• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.195-195
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• 2015

반도체 제조 시 ohmic contact을 형성하고, barrier metal layer형성을 위해 NH3 기체를 사용하는 rapid thermal nitridation (RTN)은 반도체 공정에 있어 매우 중요한 핵심 기술이다. 그러나 공정 진행 시 발생하는 공정 부산물에 의한 chamber오염으로 인해 매우 정확히 입사 되어야 할 thermal energy의 controllability가 저하되고 있어, 미세 공정능력 구현의 한계에 부닥치고 있다. 본 연구에서는 quartz plate liner를 적용하여 RTN 공정에서 발생하는 공정 부산물인 ammonium chloride (NH4Cl)의 chamber 표면 증착을 최소화하였고, 공정 진행 온도의 controllability를 확보하였다.

• 항공우주기술
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• 제6권1호
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• pp.64-73
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• 2007

차세대 대형위성에 대한 우주환경모사를 위한 대형열진공챔버가 한국항공우주연구원에 의해 성공적으로 국산화 구축되었다. 유효직경 8미터, 유효깊이 10미터의 대형열진공챔버는 크게 진공계와 열제어계, 방진계로 구분되며, $3.7{\times}10^{-5}Pa$($5{\times}10^{-7}torr$) 이하의 진공 환경에서 액체질소를 이용해 위성을 감싸는 쉬라우드의 온도를 $-190^{\circ}C$ 이하로 유지할 수 있고, $10^{-5}g_{rms}$ 이하의 진동레벨을 갖는 방진시스템을 갖추어 우주환경에서의 광학시험을 가능하게 한다. 또한 챔버내에 설치된 할로겐램프를 이용하여 쉬라우드의 온도를 섭씨 123도까지 상승시켜 베이크아웃 시험을 수행할 수 있으며, PLC(Programmable Logic Controller)를 기반으로 한 제어프로그램을 이용하여 대형열진공챔버의 자동화 제어를 수행할 수 있다.

• 대한기계학회논문집B
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• 제31권10호
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• pp.832-839
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• 2007

The geometry and dimensions of an expansion chamber are decisive factors in thermal puffer plasma chamber designs. Because they together dominate the temperature and speed at which the cooling gas from the chamber flows back through a flow channel to the arcing zone for the successful interruption of fault currents. In this study, we calculated the flow and mass transfer driven by arc plasma, and investigated the effects of a flow guide installed inside a thermal puffer plasma chamber. It is found that the existing cold gas of the chamber mixes with hot gases entrained from the arcing zone and is subjected to compression due to pressure build-up in the chamber. The pressure build-up with the flow guide is larger than that without due to a vortex which rotates clockwise around the chamber center. By the reverse pressure gradient, the mixing gas of the chamber flows back out for cooling down the residual plasma near current zero. In the case with the flow guide, the temperature just before current zero is lower than that without, and the Cu concentration with high electrical conductivity is also less than that without the flow guide.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2506-2511
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• 2007

The coupled simulation is performed to find out the interaction of arc plasmas with surrounding materials in a thermal puffer plasma chamber. In order to be more realistic, PTFE nozzle ablation and Cu electrode evaporation, which are caused by high temperature of arc plasmas, are considered together. Pressure rise and temperature inside the chamber generated during the whole arcing history are investigated with the applied currents. It is very important to define how thermal flow and mass transfer are processing between the arc plasma and surrounding materials for further understanding complex physics inside the chamber. It is concluded that the result might be very useful to understand the mechanism happened inside and to design thermal puffer plasma chambers, but further experimental studies are required to verify the results for the more practical applications.

• 전기의세계
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• 제19권4호
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• pp.18-23
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• 1970

A neutron detector, in general, can not be utilized as the thermal neutron detecting chamber in the nuclear power reactor, especially P.W.R. due to the characteristics of high temperature, high pressure and high neutron flux in a reactor vessel. We have performed an experiment to detect the thermal neutrons at 400.deg. C and high flux of thermal neutron in a power reactor. Coating boron-10 on the aluminium plates by means of surface diffusion method at 600.deg. C for 5 hours in an electric furace, also we made a typical chamber which was compensated ionization chamber filled with free air as an ionization gas. It was checked the chamber characteristics in the TRIGA MARK-II Reactor at the power level from zero to 250KW. The chamber current showed a perfect linear increase to power increase. However, many variation of the measured current were observed within the power of 50KW.

