• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
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• pp.118-122
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• 1999

Thermal mass flow meter was developed using principle of convective heat transfer. The advantage of thermal mass flow meter is measuring mass flow directly, therefore, it is not required to use densitometer or temperature/pressure and DP gages. The final accuracy of this thermal mass flow meter is $\pm1.0{\%}$ or better, reproducibility is $\pm0.2{\%}$, and the response time is 600 ms. The thermal mass flow meter was developed from a single point to multi-points (maximum is 9 points), and the number of points is determined according to desired accuracy and size of piping/duct. Since this thermal mass flow meter adopted microprocessor based design, it is intrinsically accurate, self-error detectable, and has self-diagnosis function. The applications of this thermal mass flow meter are for measurement and control of HVAC air flow, other gas flow, and liquid flow.

• 대한기계학회논문집B
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• 제39권4호
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• pp.309-316
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• 2015

가열식 액체용 질량유량계측기(LMFM, Liquid Mass Flow Meter)에 대하여 수치해석적으로 분석하였으며 실험을 통하여 검증하였다. 기존의 기체용 질량유량계측기(GMFM, Gas Mass Flow Meter)와 동일한 구조로 설계하였으나 계측온도차는 기체용에 비하여 정 반대의 특성을 나타낸다. 기체는 열용량이 작아서 계측관벽을 통한 전도열전달이 기체의 유동에 따른 대류열전달에 대응할 정도이므로 이들 상호작용의 결과 상 하류 써미스터의 온도차가 질량유량에 비례한다. 반면, 열용량이 큰 액체의 경우 대류열전달이 지배적이 되어 계측관벽을 통한 전도열전달이 무시되며, 결과적으로 온도차가 질량유량에 반비례한다. 계측관경과 히터의 권선폭은 LMFM 의 중요한 설계인자로서 각각 최적화가 필요하다. 최적화 설계를 통하여 제작한 계측기는 반도체 생산장비의 극소유량 정밀제어 및 공급용으로 사용할 수 있다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.595-600
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• 2001

Thermal mass flow meter(TMF) and thermal mass flow controller(MFC) were used to measure and to control the mass flow rate of gases. TMF and MFC were designed for specified working pressure and gas. For the case of different working pressure and gases, the flow rate measurement accuracy decreased dramatically. In this study, a TMF and MFC was tested with three different gases and pressure range from 0.2 MPa up to 1.0 MPa. Effect of specific heat causes to increase flow measurement error as much as ratio of specific heat compared with reference gas. Changing of pressure causes to increase flow rate measurement error about -0.2% as the working pressure decreased 0.1 MPa. Response time of MFC was below 3.12 s for the case of increasing of flow rate. But the response time was increased up to 6.92 s for the case of decreasing of flow rate. When the solenoid valve was fully closed, a initial delay time of output of MFC was increased up to 1.36 s.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.308-313
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• 2003

Thermal mass flow meters (TMFMs) are most widely used for measuring mass flow rates in the semiconductor industry. A TMFM should have a short response time in order to measure the time-varying flow rate rapidly and accurately. Therefore it is important to study transient heat transfer phenomena in the sensor tube of a TMFM that is the most critical part in the TMFM. In the present work, a simple numerical model for transient heat transfer phenomena of the sensor tube of a TMFM is presented. Numerical solutions for the tube and fluid temperatures in a transient state are obtained using the proposed model and compared with experimental results to validate the proposed model. Based on numerical solutions, heat transfer mechanism in a transient state in the sensor tube is explained. Finally, a correlation for predicting the response time of a sensor tube is presented. The correlation is verified by experimental results.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
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• pp.109-113
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• 1999

Thermal mass flow meter (TMF) is used measuring the small mass flow rate of gases. Generally, flow rate measuring accuracy of TMF is $\pm2{\%}$ of full scale. TMF is manufactured for specified working pressure and specified working gas by customer. If it were applied for different working pressure and gases, flow rate measurement accuracy decreased dramatically. In this study, a TMF tested with three different gases and pressure range of 0.2 MPa to 1.0 MPa. Effect of specific heat cause to increase flow measurement error as much as ratio of specific heat compare with reference gas. Pressure change cause to increase flowrate measurement deviation about $-0.2{\%}$ as the working pressure decreased 0.1 MPa.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.893-894
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• 2013

• 한국산학기술학회논문지
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• 제4권2호
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• pp.63-70
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• 2003

본 논문에서는 반도체 제조장비의 핵심 부품 중에 하나인 질량유량제어기(MFC, Mass Flow Controller)클 설계하고 구현하였다 Microchip社의 마이크로콘트롤러(Microcontroller) PIC 16F876을 사용하여 개발된 MFC는 여러가지 문제점을 가진 아날로그(Analog) 방식의 MFC와 고가의 DSP(Digital Signal Processor) 및 고분해능의 AD변환기(Analog to Digital Convertor)를 사용하는 디지털 MFC의 장점을 혼합한 하이브리드형(Hybrid-Type)이다. 본 논문에서 개발된 MFC는 크게 센서부(Sensor Unit), 제어부(Control Unit), 구동기부(Actuator Unit)로 구성되었으며, 성능향상을 위한 자동보정(Automatic Calibration) 알고리즘과 표준테이블(Reference Table) 방식을 사용하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.154-161
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• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• 대한기계학회논문집B
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• 제26권9호
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• pp.1276-1283
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• 2002

Recently, HSDI (High Speed Direct Injection) diesel engine has been spotlighted as a next generation engine because it has a good potential for high thermal efficiency and fuel economy. This study was carried out to investigate the in-cylinder flow characteristics generated in a 4-valve small diesel cylinder head with a tangential and helical intake port. The flow characteristics such as coefficient of flow rate(Cf), swirl ratio (Rs), and mass flow rate (ms) were measured in the steady flow test rig using the impulse swirl meter and the analysis of in-cylinder flow field was conducted by experiment using the PIV and calculation using the commercial CFD code. As the results from steady flow test indicate, the mass flow rate of the cylinder head with a short distance between the two intake ports is increased over 13% than that of the other head. However, the non-dimensional swirl ratio is decreased approximately 15%. From in-cylinder flow characteristics obtained by PIV and CFD calculation, we found that the swirl center was eccentric from the cylinder center and the velocity distribution became uniform near the TDC. In addition, the results of the calculation are good agreement with the experimental results.

• 한국유체기계학회 논문집
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• 제2권2호
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• pp.19-26
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• 1999

Thermal output in a nuclear power plant is verified with calorimetric heat balance on the secondary plant. The calorimetry involves the precise measurement of the feedwater flow rate. However, the correct indication of feedwater flow rate obtained by a pressure-difference measurement across a venturi can be affected by instrument errors, fouling or a poorly developed velocity profile. This can result in an inaccurate mass flow rate and consequently an inaccurate estimate of power. The purpose of this study is to develop verification methods with accuracy better than $0.5\%$ for high precision flow measurement to be used for measuring feedwater flow rate. This chemical tracer method is a testing process that uses tracers which can be applied to quantify losses in electrical output due to the incorrect measurements of feedwater flow rate. And this system has good response to the variation of the flow rate. Accuracy of better than 0.5 percent can be expected for feedwater flow measurement, providing that the system can be stabilized during the test. This methodology is applicable to other flow systems well.