• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.3-8
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• 2007

A machining system that generates accurate relative motions between the tool and workpiece is required to realize ultra precise machining or measurements. Accuracy improvements for each element of the machine are also required. This paper proposes a machining system that uses a compensation device for the six-degree-of-freedom (6-DOF) motion error between the tool and workpiece. The compensation device eliminates elastic and thermal errors of the joints and links due to temperature fluctuations and external forces. A hexapod parallel kinematics mechanism installed between the tool spindle and surface plate is passively actuated by a conventional machine. Then the parallel mechanism measures the 6-DOF motions. We describe the conception and fundamentals of the system and test a passively extensible strut with a compensation device for the joint errors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 마이크로전자및패키징학회지
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• 제20권2호
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• pp.23-28
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• 2013

마이크로렌즈 어레이는 광학 시스템의 기본 부품으로, 사용 목적에 따라 초점거리가 다르게 제작되며, 대체로 긴 초점거리의 렌즈들이 많이 제작되고 있다. 본 논문에서는 졸겔(sol-gel) 내부에 들어있는 형광으로 염색된 물질을 관찰하기 위하여 마이크로렌즈 어레이를 제작하였다. 일반적으로 형광 현미경에서 관찰되는 형광 빛은 그 강도가 약하지만 마이크로렌즈를 이용할 경우 빛을 집중시켜 선명한 관찰이 가능하게 한다. 이를 실현시키기 위해 photoresist thermal reflow법을 사용하여 초점 거리가 짧은 마이크로렌즈를 제작하였으며, 렌즈의 형상 관련 오차를 측정하였다. 측정 오차에 기반을 둔 포토마스크 보정 및 스핀 코팅 조건을 조정하여 적합한 마이크로렌즈의 직경과 형상을 구현하였다.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2005년도 Proceedings of ISRS 2005
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• pp.601-603
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• 2005

Refocusing methods are used to compensate optical performance degradation of high resolution satellite camera during on-orbit operation. Due to mechanical vibration during launch and thermal vacuum environment of space where camera is exposed, the alignment of optical system may have error. The focusing error is dominant of misalignment and caused by the de-space error of secondary mirror of catoptric camera, which is most sensitive to vibration and space environment. The high resolution camera of SPOT, Pleiades and KOMPSAT2 have refocusing device to adjust focusing during orbital operation while QuickBird of US does not use on orbit refocusing method. For the Korsch type optical configuration which is preferred for large aperture space remote sensing camera, secondary mirror and folding mirror are available as refocusing element.

• 한국정밀공학회지
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• 제27권9호
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• pp.86-93
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• 2010

Any relative deformation between the cutting tool and the workpiece at the machining point, results directly in form and dimensional errors. The source of relative deformations between the cutting tool and the workpiece at the contact point may be due to thermal, weight, and cutting forces. Thermal and weight deformations can be measured at various positions of the machine tool and stored in the compensation registers of the CNC unit and compensated the errors during machining. However, the cutting force induced errors are difficult to compensate because estimation of cutting forces are difficult. To minimize the error induced by cutting forces, it is important to improve the machining accuracy. This paper presents the pre-calculated method of form error induced by cutting forces. In order to estimate cutting forces, Isakov method is used and the method is verified by comparing with the experimental results. In order to this, a cylindrical-outer-diameter turning experiments are carried out according to cutting conditions.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1660-1665
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• 2006

Drop placement accuracy and precision are the critical performance values of industrial ink jet deposition systems. Imperfect components and environments have severe impacts on drop placement. Litrex has identified over 120 error sources and developed engineering solutions to address the errors. In this paper, improved results using thermal compensation and stage mapping techniques are demonstrated. A recent progress in inkjet fabrication of multi-color electrophoretic display on flexible substrate with large distortion is also demonstrated.

