Fabrication and Characterization of Thermal Probe Array on SOI Substrates
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Cho, Ju-Hyun
(충북대학교 반도체공학과)
Na, Kee-Yeol (충북대학교 반도체공학과) Park, Keun-Hyung (충북대학교 반도체공학과) Lee, Jae-Bong (충북대학교 반도체공학과) Kim, Yeong-Seuk (충북대학교 반도체공학과) |
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