• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.8-11
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• 2001

In this study. the recovery of plasma induced damage in the etched PZT thin film with $O_2$ re-annealing have been investigated. The PZT thin films were etched as a function of $Cl_2/Ar$ and additive $CF_4$ into $Cl_{2}(80%)/Ar(20)%$. The etch rates of PZT thin films were $1600\dot{A}/min$ at $Cl_{2}(80%)/Ar(20)%$ gas mixing ratio and $1970\dot{A}/min$ at 30 % additive $CF_4$ into $Cl_{2}(80%)/Ar(20)%$. The etched profile of PZT films was obtained above 70 by SEM. In order to recovery properties of PZT thin films after etching, the etched PZT thin films were re-annealed at various temperatures in $O_2$ atmosphere. From the hysteresis curves, ferroelectrical properties are improved by $O_2$ re-annealing process. The improvement of ferroelectric behavior at annealed sample is consistent with the increase of the (100) and (200) PZT phase revealed by x-ray diffraction (XRD). From XPS analysis, intensity of Pb-O, Zr-O and Ti-O peak are increased and the chemical residue peak is reduced by $O_2$ re-annealing. The ferroelectric behavior consistent with the dielectric nature of TixOy is recovered by $O_2$ recombination during rapid thermal annealing process. From AFM images, it shows that the surface roughness of re-annealed sample after etching is improved.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.150-150
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• 2008

본 연구에서는 Wet chemistry damage가 Nanopatterned p-ohmic electrode에 미치는 영향을 연구하였다. Nanopattern은 Metal clustering을 이용하여, P-GaN와 Ohmic형성에 유리한 Pd을 50$\AA$ 적층한 후 Rapid Thermal Annealing방법으로 $850^{\circ}C$, $N_2$분위기에서 3min열처리를 하여 Pd Clustering mask 를 제작하였다. Wet etching은 $85^{\circ}C$, $H_3PO_4$조건에서 시간에 따라 Sample을 Dipping하는 방법으로 시행하였다 Ohmic test를 위해서 Circular - Transmission line Model 방법을 이용하였으며, Atomic Force Microscopy과 Parameter Analyzer로 Nanopatterned GaN surface위에 형성된 Ni/ Au Contact에서의 전기적 분석과, 표면구조분석을 시행하였다. AFM결과 Wet처리시간에 따라서 Etching형상 및 Etch rate이 영향을 받는 것이 확인되었고, Ohmic test에서 Wet chemistry처리에 의한 Tunneling parameter와 Schottky Barrier Height가 크게 증/감함을 관찰하였다. 이러한 결과들은 Wet처리에 의해서 발생된 Defect가 GaN의 표면과 하부에서 발생되며, Deep acceptor trap 및 transfer거동과 밀접한 관련이 있음을 확인 할 수 있었다. 보다 자세한 Transport 및 Wet chemical처리영향에 관한 형성 Mechanism은 후에 I-V-T, I-V, C-V, AFM결과 들을 활용하여 발표할 예정이다.

• Journal of the Korean Vacuum Society
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• v.13 no.3
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• pp.120-126
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• 2004

A damage-reduced trench was investigated in view of the defect distribution along trench sidewall and bottom using high resolution transmission electron microscopy, which was formed by HBr plasma and additive gases in magnetically enhanced reactive ion etching system. Adding $O_2$ and other additive gases into HBr plasma makes it possible to eliminate sidewall undercut and lower surface roughness by forming the passivation layer of lateral etching. To reduce the RIE induced damage and obtain the fine shape trench corner rounding, we investigated the hydrogen annealing effect after trench formation. Silicon atomic migration on trench surfaces using high temperature hydrogen annealing was observed with atomic scale view. Migrated atoms on crystal surfaces formed specific crystal planes such as (111), (113) low index planes, instead of fully rounded comers to reduce the overall surface energy. We could observe the buildup of migrated atoms against the oxide mask, which originated from the surface migration of silicon atoms. Using this hydrogen annealing, more uniform thermal oxide could be grown on trench surfaces, suitable for the improvement of oxide breakdown.

