• 한국전기전자재료학회논문지
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• 제16권9호
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• pp.765-770
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• 2003

We have developed a low-temperature, and low-pressure radical induced oxidation (RIO) technology, so that high-quality ultrathin silicon dioxide layers have been effectively produced with a high reproducibility, and successfully employed to realize high performace SiGe heterostructure complementary MOSFETs (HCMOS) lot the first time. The obtained oxide layer showed comparable leakage and breakdown properties to conventional furnace gate oxides, and no hysteresis was observed during high-frequency capacitance-voltage characterization. Strained SiGe HCMOS transistors with a 2.5 nm-thick gate oxide layer grown by this method exhibited excellent device properties. These suggest that the present technique is particularly suitable for HCMOS devices requiring a fast and high-precision gate oxidation process with a low thermal budget.

• Nuclear Engineering and Technology
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• 제52권3호
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• pp.633-646
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• 2020

Imaging and scattering techniques using thermal neutrons allow to analyze complex specimens in scientific and industrial researches. Owing to this advantage, there have been a considerable demand for neutron facilities in the industrial sector. Among neutron sources, an accelerator driven compact neutron source is the only one that can satisfy the various requirements-construction budget, facility size, and required neutron flux-of industrial applications. In this paper, a target, moderator, and reflector (TMR) system for low-energy proton-accelerator driven compact thermal neutron source was designed via Monte Carlo simulations. For 10-30 MeV proton beams, the optimal conditions of the beryllium target were determined by considering the neutron yield and the blistering of the target. For a non-borated polyethylene moderator, the neutronic properties were verified based on its thickness. For a reflector, three candidates-light water, beryllium, and graphite-were considered as reflector materials, and the optimal conditions were identified. The results verified that the neutronic intensity varied in the order beryllium > light water > graphite, the compacter size in the order light water < beryllium < graphite and the shorter emission time in the order graphite < light water < beryllium. The performance of the designed TMR system was compared with that of existing facilities and were laid between performance of existing facilities.

• 한국자기학회지
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• 제16권1호
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• pp.75-78
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• 2006

텅스턴-보론-카본질소 화합물 박막(W-B-C-N)을 만들기 위하여 박막내에 보론과 카본 그리고 질소의 불순물을 주입한 다음 결정구조를 조사하였으며, 이러한 박막의 식각 특성을 조사하기 위하여 고온에서 열처리한 다음 Cu박막을 W-B-C-N 박막위에 증착한 다음에 열처리하였고 여기에서 열적인 특성을 조사하였다. $1000\;{\AA}$의 박막을 RF magnetron sputtering방법을 이용하여 증착한 후에 박막의 전기적구조적인 특성을 측정하였으며, scratch test를 통해 박막의 결합력을 측정하였고, XRD측정을 통하여 결정성을 조사하였으며, 열처리한 후 etching을 하여 nomarski 현미경을 통하여 확산방지막의 안정성을 조사하였다. 이로부터 확산방지막내의 보론과 카본 질소 등의 불순물이 들어감에 따라 Cu가 Si 속으로 얼마나 들어가는가를 효과적으로 조사하였다. W-B-C-N 확산방지막의 역할은 $850^{\circ}C$까지 고온 열처리를 하는 경우에 Cu 원자가 Si 속으로 확산되어 나가는 것을 효과적으로 방지하는 것을 알 수 있었다. 텅스텐-보론-카본질소 화합물 박막의 비저항은 질소 가스의 유량비를 조절함으로써 쉽게 조절할 수 있었으며, 텅스텐-보론-카본-질소 화합물 박막은 Cu 확산방지막으로 적용했을 때 적절한 질소 농도가 들어간 확산방지막에서는 효과적으로 Cu의 확산을 방지하는 것을 알 수 있었다.

• 한국정보통신학회논문지
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• 제21권1호
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• pp.229-236
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• 2017

일반적으로 모노펄스 레이더의 오차 수준은 다중경로 간섭, 글린트, 동적 지연오차 등의 환경적 오차 요인이 제거된 이상적인 경우를 가정하고 있다. 따라서 지금까지는 외부 환경적 오차 요인이 포함된 모노펄스 레이더의 계측 불확도를 추정하여 왔다. 본 연구에서는 각기 다른 특성의 표적에 대해서 어떤 종류의 오차 요인이 모노펄스 레이더 계측 불확도 에 영향을 미치는지 살펴보았다. 이를 실험적으로 증명하기 위해서 먼저 환경적 오차 요인이 완벽히 제거된 이상적인 환경에서의 모의 실험 결과를 기술하였다. 이 결과와 함께 지상에 고정된 교정장치, 저속으로 기동하는 교정구, 고속으로 기동하는 비행표적에 대한 불확도를 추정함으로써 오차 요인이 포함된 각기 다른 특성의 표적에 대한 모노펄스 레이더 계측 불확도를 정량적으로 비교 고찰하였다.

