• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.245-248
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• 2002

In this paper, the influence of Si surface damage on the NiSi formation has been characterized. The silicon surface is damaged using ion beam type spotter. Then, the effect of H2 anneal and TiN capping layer on the damaged has also been analyzed. The sheet resistance of NiSi formed on damaged Si increased rapidly as the damaging time increases while thermal stability of damaged NiSi was stabler than the undamaged one. In the case when H\ulcorner anneal and TiN capping layer were applied together, the characteristics of NiSi shows a little improvement of the sheet resistance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.844-847
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• 2001

The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.11
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• pp.2812-2822
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• 2000

Several methods have been developed to predict the rupture time of the boiler tubes in thermal power plant. However, existing life prediction methods give very conservative value at operating stress of power plant and rupture strain cannot be well estimated. Therefore, in this study, rupture time and strain prediction method accounting for creep, corrosion and heat transfer is newly proposed and compared with the current research results. The creep damage evolves by continuous cavity nucleation and constrained cavity growth. The corrosion damage evolves by steam side and fire side corrosion. The results showed good correlation between the theoretically predicted rupture time and the current research results. And rupture strain may be well estimated by using the proposed method.

• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.179-183
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• 2005

Particles in the HDD can cause serious damages such as scratches and thermal asperity(TA) at the head/disk interface(HDI). Accordingly, particles cause data loss including physical and electrical damages. To improve the reliability of head-disk interface, understanding the damage characteristics at the HDI due to particle interactions is required. The materials such as $A1_2O_3$, TiC and aluminum were used in this experiment. The size and hardness of particles injected into the HDI are closely relevant to surface damage caused the data loss on the disk and head. In this paper, a variety of scratches were analyzed using scanning electron microscope(SEM) and atomic force microscope(AFM). In order to analyze defects of very small size on the disk, optical surface analyzer(OSA) was also used.

• The Korean Journal of Ceramics
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• v.3 no.3
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• pp.213-217
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• 1997

In this paper, the imparct of X-ray and plasma process-induced-damages to La doped Lead Zirconate Titanate (PLZT, (Pb1-xLa)(Zr0.5Ti0.5)O3) capacitor characteristics have been investigated from the viewpoint of gigabit scale dynamic random access memory (DRAM) applications. Plamsa damage causes asymmetric degradation on hysteresis characteristics of PLZT films. On the other hand, X-ray damage results in a symmetrical reduction of charge storage densities (Qc's) for both polarities. As La concentration increases in the films, the radiation hardness of PLZT films on X-ray and plasma exposures is improved. It is observed that the damaged devices are fully recovered by thermal annealing under oxygen ambient.

• Proceedings of the KSR Conference
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• 2008.06a
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• pp.964-968
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• 2008

Infrared thermography using high-speed infrared camera has been recognized as a powerful method for various potential applications, such as nondestructive inspection, failure analysis, stress analysis, and medical fields, due to non-contact, high-speed, and high spatial resolution at various temperature ranges. In this investigation, damage evolution due to generation of hot spots on railway brake disc was investigated using the infrared thermography method. A high-speed infrared camera was used to measure the surface temperature of brake disc as well as for in-situ monitoring of hot spot evolution. From the thermographic images, the observed hot spots and thermal damage of railway brake disc during braking operation were qualitatively analyzed. Moreover, in this investigation, the previous experimental and theoretical studies on hot spots phenomenon were reviewed, and the current experimental results were introduced and compared with theoretical prediction.

• 한국정보디스플레이학회:학술대회논문집
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• 2007.08a
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• pp.640-643
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• 2007

The effect of plasma damage was investigated on amorphous gallium-indium-zinc oxide (a-GIZO) films and transistors. Ion-bombardment by plasma process affects to turn semiconductor to conductor materials and plasma radiation may degrade to transistor electrical properties. All damages are easily recovered with a $350^{\circ}C$ thermal annealing.

• Laser Solutions
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• v.11 no.2
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• pp.20-25
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• 2008

Polyimide is one of the useful materials in industry. The surface treatment of polyimide by a femtosecond laser can help accurate and fine fabrication of microstructure. And it can change the transmittance and reflectance of polyimide, too. We put femtosecond laser pulses on polyimide for rectangular or square type surface treaments and observe the change of transmittance and reflectance. Pulsewidth is 172 fs, laser power changes for fabrication are from 5 mW to 20 mW, and transmittance and reflectance are measured under 20m W, 300m W, and 920 mW. Pulse patterning is stable and almost no unwanted surface damage is shown. As power increases, working depth increases but working line width does not increase significantly. As speed changes, they also have same results. It shows the efficiency of a femtosecond laser is good and thermal damage is small for polyimide.

• Korean Journal of Remote Sensing
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• v.7 no.2
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• pp.149-163
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• 1991

This paper discusses the capabilities of airborne remotely sensed data to detect and classify forest damades. In this work the AMS (Aircraft Multiband Scanner) was used to obtain digital imagery at 300m altitude for forest damage inventory in the Black Forest of Germany. MSS(Multispectral Scanner) digital numbers were converted to spectral emittance and radiance values in 8 spectral bands from the visible to the thermal infrared and submitted to a maximum-likelihood classification for : (1) tree species ; and. (2) damage classes. As expected, the resulted, the results of MSS data with high spatial resolution 0.75m$\times$0.75m enabled the detection and identification of single trees with different damages and were nearly equivalent to the truth information of ground checked data.