• Journal of the Korean Electrochemical Society
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• v.8 no.1
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• pp.24-31
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• 2005

Ion shower doping with a main ion source of $P_2H_x$ using a source gas mixture of $PH_3/H_2$ was conducted on excimer-laser-annealed (ELA) poly-Si.The crystallinity of the as-implanted samples was measured using a UV-transmittance. The measured value using UV-transmittance was found to correlate well with the one measured using Raman Spectroscopy. The sheet resistance decreases as the acceleration voltage increases from 1kV to 15kV at the moderate doping conditions. It, however, increases as the acceleration voltage increases under the severe doping conditions. The reduction in carrier concentration due to electron trapping at uncured damage after activation annealing seems to be responsible for the rise in sheet resistance. Three different annealing methods were investigated in terms of dopant-activation and damage-recovery, such as furnace annealing, excimer laser annealing, and rapid thermal annealing, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.4
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• pp.319-324
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• 2002

In this study, the reduce of plasma etching damage in PZT thin film with addictive gas and re-annealing after etching have been investigated. The PZT thin films were etched as a function of $Cl_2/CF_4$ with addition of Ar and $O_2$ with inductively coupled plasma. The etch rates of PZT thin films were 1450 ${\AA}/min$ at 30% additive Ar and 1100 ${\AA}/min$ at 10% auditive $O_2$ into $Cl_2/CF_4$ gas mixing ratio of 8/2. In order to reduce plasma damage of PZT thin films after etching, the etched PZT thin films were re-annealed at various temperatures at $O_2$ atmosphere. From the hysteresis curries, the ferroelectric properties are improved by $O_2$ re-annealing process. The improvement of ferroelectric behavior at annealed PZT films is consistent wish the increase of the (100) and (200) PZT peaks revealed by x-ray diffraction (XRD). From x ray photoelectron spectroscopy (XPS) analysis, the intensity of Pb-O, Zr-O and Ti-O peak are increased and the chemical residue peak is reduced by $O_2$ re-annealing. The ferroelectric behavior consistent with the dielectric nature of $Ti_xO_y$ is recovered by $O_2$ recombination during rapid thermal annealing process.

• Economic and Environmental Geology
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• v.54 no.3
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• pp.311-330
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• 2021

The Sinseongri site contains at least eleven theropod trackways, three sauropod trackways, and one or more ornithopod walkways of dinosaur footprints. The host rock at the site is primarily siltstone and mudstone, but thermal alterations have metamorphosed it into hornfels. Except for micro cracks and exfoliations, joint systems in various directions appeared on the surface of the fossils site and showed a low share of all damage factors. The host rocks in the fossils site demonstrated relatively high physical properties as a result of ultrasonic velocity and were classified as stable. More than half of the fossils required reinforcement to control the progression of cracks if the type of conservation treatment was subdivided according to the damage type of dinosaur footprint fossils. The white paint used to visualize the footprints seems to deteriorate, allowing rock debris to spill out and causing damage to the fossil site, and alternative visualization schemes should be considered.

• Journal of the Korea Institute of Military Science and Technology
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• v.24 no.1
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• pp.1-11
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• 2021

Thermal protection system structures such as double-panel structures are used on the skin of the fuselage and wings to prevent the transfer of high heat into the interior of an high supersonic/hypersonic aircraft. The thin-walled double-panel skin can be exposed to acoustic loads by high power engine noise and jet flow noise, which can cause sonic fatigue damage. In order to predict the fatigue life of the skin, the octave bandwidth SPL should be calculated as narrow bandwidth PSD or acoustic load history using interpolation method. In this paper, a method of converting the octave bandwidth SPL acoustic load into a narrow bandwidth PSD and reconstructed acoustic load history was investigated. The octave bandwidth SPL was converted to the narrow bandwidth PSD using various interpolation methods such as flat, log and linear scale, and the probabilistic characteristics and fatigue damage results were compared. It was found that average error of fatigue damage index by the log scale interpolation method was relatively small among three methods.

