• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.857-863
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• 2017

In this paper, the process of electro Ni and electro Cr plating is studied for the purpose of thermal barrier to protect the inner wall combustion chamber. The chamber is under the environment of very high temperature and high pressure when propellants burn in there. As one of the thermal barrier coatings, Zr-based thermal spray coating has been applied to the chamber. However, peeling of coating layer can occur under such a hard condition because of the difference of thermal expansion coefficients between the ceramic and the metallic wall. We study the characteristics of Ni-Cr coating and establish its process. It is found that the thickness of over $100{\mu}m$ of Ni and Cr coating layers with the uniformity of ${\pm}10%$ can be obtained with the used of as-developed plating bath.

• Journal of the Korean Society of Safety
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• v.20 no.2 s.70
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• pp.1-5
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• 2005

An experimental study was conducted to develop an understanding of failure of ceramic coating when subjected to a thermal cycling. Number of cycles to failure were decreased as the coating thickness and the oxide of bond coat were increased. Using the finite element method, an analysis of stress distribution in ceramic coatings was performed. Radial compressive stress was increased in the top/bond coat interface with increasing coating thickness and oxide of bond coat.

• Journal of ILASS-Korea
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• v.18 no.4
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• pp.209-214
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• 2013

The present study aims to determine the optimized shape for the maximum electric energy production of building integrated photovoltaic system (BIPV) noise barrier through numerical analysis. The shape of BIPV noise barrier is one of the important factors in determining angle difference between direction vector of the sun and normal vector of the sound barrier surface. This study simulated numerically the flow and thermal fields for different angles in the range from $90^{\circ}$ to $180^{\circ}$, and from the results, the amount of isolation onto noise barrier surface was estimated along the angle between ground and top side of noise barrier. The commercial CFD code (Fluent V. 13.0) was used for calculation. It was found that the maximum amount of insolation per unit area was 19.6 MJ for $105^{\circ}$ case during a day in summer and was estimated 12.4 MJ in $150^{\circ}$ case during a day in winter. The results of the summer and winter cases showed the different tendency and this result would be useful in determining the appropriate shape of noise barrier which can be mounted under various circumstances.

• Korean Journal of Digital Imaging in Medicine
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• v.12 no.1
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• pp.15-18
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• 2010

Main component of radiography barrier aprons is lead. To manufacture a lead-free barrier sheath, barium sulfate and organic iodine-based chemicals should be mixed with rubber. Barrier capacity was tested in the medical field. To improve adaptation of rubber with the mixture, raw materials went through milling, agitation, and extruding processes. Three sheaths were manufactured with 30%, 80%, and 120% sulfate barium, respectively. This study found 10% lower barrier capacity of lead-free barrier than the traditional lead-containing rubber sheath. Problems, however, were confronted during the agitation and extruding processes. Mixing with rubber was a technically demanding job. Inconsistent depth, problems with thermal processing and dissipation were encountered as well.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.344-344
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• 2010

A capacitor with engineered tunnel barrier composed of High-k materials has been fabricated. Variable oxide thickness (VARIOT) barrier consisting of thin SiO2/HfO2/Al2O3 (2/1/3 nm) dielectric layers were used as engineered tunneling barrier. We studied the electrical characteristics of multi stacked tunnel layers for various RTA (Rapid Thermal Anneal) and FGA (Forming Gas Anneal) temperature.

• Advances in materials Research
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• v.8 no.4
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• pp.275-293
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• 2019

The engine parts material used in gas turbines (GTs) should be resistant to high-temperature variations. Thermal barrier coatings (TBCs) for gas turbine blades are found to have a significant effect on prolonging the life cycle of turbine blades by providing additional heat resistance. This work is to study the performance of TBCs on the high-temperature environment of the turbine blades. It is understood that this coating will increase the lifecycles of blade parts and decrease maintainence and repair costs. Experiments were performed on the gas turbine blade to see the effect of TBCs in different combinations of materials through the air plasma method. Three-layered coatings using materials INCONEL 718 as base coating, NiCoCrAIY as middle coating, and La₂Ce₂O₇ as the top coating was applied. Finite element analysis was performed using a two-dimensional method to optimize the suitable formulation of coatings on the blade. Temperature distributions for different combinations of coatings layers with different materials and thickness were studied. Additionally, three-dimensional thermal stress analysis was performed on the blade with a commercial code. Results on the effect of TBCs shows a significant improvement in thermal resistance compared to the uncoated gas turbine blade.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.14-19
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• 2002

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.195-195
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• 2015

반도체 제조 시 ohmic contact을 형성하고, barrier metal layer형성을 위해 NH3 기체를 사용하는 rapid thermal nitridation (RTN)은 반도체 공정에 있어 매우 중요한 핵심 기술이다. 그러나 공정 진행 시 발생하는 공정 부산물에 의한 chamber오염으로 인해 매우 정확히 입사 되어야 할 thermal energy의 controllability가 저하되고 있어, 미세 공정능력 구현의 한계에 부닥치고 있다. 본 연구에서는 quartz plate liner를 적용하여 RTN 공정에서 발생하는 공정 부산물인 ammonium chloride (NH4Cl)의 chamber 표면 증착을 최소화하였고, 공정 진행 온도의 controllability를 확보하였다.

• Proceedings of the KWS Conference
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• 1998.05a
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• pp.263-265
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• 1998

• Proceedings of the KWS Conference
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• 1996.05a
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• pp.133-135
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• 1996