• 대기
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• 제31권2호
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• pp.199-214
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• 2021

A record-breaking high surface air temperature of 41.0℃ was observed on 1 August 2018 at Hongcheon, South Korea. In this study, to quantitatively determine the formation mechanism of this extremely high surface air temperature, particularly considering the contributions of the foehn and the foehnlike wind, observational data from Korea Meteorological Administration (KMA) and the Weather Research and Forecasting (WRF) model were utilized. In the backward trajectory analysis, trajectories of 100 air parcels were released from the surface over Hongcheon at 1600 LST on 1 August 2018. Among them, the 47 trajectories (38 trajectories) are tracked back above (below) heights of 1.4 km above mean sea level at 0900 LST 31 July 2018 and are defined as upper (lower) routes. Lagrangian energy budget analysis shows that for the upper routes, adiabatic heating (11.886 × 10³ J kg^-1) accounts for about 77% of the increase in the thermal energy transfer to the air parcels, while the rest (23%) is diabatic heating (3.650 × 10³ J kg^-1). On the other hand, for the lower routes, adiabatic heating (6.111 × 10³ J kg^-1) accounts for about 49% of the increase, the rest (51%) being diabatic heating (6.295 × 10³ J kg^-1). Even though the contribution of the diabatic heating to the increase in the air temperature rather varies according to the routes, the contribution of the diabatic heating should be considered. The diabatic heating is caused by direct heating associated with surface sensible heat flux and heating associated with the turbulent mixing. This mechanism is the Type 4 foehn described in Takane and Kusaka (2011). It is concluded that Type 4 foehn wind occurs and plays an important role in the extreme event on 1 August 2018.

• 한국초전도ㆍ저온공학회논문지
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• 제26권1호
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• pp.20-24
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• 2024

Over the past four years, as the COVID-19 pandemic has struck the world, cold chain of COVID-19 vaccination has become a hot topic. In order to overcome the pandemic situation, it is necessary to establish a cold chain that maintains a low-temperature environment below approximately 203K (-70℃), which is the appropriate storage temperature for vaccines, from vaccine suppliers to local hospitals. Usually, cryocoolers are used to maintain low temperatures, but it is difficult for small-scale local distribution to have cryocooler due to budget and power supply issues. Accordingly, in this paper, a cryogenic TSU (Thermal storage unit) system for vaccination cold chain is designed that can maintain low temperatures below -70℃C for a long time without using a cryocooler. The performance of the TSU system according to the energy storage material for using as TSU is experimentally evaluated. In the experiments, four types of cold storage materials were used: 20% DMSO aqueous solution, 30% DMSO aqueous solution, paraffin wax, and tofu. Prior to the experiment, the specific heat of the cold storage materials at low temperature were measured. Through this, the thermal diffusivity of the materials was calculated, and paraffin wax had the lowest value. As a result of the TSU system's low-temperature maintenance test, paraffin wax showed the best low-temperature maintenance performance. And it recorded a low-temperature maintenance time that was about 24% longer than other materials. As a result of analyzing the temperature trend by location within the TSU system, it was observed that heat intrusion from the outside was not well transmitted to the low temperature area due to the low thermal conductivity of paraffin wax. Therefore, in the TSU system for vaccine storage, it was experimentally verified that the lower the thermal diffusivity of the cold storage material, the better low temperature maintenance performance.

• 생물환경조절학회지
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• 제20권2호
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• pp.83-92
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• 2011

본 연구는 주간에 온실 내에서 환기로 인하여 배출되는 잉여 태양에너지를 축열할 적정 축열 시스템 설계의 기초자료를 제공할 목적으로 확보한 표준기상년(TMY; Typical Meteorological Year) 데이터를 이용하여 주요 온실 형태별로 잉여 태양에너지를 분석하였다. 그 연구결과를 요약하면 다음과 같다. 07-자동화-1형 및 08-자동화-1형의 경우, 온실형태에 관계없이 매우 유사한 열수지 경향을 보였다. 즉, 잉여 태양에너지가 차지하는 비율은 온실 형태별로 각각 약 20.0~29.0% 및 20.0~29.0% 정도로 나타났다. 그리고 소요 난방에너지를 온실 형태별로 각각 약 54.0~225.0% 및 53.0~218.0% 정도 보충할 수 있을 것으로 나타났다. 07-단동-1형과 07-단동-3형의 경우도 온실형태에 관계없이 매우 유사한 열수지 경향을 보였다. 즉, 잉여태양에너지가 차지하는 비율은 온실 형태별로 각각 약 20.0~26.0% 및 21.0~27.0% 정도로 나타났다. 그리고 소요 난방에너지를 온실 형태별로 각각 약 57.0~211.0% 및 62.0~228.0% 정도 보충할 수 있는 량이다. 그리고 온실형태에 관계없이 대관령 및 수원지역을 제외하면 나머지 지역은 잉여 태양에너지만으로도 난방에너지를 충당할 수 있음을 알 수 있었다.

