• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.149-154
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• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• ETRI Journal
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• v.27 no.4
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• pp.433-438
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• 2005

We present a new type of silicon micro-probe card using a three-dimensional probe beam of the cantilever type. It was fabricated using KOH and dry etching, a porous silicon micromachining technique, and an Au electroplating process. The cantilever-type probe beam had a thickness of $5 {\mu}m$, and a width of $50{\mu}$ and a length of $800 {\mu}m$. The probe beam for pad contact was formed by the thermal expansion coefficient difference between the films. The maximum height of the curled probe beam was $170 {\mu}m$, and an annealing process was performed for 20 min at $500^{\circ}C$. The contact resistance of the newly fabricated probe card was less than $2{\Omega}$, and its lifetime was more than 20,000 turns.

• Journal of Biomedical Engineering Research
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• v.29 no.5
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• pp.343-347
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• 2008

Thermal conductivity, thermal diffusivity were measured in the atrium of a swine heart. Radiofrequency (RF) catheter ablation in an atrium has rapidly emerged at the treatment of symptomatic reentrant arrhythmia associated with accessory pathway or Atrioventricular (AV) node conduction. The thermal properties of an atrium are definitely necessary for these treatments because, in thermal treatments, conductivity and diffusivity are significant factors in the relationship between the applied RF power and the resulting atrium temperature rise. Thermal properties were measured using a self-heated thermistor probe. Thermistor probes were inserted into the tissue of interest and were used to supply heat within the tissue as well as to monitor the temperature rise in the tissue. The measurements were performed at temperatures of 25, 37, $50^{\circ}C$. Atrium thermal conductivity ranged from 5.17$\pm$0.12 mW/cm$^{\circ}C$ at $25^{\circ}C$ to 5.33$\pm$0.08 mW/cm$^{\circ}C$ at $37^{\circ}C$. Atrium thermal diffusivity ranged from 0.00132$\pm$0.00007$cm^2$/sec at $25^{\circ}C$ to 0.00138$\pm$0.00003 $cm^2$/sec at $50^{\circ}C$. This paper also present the thermal property comparison of both chambers of a heart (ventricle and atria).

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.9
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• pp.1220-1228
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• 2003

The mirage technique is proved to be powerful in measuring the thermal diffusivity of materials. In particular, its contactless nature makes it suitable for delicate samples and microscale structures. In this study, thermal-wave-coupling method is developed in a general form for both thermally thin and thick samples. In the suggested measuring scheme, the probe beam can be positioned close to the pump beam and the absolute position need not be measured. Therefore the new scheme provides a relatively simple yet effective way to determine the thermal diffusivity of thermally thick samples. Thermal diffusivities of bulk samples like Ni and Al were measured and the characteristics of mirage signal for a thin film were observed by using the mirage experimental setup. The apparent thermal diffusivity was measured by varying such parameters as probe beam height, size of pump beam, power of pump beam, and surface condition of sample. From the practical standpoint, it is shown that the size of the pump beam is the most important factor for accurate thermaldiffusivity measurement. Experiments using thin-film samples show that the thermal diffusivity of a substrate covered with thin film can be measured by photothermal mirage signals.

• Journal of Advanced Marine Engineering and Technology
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• v.25 no.2
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• pp.395-402
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• 2001

The gasoline engine tends to high performance, fuel economy, small-sized. Therefore, it is necessary to solve the problems on thermal load, abnormal combustion, etc, in the engine, Thine film instantaneous temperature measurement probe was made. And the manufactural method of probe was established. The instantaneous surface temperatures in the constant volume combustion chamber were measured by this probe and the heat flux was obtained by Fourier analysis. The authors measured the wall temperature of combustion chamber and computed the heat flux through the cylinder wall in order to understand the combustion characteristics depending on height of probe. For achieving this goal, the thin film instantaneous temperature probe was developed for analyzing the instantaneous surface wall temperature and unsteady heat flux on the constant volume combustion chamber.

• Journal of Advanced Marine Engineering and Technology
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• v.27 no.5
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• pp.624-632
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• 2003

In the gasoline engine industry. there has been a trend towards the development of high performance engines with improved fuel efficiency, reduced weight and smaller sizes. These trends help to solved engine problems related to thermal load and abnormal combustion. In order to investigate these Problems, a thin film-type probe for instantaneously measuring temperatures has been suggested. A method for manufacturing such a probe was established in this study. The instantaneous surface temperature of a constant volume combustion chamber was measured by this probe and the heat flux was obtained through Fourier analysis. A peak instantaneous temperature was obtained after 55∼60 ms from ignition and the temperature increased according to an equivalence ratio and varied differently according to the position of the probe. Total heat loss during combustion period was affected by the equivalence ratio and differed widely in accordance to the position of the probe.

• Journal of the Korean Society of Industry Convergence
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• v.6 no.3
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• pp.193-200
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• 2003

In the production of internal combustion engines, there has been a move towards the development of high performance engines with improved fuel efficiency, lighter weight and smaller sizes. These trends help to answer problems in engines related to thermal load and abnormal combustion. In order to investigate these problems, a thin film-type probe for instantaneously measuring temperatures has been suggested. A method for manufacturing such a probe was established in this study. The instantaneous surface temperature of a constant volume combustion chamber was measured by this probe and the heat flux was obtained through Fourier analysis. In order to thoroughly understand the characteristics of combustion, the authors measured the wall temperature of the combustion chamber and computed heat flux through a cylinder wall while varying the protrusion height of the probe. For achieving the above goals, a instantaneous temperature probe was developed, thereby making possible the analysis of the instantaneous temperature of wall surface and the detection of unsteady heat flux in the constant volume combustion chamber.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.21.2-21.2
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• 2005

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.7
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• pp.1055-1062
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• 2004

As for the Production of internal combustion engines there has been further movement toward development of high Performance engines with improved fuel efficiency as well as a lightweight and a small size. These tendencies help to solve the problems in engines for example, such as thermal load. abnormal combustion and so on. In order to investigate these Problems, a thin film-type probe for measuring instantaneous temperature has been suggested. A method for manufacturing such a probe was established in this study The instantaneous surface temperature of a constant volume combustion chamber was measured by using this probe and the heat flux was obtained through Fourier analysis In order to thoroughly understand the characteristics of combustion. authors measured wall temperature of combustion chamber and calculated heat flux through a cylinder wall while varying the protrusion height of probe. For these Purposes, the instantaneous surface temperature probe was developed. thereby making possible the analysis of instantaneous temperature of wall surface and the detection of unsteady heat flux in the constant volume combustion chamber.

• Journal of the Korean Geotechnical Society
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• v.26 no.5
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• pp.27-36
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• 2010

Thermal conductivities using the thermal probe method were determined for frost susceptible soil with three types of discarded tire powder under the condition of a temperature variation from $-20^{\circ}C{\sim}+10^{\circ}C$. Also, the amount of unfrozen water contents was measured by the pulsed NMR method. The variation of unfrozen water content in the experimental condition could be expressed as a function of temperature given by an exponential equation. A new model for calculating the thermal conductivity of frozen soil was proposed. It is extended from the two element method and subdivided into three constituent elements.