• Journal of the Korean Society of Safety
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• v.37 no.4
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• pp.129-138
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• 2022

A new method for injecting cooling water into the Korean research reactor (KRR) in the event of beam tube rupture is proposed in this paper. Moreover, the research evaluates the risk to the reactor core in terms of core damage frequency (CDF). The proposed method maintains the cooling water in the chimney at a certain level in the tank to prevent nuclear fuel damage solely by gravitational coolant feeding from the emergency water supply system (EWSS). This technique does not require sump recirculation operations described in the current procedure for resolving beam tube accidents. The reduction in the risk to the core in the event of beam tube rupture that can be achieved by the proposed change in the cooling water injection design is quantified as follows. 1) The total CDF of the KRR for the proposed design change is approximately 4.17E-06/yr, which is 8.4% lower than the CDF of the current design (4.55E-06/yr). 2) The CDF for beam tube rupture is 7.10E-08/yr, which represents an 84.1% decrease compared with that of the current design (4.49E-07/yr). In addition to this quantitative reduction in risk, the modified cooling water injection design maintains a supply of pure coolant to the EWSS tank. This means that the reactor does not require decontamination after an accident. Thermal hydraulic analysis proves that the water level in the reactor pool does not cause damage to the nuclear fuel cladding after beam tube rupture. This is because the amount of water in the chimney can be regulated by the EWSS function. The EWSS supplies emergency water to the reactor core to compensate for the evaporation of coolant in the core, thus allowing water to cover the fuel assemblies in the reactor core over a sufficient amount of time.

• Earthquakes and Structures
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• v.22 no.2
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• pp.121-135
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• 2022

Many public buildings such as schools, hospitals, etc., where partial infill walls are present in reinforced concrete (RC) structures, have undergone undesirable damage/failure attributed to captive column effect during a moderate to severe earthquake shaking. Often, the situation gets worsened when these RC frames are non-ductile in nature, thus reducing the deformable capability of the frame. Also, in many parts of the Indian subcontinent, it is mandatory to use fly-ash bricks for construction so as to reduce the burden on the disposal of fly-ash produced at thermal power plants. In some scenario, when the non-ductile RC frame, partially infilled by fly-ash bricks, suffers major structural damage, the challenge remains on how to retrofit and restore it. Thus, in this study, two full-scale one-bay, one-story non-ductile RC frame models, namely, bare frame and RC partially infilled frame with fly-ash bricks in 50% of its opening area are considered. In the previous experiments, these models were subjected to slow-cyclic displacement-controlled loading to replicate damage due to a moderate earthquake. Now, in this study these damaged frames were retrofitted and an experimental investigation was performed on the retrofitted specimens to examine the effectiveness of the proposed retrofitting scheme. A hybrid retrofitting technique combining epoxy injection grouting with an innovative and easy-to-implement steel jacketing technique was proposed. This proposed retrofitting method has ensured proper confinement of damaged concrete. The retrofitted models were subjected to the same slow cyclic displacement-controlled loading which was used to damage the frames. The experimental study concluded that the hybrid retrofitting technique was quite effective in enhancing and regaining various seismic performance parameters such as, lateral strength and lateral stiffness of partially fly-ash brick infilled RC frame. Thus, the steel jacketing retrofitting scheme along with the epoxy injection grouting can be relied on for possible repair of the structural members which are damaged due to the captive column effect during the seismic shaking.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.208.2-208.2
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• 2016

Many researchers have paid attention to the studies on the interaction between non-thermal plasma and aqueous solutions for biomedical applications. The gas composition in the plasma is very important. Oxygen and nitrogen are the main gases of interest in biological applications. Especially, we focus on the oxygen concentration. In this experiment, we studied the role of oxygen concentration in plasma induced chemical reactions in solution. At first, the amount of ions are measured according to changing the oxygen concentration. And we checked the relationship between these ions and pH value. Secondly, when the oxygen concentration is changed, it identified the type and amount of radical generated by the plasma. In order to confirm the effect of these chemical property change to biological material, hemoglobin and RBCs are chosen. RBCs are one of the common basic biological cells. Thirdly, when plasma treated according to oxygen concentration in nitrogen feeding gas, oxidation of hemoglobin and RBC is checked. Finally, membrane oxidation of RBC is measured to examine the relation between hemoglobin oxidation and membrane damage through relative hemolysis and Young's modulus. Our results suggest that reactive species generated by the plasma differsdepending on the oxygen concentration changes. The pH values are decreased when oxygen concentration increased. OH decrease and NO increase are also observed. These reactive species makes change of chemical properties of solution. We also able to confirm that the difference in these reactive species to affect the oxidation of the Hb and RBCs. The Hb and RBCs are more oxidized with the high oxygen concentration conditions. But membrane is damaged more by plasma treatment with only nitrogen gas. It is shown that red blood cells membrane damage and oxidation of hemoglobin are not directly related.