• 한국정밀공학회지
• /
• 제19권8호
• /
• pp.180-186
• /
• 2002

Hot Plate is the major unit that it used to remove damp of wafer surface, to strength adhesion of photoresist (PR) and to bake coated PR in FAB process of semiconductor. The badness of Hot Plate (HP) has directly influence upon the performance of wafer, it is necessary to guarantee the performance of HP. In this study, a reliability evaluation system has been designed and developed, which is to measure and to estimate thermal uniformity and flatness of HP in range of temperature 0~$250^\circC$. This system has included the techniques which measures and analyzes thermal uniformity using infrared thermal vision, and which compensates measuring error of flatness using laser displacement sensor For measuring flatness, a measurement stage of 3 axes are developed which adapts the precision encoder. The allowable error of this system in respect of thermal uniformity is less $than\pm0.1^\circC$ and in respect of flatness is less $than\pm$1mm . It is expected that the developed system can measure from $\Phi200mm\;(wafer 8＂)\;to\;\Phi300mm$ (wafer 12＂) and also can be used in performance test of the Cool Plate and industrial heater, etc.

• 한국전산유체공학회지
• /
• 제21권2호
• /
• pp.90-98
• /
• 2016

A numerical study is conducted on thermal performance of a large-area hot plate specially designed as a heating and cooling tool for thermal nanoimprint lithography process. The hot plate has a dimension of $240mm{\times}240mm{\times}20mm$, in which a series of cartridge heaters and cooling holes are installed. The material is stainless steel selected for enduring the high molding pressure. A numerical model based on the ANSYS Fluent is employed to predict the thermal behavior of the hot plate both in heating and cooling phases. The PID thermal control of the device is modeled by adding user defined functions. The results of numerical computation demonstrate that the use of cartridge heaters provides sufficient heat-up performance and the active liquid cooling in the cooling holes provides the required cool-down performance. However, a crucial technical issue is raised that the proposed design poses a large temperature non-uniformity in the steady heating phase and in the transient cooling phase. As a remedy, a new hot plate in which heat pipes are installed in the cooling holes is considered. The numerical results show that the installation of heat pipes could enhance the temperature uniformity both in the heating and cooling phases.

• 한국광학회지
• /
• 제18권2호
• /
• pp.135-141
• /
• 2007

완전한 2차원 배열을 갖는 중적외선 대역의 $320\times240$ 검출기를 사용하는 3세대 열상 장비의 설계 및 제작은 이차원 배열 검출기 제작 기술의 발달과 영상 신호처리 기술의 진전으로 인해 최근 더욱 더 활발히 이루어지고 있다. 본 논문은 다양한 응용 분야에서 적외선 센서로 사용될 수 있도록 하기 위하여 소형 경량화 제작을 목표로 한 3세대 열상장비의 이중 배율 적외선 카메라의 설계와 Defocus용 셔터 렌즈에 의한 영상기반 불균일 보정 방식에 대해 다룬다.

• 한국자동차공학회논문집
• /
• 제12권2호
• /
• pp.54-61
• /
• 2004

The engine-out flow is highly transient and hot, and may place tremendous thermal and inertial loads on a closed-coupled catalyst. Therefore, time-dependent and detailed flow and thermal field simulation may be crucial. The aim of this study is to develop combined chemical reaction and multi-dimensional fluid dynamic mathematical model and to study the effect of unsteady pulsating thermal and flow characteristics on thermal reliability of closed-coupled catalyst. The effect of cell density on the conversion performance under real running condition is also investigated. Unlike previous studies, the present study focuses on coupling between the problems of pulsating flow pattern and catalyst thermal response and conversion efficiency. The results are expressed in terms of temporal evolution of flow, pollutant and temperature distribution as well as transient characteristics of conversion efficiency. Fundamental understanding of the flow and thermal phenomena of closed-coupled catalyst under real running condition is presented. It is shown that instants of significantly low values of flow uniformity and conversion efficiency exist during exhaust blowdown and the temporal varaition of flow uniformity is very similar in pattern to one of conversion efficiency. It is also found that the location of hot spot in monolith is directly affected by transient flow pattern in closed-coupled catalyst.

• 설비공학논문집
• /
• 제18권10호
• /
• pp.819-825
• /
• 2006

In a SOFC/GT (solid oxide fuel cell/gas turbine) hybrid power generation system, the recuperator is an indispensible component to enhance system performance. Since the expansion ratio to the recuperator core is very large, generally, the effective header design to distribute the flow uniformly before entering the core is crucial to guarantee the required performance. In the present study, we focus on the design of a diffuser type recuperator header with a 90 degree turn inlet port. To reduce the flow separation and recirculation flows, multiple horizontal vanes are used. The number of horizontal vanes is varied from 0 to 24. The air flow velocity is measured at 40 points just behind the core outlet by using a hot wire anemometer. Then, the flow non-uniformity is evaluated from the measured flow velocity. The experimental results showed that inlet air velocity did not effect on relative flow non-uniformity. According to increasing the number of horizontal vanes, flow non-uniformity reduced about $40{\sim}50%$ than without using horizontal vanes.