• Bulletin of the Korean Chemical Society
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• 제19권8호
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• pp.868-874
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• 1998

An equivalent retention has been experimentally observed in thermal field-flow fractionation (ThFFF) for different polymer-solvent systems. It is shown that iso-retention between two sets of polymer-solvent systems can be obtained by adjusting the temperature difference (ΔT) according to the difference in the ratio of ordinary diffusion coefficient to thermal diffusion coefficient. This method uses a compensation of field strength (ΔT) in ThFFF at a fixed condition of cold wall temperature. It is applied for the calculation of molecular weight of polymers based on a calibration run of different standards obtained at an adjusted AT. The polymer standards used in this study are polystyrene (PS), polymethylmethacrylate (PMMA), and polytetrahydrofuran (PTHF). Three carrier solvents, tetrahydrofuran (THF), methylethylketone (MEK) and ethylacetate (ETAc) were employed. Though the accuracy in the calculation of molecular weight is dependent on the difference in the slope of log λ vs. log M which is related to Mark-Houwink constant a, it shows reasonable agreement within about 6% of relative error in molecular weight calculation for the polymer-solvent systems having similar a value.

• 한국산학기술학회논문지
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• 제20권6호
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• pp.598-603
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• 2019

삼차원 형상 측정 기술은 다양한 산업에서 활용하고 있는 기술이다. 그 중, 광 삼각법에 기초한 광학식 삼차원 형상 측정 기술들은 매일 공장에서 오랜 시간 동안 대량의 삼차원 형상 측정을 하고, 미세한 측정 또한 요구되는 반도체 생산품 검사 분야에서 주로 사용된다. 이러한 광 삼각법 기반의 삼차원 측정 장비들의 구성 요소인 광원과 구동 회로는 장시간 작동하게 되면 발열이 나타나게 되고 장시간 작동하며 주변의 온도가 일정하지 않은 상황에 노출되기도 하여 온도로 인한 측정 오차가 발생하게 된다. 본 논문에서는 장시간 반복해서 사용하는 PMP(Phase Measuring Profilometry) 형상 측정법에서의 열 변위 보정에 관한 방법을 제안하였다. PMP 형상 측정법 기반의 삼차원 형상 측정 장치를 구현하여 10시간에 걸쳐 물체의 높이와 주변 온도를 측정하는 실험을 진행하였고, 측정된 온도와 높이 값을 이용하여 단순 선형 회귀 분석을 하여 회귀직선을 얻었다. 이 회귀직선을 이용하여 온도에 따른 높이 측정값의 오차를 보정하게 되면 정상적인 측정값에서의 오차 값이 139.88 um(Micrometer) 에서 13.12 um로 보정되는 것을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 B
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• pp.423-425
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• 1998

In this paper, a novel Programmable Signal Conditioner(PSC) for Thermo Couple(T/C) without variable-resistance is proposed. It is fabricated by using a fully digitalized error-correction and calibration algorithm. In signal processing of T/C, since the output voltage of T/C is nonlinear and its level is very low, the circuitry become very complicated to reduce the converting error and identify the true thermal voltage signal. The newly proposed PSC has compensation and calibration algorithm not using variable resistor. Moreover structure can be very simple and it has highly precise output characteristics.

• 대한기계학회논문집B
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• 제28권10호
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• pp.1155-1162
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• 2004

This paper is the forth paper of several companion papers which compare the method of Air-Fuel ratio determination. In the previous work, various AFR calculations were performed for various fuels and the results were compared with each other. The comparison, however, were limited to numerical value and estimation of each equation or method was insufficient. In this paper, the overall estimation of the methods was attempted. Also, the method of trouble shooting of instrumentation was presented. Through the estimation of methods, it is concluded that the Eltinge method contains inherently the most perfect thermal dissociation model as far as the exhaust composition is concerned; therefore, this might be regarded as the most general equation of AFR determination among the existing ones. The others might be considered as approximate form. In addition, the mal-distribution factor in Eltinge method is qualitatively equivalent to thermal dissociation chemical equilibrium constant K. Lastly, it is illustrated that all instrumentation error, including the sampling line leakage, can be easily detected through the analyzing the exhaust component on the Eltinge chart.