• Title/Summary/Keyword: TOF method

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Optimization of Backside Etching with High Uniformity for Large Area Transmission-Type Modulator

  • Lee, Soo-Kyung;Na, Byung-Hoon;Ju, Gun-Wu;Choi, Hee-Ju;Lee, Yong-Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.319-320
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    • 2012
  • Large aperture optical modulator called optical shutter is a key component to realize time-of-flight (TOF) based three dimensional (3D) imaging systems [1-2]. The transmission type electro-absorption modulator (EAM) is a prime candidate for 3D imaging systems due to its advantages such as small size, high modulation performance [3], and ease of forming two dimensional (2D) array over large area [4]. In order to use the EAM for 3D imaging systems, it is crucial to remove GaAs substrate over large area so as to obtain high uniformity modulation performance at 850 nm. In this study, we propose and experimentally demonstrate techniques for backside etching of GaAs substrate over a large area having high uniformity. Various methods such as lapping and polishing, dry etching for anisotropic etching, and wet etching ([20%] C6H8O7 : H2O2 = 5:1) for high selectivity backside etching [5] are employed. A high transmittance of 80% over the large aperture area ($5{\times}5mm^2$) can be obtained with good uniformity through optimized backside etching method. These results reveal that the proposed methods for backside etching can etch the substrate over a large area with high uniformity, and the EAM fabricated by using backside etching method is an excellent candidate as optical shutter for 3D imaging systems.

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Fibrinolytic Activity and Proteomic Analysis of Bacillus licheniformis HK-12 Isolated from Chungkuk-Jang (청국장에서 분리한 Bacillus licheniformis HK-12의 혈전용해활성과 프로테옴 분석)

  • Sohn, Byung-Hee;Kwon, Sang-Chul;Oh, Kye-Heon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.3
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    • pp.800-806
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    • 2008
  • The strain HK-12 was enriched and isolated from naturally fermented soybean for the production of fibrinolytic enzyme and the proteome of this enzyme induced during the incubation period was analyzed. The activity of fibrinolytic enzyme derived from supernatants of the HK-12 culture was performed by fibrin plate method for solid fibrinolytic activity. As the result, the fibrinolytic activity of HK-12 grown on the nutrient agar media was about 2.3 times greater than that of plasmin used as standard. The purified enzyme was prepared by a series of purification process including ammonium sulfate precipitation, DEAE-cellulose, Sephadex chromatography. The molecular weight of the enzyme was determined to approximately 23kDa with SDS-PAGE. In order to examine which strain HK-12 proteins increased or decreased during the incubation period, 2-DE analysis was performed. Protein spot #1 significantly expressed on the 2-DE gel of bacteria cultivated for 36-hrs was analysed. As the result of protein sequence analysis using MALDI-TOF MS, one protein was identified as serine protein kinase (PrkA).

A Study on the Strain Measurement of Structure object by Electronic Process and Laser Interferometry (전자처리 및 Laser간섭에 의한 구조물의 Strain 측정에 관한 연구)

  • Jung, W.K.;Kim, K.S.;Yang, S.P.;Jung, H.C.;Kim, J.H.
    • Journal of the Korean Society for Precision Engineering
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    • v.12 no.10
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    • pp.40-49
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    • 1995
  • This paper presents the performance and problems in analysis method and testing system of Electronic Speckle Pattern Interferometry (ESPI) method, in measuring two - dimensional in-plane displacement. The anyalysis result of measurement by ESPE is quite comparable to that tof measurement by strain gauge method. This implies that the method of ESPE is a very effective tool in non-contact two-dimensional in-plane strain analysis. But there is a controversal point, measurment error. This error is discussed to be affected not by ESPE method itself, but by its analysis scheme of the interference fringe, where the first-order interpolation has been applied to the points of strain measured. In this case, it is turned out that the more errors would be occurred in the large interval of fringe. And so this paper describes a computer method for drawing when the height is available only for some arbitrary collection of points. The method is based on a distance-weighted, last- squares approximation technique with the weight varying with the distance of the data points.

