Abstract
Thermal mass flow meter (TMF) is used measuring the small mass flow rate of gases. Generally, flow rate measuring accuracy of TMF is $\pm2{\%}$ of full scale. TMF is manufactured for specified working pressure and specified working gas by customer. If it were applied for different working pressure and gases, flow rate measurement accuracy decreased dramatically. In this study, a TMF tested with three different gases and pressure range of 0.2 MPa to 1.0 MPa. Effect of specific heat cause to increase flow measurement error as much as ratio of specific heat compare with reference gas. Pressure change cause to increase flowrate measurement deviation about $-0.2{\%}$ as the working pressure decreased 0.1 MPa.
