• Journal of the Microelectronics and Packaging Society
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• v.16 no.3
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• pp.19-24
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• 2009

Formation of an adhesion/barrier layer and a seed layer by sputtering techniques followed by electroplating has been one of the most widely used methods for the filling of through-Si via (TSV) with high aspect ratio for 3-D packaging. In this research, the adhesion and diffusion-barrier properties of the $TaN_x$ film deposited by reactive sputtering were investigated. The adhesion strength between Cu film and $SiO_2$/Si substrate was quantitatively measured by $180^{\circ}$ peel test and topple test as a function of the composition of the adhesive $TaN_x$ film. As the nitrogen content increased in the adhesive $TaN_x$ film, the adhesion strength between Cu and $SiO_2$/Si substrate increased, which was attributed to the increased formation of interfacial compound layer with the nitrogen flow rate. We also examined the diffusion-barrier properties of the $TaN_x$ films against Cu diffusion and found that it was improved with increasing nitrogen content in the $TaN_x$ film up to N/Ta ratio of 1.4.

• Journal of the Mineralogical Society of Korea
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• v.24 no.2
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• pp.133-143
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• 2011

In Mujoo area, the granitic pegmatites are developed in the granitic gneiss complex with Jurassic gneissic granites, where Nb-Ta mineralization were reported. Pegmatites are mainly composed of large crystals of quartz, feldspars of end-member orthoclase and albite, and muscovite. Nb-Ta minerals in study area are columbite (Nb > Ta) in composition. Chemistry of muscovites shows post-magmatic in origin and they are closely related with columbite. Large columbite, in pegmatites occurred with quartz and feldspars, while microcrystalline columbite is associated with muscovite. The Nb contents in large columbite are relatively higher than those in microcrystalline ones. Two pegmatites, 4~15 m in width and 120 m, 250 m in extension respective1y, are developed. Five drilling cores with total 600 m in length are finally obtained and revealed no possible potential for economic rare metals of Na-Ta deposits.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.4
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• pp.159-163
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• 2003

ln this work, we studied electrical characteristics and leakage current mechanism of $Ta_2O_{5}$ MOS(Metal-Oxide-Semiconductor) devices. $Ta_2O_{5}$ thin film (63 nm) was deposited by ALD(Atomic Layer Deposition) method at temperature of 235 $^{\circ}C$. The structures of the $Ta_2O_{5}$ thin films were examined by XRD(X-Ray Diffraction). From XRD, it is found that the structure of $Ta_2O_{5}$ is single phase and orthorhombic. From capacitance-voltage (C-V) anaysis, the dielectric constant was 19.4. The temperature dependence of current density-electric field (J-E) characteristics of $Ta_2O_{5}$ thin film was studied at temperature range of 300 - 423 K. In ohmic region (<0.5 MV/cm), the resistivity was 2.456${\times}10^{14}$ ($\omega{\cdot}cm$ at 348 K. The Schottky emission is dominant at lower temperature range from 300 to 323 K and Poole-Frenkel emission is dominant at higher temperature range from 348 to 423 K.

• Journal of Oral Medicine and Pain
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• v.15 no.1
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• pp.125-132
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• 1991

We have previously reported that simulated snuff dipping in conjunction with type I herpes simplex virus (HSV-1) induced oral malignant changes in hamsters. Present study was designed to investigate the carcinogenic effect of tobacco specific-N-nitrosamines (TSNAs) and HSV-1, alone or in combination, in hamsters. Hamsters were divided into 6 groups and the right buccal pouch mucosa were treated as follows: Grp 1, Control (Mock inoculation) [MI]+Topical Application [TA] of mineral oil[MO] : Grp 2, TA of 1% n'- nitrosonornicotine [NNN] + IM: Grp3, TA of 1% 4-N-nitrosomethylamino-1- (3-pyridyl)-1-butanone [NNK] + MI: Grp 4, HSV-1 inoculation [HI]+TA of MO : Grp 5, TA of 1% N-nitrosonornicotine [NNN] + HI: Grp 6, TA of 1% NNK + HI. TA of MO or TSNAs was initiated 1 day after the MI or HI and given 3 times per week for 20 consecutive weeks. At the buccal pouches were fixed for light microscope examination. No animal s developed tumors or malignant histopathologic changes in the mucosa of the buccal pouches. These data indicate that individual TSNAs, alone or in conjunction with HSV-1 infection, do not develop malignant changes in hamster buccal pouches.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.157-159
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• 2005

MOS capacitors were fabricated to study electrical and chemical properties of Ta-Mo metal alloy with $ZrO_2$. The work function of Ta-Mo alloy were varied from 4.1eV to 5.1eV by controlling the composition. When the atomic composition of Mo is 10%, good thermal stability up to $800^{\circ}C$ was observed and work function of MOS capacitor was 4.1eV, compatible for NMOS application. But pure Ta exhibited very poor thermal stability. After $600^{\circ}C$ annealing, equivalent oxide thickness of tantalum gate MOS capacitor was continuously decreased. Barrier heights of Ta-Mo alloy and pure metal that supported the work function values were calculated from Fowler-Nordheim analysis. As a result of these electrical?experiments, Ta-Mo metal alloy with $ZrO_2$ is excellent gate electrode for NMOS.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.7 no.3
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• pp.454-460
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• 2003