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A Simulation of Diffusion coefficients for electrons in $SF_6$-Ar Gas Mixtures (시뮬레이션에 의한 $SF_6$-Ar혼합기체의 확산계수)

  • Seong, Nak-Jin;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 2006.10b
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    • pp.163-166
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    • 2006
  • Energy distribution function for electrons in $SF_6$-Ar mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range 30${\sim}$300(Td) by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2(%) and 0.5(%) $SF_6$-Ar mixtures were measured by time-of-flight(TOF) method, The results show that the deduced longitudinal diffusion coefficients and transverse diffusion coefficients agree reasonably well with theoretical for a rang of E/N values The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

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Ionization and Attachment Coefficients in Mixtures of $SF_6$ and He ($SF_6-He$ 혼합기체의 전리와 부착계수)

  • Kim, Sang-Nam
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2005.05a
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    • pp.342-345
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    • 2005
  • This paper describes the electron energy distribution function characteristics in $SF_6-He$ gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation(MCS) and Boltzmann equation(BE) method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by time of flight(TOF) method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.

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Diffusion Coefficients for Electrons in SF6-Ar Gas Mixtures by MCS-BEq (MCSBEq에 의한 SF6-Ar혼합기체의 확산계수)

  • Kim, Sang-Nam
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.64 no.3
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    • pp.125-129
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    • 2015
  • Energy distribution function for electrons in SF6-Ar mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range 30~300[Td] by a two term Boltzmann equation and a Monte Carlo Simulation using a set of electron cross sections determined by other authors experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6-Ar$ mixtures were measured by time-of-flight(TOF) method, The results show that the deduced longitudinal diffusion coefficients and transverse diffusion coefficients agree reasonably well with theoretical for a rang of E/N values. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

Improved Calibration for the Analysis of Emerging Contaminants in Wastewater Using Ultra High Performance Liquid Chromatography and Time-of-Flight Mass Spectrometry

  • Pellinen, Jukka;Lepisto, Riikka-Juulia;Savolainen, Santeri
    • Mass Spectrometry Letters
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    • v.9 no.3
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    • pp.77-80
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    • 2018
  • The focus of this paper is to present techniques to overcome certain difficulties in quantitative analysis with a time-of-flight mass spectrometer (TOF-MS). The method is based on conventional solid-phase extraction, followed by reversed-phase ultra high performance liquid chromatography of the extract, and mass spectrometric analysis. The target compounds included atenolol, atrazine, caffeine, carbamazepine, diclofenac, estrone, ibuprofen, naproxen, simazine, sucralose, sulfamethoxazole, and triclosan. The matrix effects caused by high concentrations of organic compounds in wastewater are especially significant in electrospray ionization mass spectroscopy. Internal-standard calibration with isotopically labeled standards corrects the results for many matrix effects, but some peculiarities were observed. The problems encountered in quantitation of carbamazepine and triclosan, due to nonlinear calibration were solved by changing the internal standard and using a narrower mass window. With simazine, the use of a quadratic calibration curve was the best solution.

Energy Distribution Function in $SF_6-Ar$ Mixtures Gas used by Simulation (MCS-BEq 시뮬레이션에 의한 $SF_6-Ar$ 에너지 분포함수)

  • Kim, Sang-Nam
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2007.05a
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    • pp.193-196
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    • 2007
  • Energy distribution function for electrons in $SF_6-Ar$ mixtures gas used by Simulation has been analysed over the E/N range 30${\sim}$300[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6-Ar$ mixtures were measured by time-of-flight (TOF) method. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

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Study on the electron transport properties in $SF_6$+He mixtures gas used by MCS-BE ($SF_6$+He 혼합기체의 MCS-BE에 의한 전자수송계수 연구)

  • Kim, Sang-Nam;Seo, Sang-Hyeon;Ha, Sung-Chul;Yu, Heoi-Young;Song, Byung-Doo
    • Proceedings of the KIEE Conference
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    • 1999.11a
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    • pp.16-19
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    • 1999
  • This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

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Energy Distribution Function for Electrons in $SF_6+Ar$ Mixtures Gas used by MCS-BEq Algorithm (MCS-BEq에 의한 $SF_6+Ar$ 혼합기체의 에너지 분포함수)

  • Kim, Sang-Nam;Ha, Sung-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.878-881
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    • 2002
  • Energy distribution function for electrons in $SF_6+Ar$ mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range 30 ~ 300[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6+Ar$ mixtures were measured by time-of-flight(TOF) method, The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

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