• 설비공학논문집
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• 제14권2호
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• pp.91-97
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• 2002

The present study concerns an experiment on the supply-air control in variable air volume (VAV) system with a Pl control logic. A thermal chamber with a Pl control logic is constructed to verify the previously suggested multi-zone model. The stratified thermal model is adopted in the control logic for a thermal chamber cooling test. The effects of taler- mal parameters and control parameters such as supply air temperature and Pl control factor are investigated by implementing the thermal chamber cooling test. The experimental results obtained show that the transient behavior of the air-conditioned space temperature are in good agreement with the simulation results of the stratified thermal model.

• KIEAE Journal
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• 제7권5호
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• pp.65-71
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• 2007

The purpose of this study was to analyze the difference of thermal sensation by radiant floor heating as ecological design element. The experimental investigations were carried out in climate chamber, and subjects were 34 college-age females in good health. The experimental variable was radiant heat by floor heating, and experimental controlled conditions were indoor temperature, relative humidity, and air velocity in climate chamber and clothing value and activity of subjects. The results are as follows. (1) Indoor temperature($21{\pm}0.5^{\circ}C$) in climate chamber were maintained as controlling. Clothing values of the subjects were controlled as average 0.73 clo. In the floor heating-off, globe temperature was average $23.2^{\circ}C$(22.4~24.1), but in the floor heating-on, globe temperature was average $24.8^{\circ}C$(23.0~25.5). (2) In the floor heating-off, thermal sensation rating was average -1.03(slightly cool), in the floor heating-on, thermal sensation rating was average +1.03(slightly warm). (3) There were the differences of thermal sensation by radiant floor heating although indoor temperatures were maintained in an equal state. (4) The thermal sensation rating was tending upward according as the globe temperature was getting higher.

• International Journal of Aeronautical and Space Sciences
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• 제11권1호
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• pp.26-30
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• 2010

The present paper studies the thermally-induced vibration phenomenon of the flexible space boom structure. In order to simulate the thermally-induced vibration phenomenon of the flexible thin boom structure of the spacecraft with the attached tip mass in space, the thermally-induced vibration including thermal flutter is experimentally investigated at various thermal environments using a heating lamp in vacuum chamber. In this experimental study, fluctuating characteristics, natural frequency and thermal strains of the thermally-induced vibration are parametrically investigated at various thermal environment conditions. Finally the thermally-induced vibration of the flexible boom structure of the orbiting earth satellite in solar radiation environment from the earth eclipse region including umbra and penumbra is simulated using the power control of the heating lamp in the vacuum chamber.

• 한국항공우주학회지
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• 제38권8호
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• pp.842-847
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• 2010

본 연구는 인공위성 탑재품 열진공 시험시 적용된 열환경 조건, 탑재품 시험용 열진공 챔버의 형상, 위성체 내부의 열환경들을 고려하여 열진공 시험 과정을 모사하는 수치해석모델을 설계하여 열해석을 수행하였다. 피시험체인 탑재품과 열진공 챔버 구성요소의 시간에 따른 온도 변화를 보여주는 과도적(Transient) 해석 결과를 구할 수 있다. 열해석에 의한 성능향상 설계를 반영하여 업그레이드한 열진공 챔버를 이용한 탑재품 환경시험을 수행하였으며, 시험 결과와 열해석 결과에 대한 비교/검증을 수행하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1344-1346
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• 1995

The interrupting capability of gas circuit breakers(GCB) are critically dependent on the pressure rise of the puffer cylinder or the thermal expansion chamber at current zero. Therefore it's very useful for the designers to know the pressure rise there at the design stage. Much effort has been done to predict the pressure rise in the puffer cylinder or the thermal expansion chamber in no-load condition. Thus, we now calculate it with reasonable accuracy with the simple programs coded by ourselves or with the commercial CFD packages. However, it has been still difficult problem to calculate it under the existence of arc. In this paper, we propose a method which can be used to predict the pressure rise in the thermal expansion chamber of thermal expansion type GCB. The method has been applied to the 25.8kV 25kA thermal expansion type model GCB and the calculated results have been compared with those from experiment.