• 전자공학회논문지A
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• 제31A권12호
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• pp.80-90
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• 1994

To develop VLSI of higher packing density with 0.5.mu.m gate length of less, semiconductor devices require shallow junction with higher doping concentration. the most common method to form the shallow junction is ion implantation, but in order to remove the implantation induced defect and activate the implanted impurities electrically, ion-implanted Si should be annealed at high temperature. In this annealing, impurities are diffused out and redistributed, creating deep PN junction. These make it more difficult to form the shallow junction. Accordingly, to miimize impurity redistribution, the thermal-budget should be kept minimum, that is. RTA needs to be used. This paper reports results of the diffusion characteristics of PSG film by varying Phosphorus weitht %/ Times and temperatures of RTA. From the SIMS.ASR.4-point probe analysis, it was found that low sheet resistance below 100 .OMEGA./ㅁand shallow junction depths below 0.2.mu.m can be obtained and the surface concentrations are measured by SIMS analysis was shown to range from 2.5*10$^{17}$ aroms/cm$^{3}$~3*10$^{20}$ aroms/cm$^{3}$. By depending on the RTA process of PSG film on Si, LDD-structured nMOSFET was fabricated. The junction depths andthe concentration of n-region were about 0.06.mu.m. 2.5*10$^{17}$ atom/cm$^{-3}$ , 4*10$^{17}$ atoms/cm$^{-3}$ and 8*10$^{17}$ atoms/cm$^{3}$, respectively. As for the electrical characteristics of nMOS with phosphorus junction for n- region formed by RTA, it was found that the characteristics of device were improved. It was shown that the results were mainly due to the reduction of electric field which decreases hot carriers.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.205-205
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• 2015

최근, 비정질 산화물 반도체를 이용한 TFT는 투명성, 유연성, 저비용, 저온공정이 가능하기 때문에 차세대 flat-panel 디스플레이의 back-plane TFT로써 다양한 방면에서 연구되고 있다. 산화물 반도체 In-Zn-O-시스템에서는 Gallium (Ga)을 suppressor로 사용한 a-In-Ga-Zn-O (a-IGZO) 뿐만 아니라, Magnesium (Mg), Hafnium (Hf), Tin (Sn), Zirconium (Zr) 등의 다양한 물질이 연구되었다. 그 중 Silicon (Si)은 Ga, Hf, Sn, Zr, Mg과 같은 suppressor에 비해 구하기 쉬우며 가격적인 측면에서도 저렴하다는 장점이 있다. solution 공정으로 제작한 산화물 반도체 TFT는 진공 시스템을 사용한 공정보다 공정시간이 짧고, 저비용, 대면적화가 가능하다는 장점이 있다. 하지만, 투명하고 유연한 device를 제작하기 위해서는 저온 공정과 low thermal budget은 필수적이다. 이러한 측면에서 MWI (Microwave Irradiation)는 저온공정이 가능하며, 짧은 공정 시간에도 불구하고 IZO 시스템의 산화물 반도체의 전기적 특성 향상을 기대할 수 있는 효율 적인 열처리 방법이다. 본 연구에서는 In-Zn-O 시스템의 TFT에서 silicon (Si)를 Suppressor로 사용한 a-Si-In-Zn-O (SIZO) TFT를 제작하여 두 가지 열처리 방법을 사용하여 TFT의 전기적 특성을 확인하였다. 첫 번째 방법은 Box Furnace를 사용하여 N2 분위기에서 $600^{\circ}C$의 온도로 30분간 열처리 하였으며, 두 번째는 MWI를 사용하여 1800 W 출력 (약 $100^{\circ}C$)에 2분간 열처리 하였다. MWI 열처리는 Box Furnace 열처리에 비해 저온 공정 및 짧은 시간에도 불구하고 향상된 전기적 특성을 확인 할 수 있었다.

• Asian Journal of Atmospheric Environment
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• 제10권1호
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• pp.42-50
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• 2016

This study presents a performance evaluation of four different land surface models (LSM) available in Weather Forecast Research (WRF). The research site was located in Haean Basin in South Korea. The basin is very unique by its geomorphology and topography. For a better representation of the complex terrain in the mesoscale model were used a high resolution topography data with a spatial resolution of 30 meters. Additionally, land-use layer was corrected by ground mapping data-sets. The observation equipments used in the study were an ultrasonic anemometer with a gas analyzer, an automatic weather station and a tethered balloon sonde. The model simulation covers a four-day period during autumn. The result shows significant impact of LSM on meteorological simulation. The best agreement between observation and simulation was found in the case of WRF with Noah LSM (WRF-Noah). The WRF with Rapid Update Cycle LSM (WRF-RUC) has a very good agreement with temperature profiles due to successfully predicted fog which appeared during measurements and affected the radiation budget at the basin floor. The WRF with Pleim and Xiu LSM (WRF-PX) and WRF with Thermal Diffusion LSM (WRF-TD) performed insufficiently for simulation of heat fluxes. Both overestimated the sensible and underestimated the latent heat fluxes during the daytime.