• Environmental Engineering Research
• /
• 제23권4호
• /
• pp.397-405
• /
• 2018

As regulations governing the control of volatile organic compounds (VOCs) have become increasingly stringent in China, regenerative thermal oxidizers (RTOs) have been more frequently applied in medium- and high-concentration VOCs treatments. However, due to the lack of existing RTO-related research, experience remains a dominant factor for industrial application. This paper thus aimed to establish a model for industrial RTOs, using a transient simulation method and thermal equilibrium model to simulate the internal velocities and temperature distributions of an RTO across multiple cycles. A comparison showed an error of less than 5% between most correlating simulated and experimental measurement points, verifying that the simulation method was accurate. After verification, the velocity and temperature fields inside the RTO were simulated to study the uniformity of temperature and velocity within the packed beds: both fields displayed high uniformity after gas flowed through the honeycomb regenerator. The effects of air volume, VOCs concentrations, and valve switching times on the oxidation chamber temperature, RTO outlet temperature, and thermal efficiency (as well as their averages) were studied. The VOCs removal rate in this study was constantly above 98%, and the average thermal efficiency reached 90%.

• Carbon letters
• /
• 제25권
• /
• pp.25-32
• /
• 2018

In this study, a thermal-gradient chemical vapor infiltration (TG-CVI) process was numerically studied in order to enhance the deposition uniformity within the preform. The computational fluid dynamics technique was used to solve the governing equations for heat transfer and gas flow during the TG-CVI process for two- and three-dimensional (2-D and 3-D) models. The temperature profiles in the 2-D and 3-D models showed good agreement with each other and with the experimental results. The densification process was investigated in a 2-D axisymmetric model. Computation results showed the distribution of the SiC deposition rate within the preform. The results also showed that using two-zone heater gave better deposition uniformity.

• 대한설비공학회:학술대회논문집
• /
• 대한설비공학회 2007년도 동계학술발표대회 논문집
• /
• pp.635-639
• /
• 2007

In this study, optimal design and test of flat-plate heat pipe were carried out in order to improve both thermal response and surface temperature uniformity of heating plate. Experimental results show that the thermal response of flat-plate heat pipe is faster than that of a conventional heating type ones along with less weight and cost. The surface temperature uniformity is also improved.

• 한국항공우주학회지
• /
• 제38권10호
• /
• pp.1020-1025
• /
• 2010

탑재 교정용 흑체는 우주용 영상센서의 시간경과 및 재 구동에 따른 센서의 특성변화 교정을 통한 영상품질향상을 위해 적용된다. 본 논문에서 제안한 영상센서의 비균일 특성 교정을 위한 흑체 열설계는 저온에서 고온에 이르는 흑체의 온도정보 제공을 위한 흑체 가열용 히터, 흑체 가열 후 잔열 수송 및 심해우주로의 열 방출을 위한 히트파이프와 방열판 그리고 비교정임무 수행동안 흑체가 특정온도를 유지하며 원하는 시점에서 언제든지 교정임무 수행이 가능하도록 하는 방열판용 히터로 구성된다. 흑체 열설계에 대한 타당성을 궤도 열해석을 통해 입증하였다.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2015년도 춘계학술대회 논문집
• /
• pp.113-113
• /
• 2015

본 연구에서는 thermal evaporation법을 이용하여 제작한 CdTe 후막의 미세구조, 전기적 특성 및 X-선 조사에 따른 특성을 비교분석하였다. 기판온도를 $370{\sim}450^{\circ}C$로 변화시키며 증착하였으며, CdCl2 첨가에 따른 미세구조 변화를 관찰하였다. CdTe 막의 상 하부에 전극을 형성하여 I-V 특성을 평가하고, 실제 X-ray를 샘플에 조사하여 sensitivity를 측정하였다. 박막형성 초기에는 기판온도가 증가함에 따라 grain size가 증가하였지만, grain uniformity는 감소하였다. X-ray 특성향상을 위해서는 grain size와 uniformity 모두 중요한 인자이기 때문에 uniformity 향상을 위해 Cl을 첨가하였다. 미량의 Cl 첨가에서는 큰 변화를 보이지 않았지만 더 많은 양의 Cl 첨가 시, grain size 와 uniformity 모두 증가되는 것을 확인하였으며, 그에 따라 I-V, X-ray 조사 특성 모두 개선되는 것을 확인할 수 있었다.