Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07b
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- Pages.878-881
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- 2002
Energy Distribution Function for Electrons in $SF_6+Ar$ Mixtures Gas used by MCS-BEq Algorithm
MCS-BEq에 의한 $SF_6+Ar$ 혼합기체의 에너지 분포함수
Abstract
Energy distribution function for electrons in
Keywords