it is possible to measure the hole of 1mm in size visually through the bubble resolution phantom, and it is confirmed that the contrast is relatively decreased in the inside of the freon in the case of the contrast evaluation using the road phantom. However, we could obtain good image without distortion when reconstructing the image. Bubble generation phantom experiments were used to confirm the flow direction of the bubbles and to acquire tomography images. The image J tool was used to measure the void fraction of 18 % for a single tomography image. This study has carried out previous researches for the measurement of the bubble rate around the nuclear fuel and could be used as a basic research for continuous research.