Preparation of SnO$_2$ Thin Films by Chemical Vapor Deposition Using Hydrolysis of SnCla$_4$ and Gas-sensing Characterisics of the Film -Effect of Deposition Variables on the Deposition Behavior and the Electrical Resistivity of SnO$_2$ Thin Film-
(SnCl$_4$ 가수분해 반응의 화학증착법에 의한 SnO$_2$ 박막의 제조 및 가스센서 특징(I) Preparation of SnO2 Thin Films by chemical Vapor Deposition Using Hydrolysis of SnCl4 and gas-sensing characteristics of the Film)
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- Journal of Surface Science and Engineering
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- v.23 no.2
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- pp.18-23
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- 1990