The Etching Properties of SBT Thin Films in Cl$_2$ Inductively Coupled Plasma
(Cl$_2$ 유도결합 플라즈마를 이용한 SBT 박막의 식각특성)
-
- The Transactions of the Korean Institute of Electrical Engineers C
- /
- v.50 no.5
- /
- pp.211-215
- /
- 2001