• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.3-8
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• 2007

A machining system that generates accurate relative motions between the tool and workpiece is required to realize ultra precise machining or measurements. Accuracy improvements for each element of the machine are also required. This paper proposes a machining system that uses a compensation device for the six-degree-of-freedom (6-DOF) motion error between the tool and workpiece. The compensation device eliminates elastic and thermal errors of the joints and links due to temperature fluctuations and external forces. A hexapod parallel kinematics mechanism installed between the tool spindle and surface plate is passively actuated by a conventional machine. Then the parallel mechanism measures the 6-DOF motions. We describe the conception and fundamentals of the system and test a passively extensible strut with a compensation device for the joint errors.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of the Microelectronics and Packaging Society
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• v.20 no.2
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• pp.23-28
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• 2013

Microlens array as basic element of the optical system have been fabricated with various focal length (mainly with long focal length) depending on the purpose of application. In this paper, the microlens arrays were fabricated for observing fluorescent images within sol-gel. Though the fluorescent signal is very low, the microlens array can help obtaining clear images through extracting the fluorescent light from sol-gel. We fabricated microlens arrays with short focal length, which can extract the light using photoresist thermal reflow method. In the experiment, the diameter of microlens decreased after thermal reflow because the solvent within the photoresist was vaporized. Therefore, to compensate the shape error by this reduction, microlens diameter in photomask was altered and spin-coat recipe of photoresist were modified.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.601-603
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• 2005

Refocusing methods are used to compensate optical performance degradation of high resolution satellite camera during on-orbit operation. Due to mechanical vibration during launch and thermal vacuum environment of space where camera is exposed, the alignment of optical system may have error. The focusing error is dominant of misalignment and caused by the de-space error of secondary mirror of catoptric camera, which is most sensitive to vibration and space environment. The high resolution camera of SPOT, Pleiades and KOMPSAT2 have refocusing device to adjust focusing during orbital operation while QuickBird of US does not use on orbit refocusing method. For the Korsch type optical configuration which is preferred for large aperture space remote sensing camera, secondary mirror and folding mirror are available as refocusing element.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.9
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• pp.86-93
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• 2010

Any relative deformation between the cutting tool and the workpiece at the machining point, results directly in form and dimensional errors. The source of relative deformations between the cutting tool and the workpiece at the contact point may be due to thermal, weight, and cutting forces. Thermal and weight deformations can be measured at various positions of the machine tool and stored in the compensation registers of the CNC unit and compensated the errors during machining. However, the cutting force induced errors are difficult to compensate because estimation of cutting forces are difficult. To minimize the error induced by cutting forces, it is important to improve the machining accuracy. This paper presents the pre-calculated method of form error induced by cutting forces. In order to estimate cutting forces, Isakov method is used and the method is verified by comparing with the experimental results. In order to this, a cylindrical-outer-diameter turning experiments are carried out according to cutting conditions.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1660-1665
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• 2006

Drop placement accuracy and precision are the critical performance values of industrial ink jet deposition systems. Imperfect components and environments have severe impacts on drop placement. Litrex has identified over 120 error sources and developed engineering solutions to address the errors. In this paper, improved results using thermal compensation and stage mapping techniques are demonstrated. A recent progress in inkjet fabrication of multi-color electrophoretic display on flexible substrate with large distortion is also demonstrated.

• Bulletin of the Korean Chemical Society
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• v.19 no.8
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• pp.868-874
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• 1998

An equivalent retention has been experimentally observed in thermal field-flow fractionation (ThFFF) for different polymer-solvent systems. It is shown that iso-retention between two sets of polymer-solvent systems can be obtained by adjusting the temperature difference (ΔT) according to the difference in the ratio of ordinary diffusion coefficient to thermal diffusion coefficient. This method uses a compensation of field strength (ΔT) in ThFFF at a fixed condition of cold wall temperature. It is applied for the calculation of molecular weight of polymers based on a calibration run of different standards obtained at an adjusted AT. The polymer standards used in this study are polystyrene (PS), polymethylmethacrylate (PMMA), and polytetrahydrofuran (PTHF). Three carrier solvents, tetrahydrofuran (THF), methylethylketone (MEK) and ethylacetate (ETAc) were employed. Though the accuracy in the calculation of molecular weight is dependent on the difference in the slope of log λ vs. log M which is related to Mark-Houwink constant a, it shows reasonable agreement within about 6% of relative error in molecular weight calculation for the polymer-solvent systems having similar a value.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.598-603
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• 2019

Three-dimensional shape measurement technology is used in various industries. Among them, optical three-dimensional shape measurement techniques based on the optical trigonometry are mainly used in the field of semiconductor product inspection, where large quantities of three-dimensional shape measurements are made daily in factories and fine measurements are also required. The light source and the drive circuit, which are components of three-dimensional measurement equipment based on this optical trigonometry, produce heat generated by prolonged operation, and may be exposed to conditions where the ambient temperature is not constant, resulting in temperature-induced measurement errors. In this study, the compensation method of the Thermal Errors for Phase Measuring Profilometry is proposed. Three-Dimensional Shape Measurement Equipment based on Phase Measuring Profilometry is implemented to measure the height of an object and ambient temperature for 10 Hours, and a regression line was obtained line by making simple linear regression using measured temperature and height values. This regression line was used to correct the error of the height measurement according to the temperature, and thermal error was from 139.88 um(Micrometer) to 13.12 um.

• Proceedings of the KIEE Conference
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• 1998.07b
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• pp.423-425
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• 1998

In this paper, a novel Programmable Signal Conditioner(PSC) for Thermo Couple(T/C) without variable-resistance is proposed. It is fabricated by using a fully digitalized error-correction and calibration algorithm. In signal processing of T/C, since the output voltage of T/C is nonlinear and its level is very low, the circuitry become very complicated to reduce the converting error and identify the true thermal voltage signal. The newly proposed PSC has compensation and calibration algorithm not using variable resistor. Moreover structure can be very simple and it has highly precise output characteristics.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.10
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• pp.1155-1162
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• 2004

This paper is the forth paper of several companion papers which compare the method of Air-Fuel ratio determination. In the previous work, various AFR calculations were performed for various fuels and the results were compared with each other. The comparison, however, were limited to numerical value and estimation of each equation or method was insufficient. In this paper, the overall estimation of the methods was attempted. Also, the method of trouble shooting of instrumentation was presented. Through the estimation of methods, it is concluded that the Eltinge method contains inherently the most perfect thermal dissociation model as far as the exhaust composition is concerned; therefore, this might be regarded as the most general equation of AFR determination among the existing ones. The others might be considered as approximate form. In addition, the mal-distribution factor in Eltinge method is qualitatively equivalent to thermal dissociation chemical equilibrium constant K. Lastly, it is illustrated that all instrumentation error, including the sampling line leakage, can be easily detected through the analyzing the exhaust component on the Eltinge chart.