The modulated frequency dependence on the pyroelectric properties of LiTaO$_3$ single crystal was investigated by the dynamic method. The pyroelectric coefficient of LiTaO$_3$ single crystal was 2.1${\times}$$10^{-8}$/$\textrm{cm}^2$ㆍK. and figure of merits for the responsivity and the detectivity were 1.31${\times}$$10^{-10}$Cㆍcm/J and 1.47${\times}$$10^{-8}$C\ulcornercm/J. respectively. The voltage responsivity corresponded with the pyroelectric voltage exhibited the highest value as about 165V /W at 4Hz and then was in inverse proportion to the frequency over 20Hz. The noise equivalent power and the detectivity at 4Hz were 8.4${\times}$$10^{-9}$ W/Hz$^{1}$2/ and 2.2${\times}$$10^{7}$ cmㆍHz$^{1}$2//W, respectively. Therefore, we could found that LiTaO$_3$ single crystal shows a excellent pyroelectric properties in low frequency region for the human body detection.tection.

• Korean journal of food and cookery science
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• v.16 no.5
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• pp.385-389
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• 2000

Desmutagenic effects of water-soluble and water-insoluble fractions from Aloe vera and Aloe avoresence with different solvents against the mutagenicity of 4-nitro-o-phenylenediamine(NPD) were investigated. Desmutagenic effects of water-insoluble fractions from Aloe vera and Aloe avoresence against NPD-induced mutations in TA97 and TA98 strains were very high compared with water-soluble fractions: whereas water-soluble fractions from two kinds of Aloes showed the inhibition effects of 4∼56% water-insoluble fractions showed the activities of 54∼100% for Aloe vera and 74∼100% for Aloe avoresence. Especially, the addition of 20 $\mu$ι of water-insoluble fractions per plate showed high activities up to 90% in TA97 and TA98 strains.

• Journal of the Korean Society of Food Science and Nutrition
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• v.26 no.3
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• pp.528-533
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• 1997

This study was undertaken to determine the antimutagenic effects of Synurus deltoides extracts on the mutagenesis induced by 3-amino-1, 4-dimethyl-5-H-pyrido[4, 3-blindol(Trp-P-1), 2-amitnofluorene (2-AF) and 4-nitroquinolin-1-oxide(4NQO) using Ames test. Raw juice, heated juice, and ethanol extract from Synurus deltoides itself did not induce mutagenesis. The raw juice, heated juice and ethanol extract of 50${mu}ell$/plate showed approximately 90%, 37% and 28% inhibitory effect on the mutagenesis induced by Trp-P-1 against TA98 strain, while 80%, 60% and 58% inhibition was observed on the mutagenesis induced by 2-AF at the concentration of 200${mu}ell$/plate, respectively. TA100 strain was more sensitive than TA98 strain by raw juice, heated juice and ethanol extract on the mutagenesis induced by Trp-P-1 and 2-AF. Meanwhile, the raw juice, heated juice, and ethanol extract showed very limited inhibitory effects on the mutagenesis induced by 4-NQO against TA98 and TA100 strain. These results indicate that raw juice had the strongest inhibitory effect on the Trp-P-1 or 2-AF induced mutagenesis, but all of the extracts had a little antimutagenc effects on the 4-NQO induced mutagenesis.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2003.11a
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• pp.185-190
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• 2003

고유전물질인 $HfO_2$ 극박막에 사용될 TaN metal 전극에 대한 특성에 대한 연구를 하였다. 고유전물질인 $HfO_2$는 4" p-type wafer를 SCI cleaning후 ALD(atomic layer deposition)을 통해 $50\AA$를 증착하였다. Ff source는 TEMAH를 이용하였으며 Oxygen source는 $H_2O$를 이용하였다. 이렇게 증착한 $HfO_2$ 극박막에 Ta target을 이용하여 질소 가스를 Ar가스에 첨가하여 reactive sputtering을 통해서 TaN 전극을 증착하였다. TaN 박막의 증착두께는 a--step과 TEM을 통해서 확인하였으며 면저항은 four point probe를 이용하여 측정하였다. 이렇게 증착된 $HfO_2/TaN$구조에 대한 전기적 특성을 측정하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.335-340
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• 2013

In this study, the plasma etching of the TaN thin film with $CH_4/BCl_3/Ar$ gas chemistries was investigated. The etch rate of the TaN thin film and the etch selectivity of TaN to $SiO_2$ was studied as a function of the process parameters, including the amount of $CH_4$. X-ray photoelectron spectroscopy (XPS) and Field-emission scanning electron microscopy (FE-SEM) was used to investigate the chemical states of the surface of the TaN thin film.