한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제23권2호
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- Pages.18-23
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- 1990
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
SnCl$_4$ 가수분해 반응의 화학증착법에 의한 SnO$_2$ 박막의 제조 및 가스센서 특징(I) Preparation of SnO2 Thin Films by chemical Vapor Deposition Using Hydrolysis of SnCl4 and gas-sensing characteristics of the Film
Preparation of SnO$_2$ Thin Films by Chemical Vapor Deposition Using Hydrolysis of SnCla$_4$ and Gas-sensing Characterisics of the Film -Effect of Deposition Variables on the Deposition Behavior and the Electrical Resistivity of SnO$_2$ Thin Film-
초록
Thin films of tin oxide were prepared by chemical vapor deposition (C.V>D) using the hydrolysis reaction of SnCl4, Deposition rate increased with the increase of temperature up to
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